本文選題：壓電材料 + 縱向應(yīng)變常數(shù)d_(33)　； 參考：《北京化工大學(xué)》2015年碩士論文

【摘要】：壓電材料是一種能夠?qū)崿F(xiàn)電能與機械能相互轉(zhuǎn)化,具有壓電效應(yīng)的功能性材料,被廣泛應(yīng)用于無損檢測、通訊技術(shù)、生物醫(yī)療、軍事科技等領(lǐng)域。壓電材料質(zhì)量的好壞直接決定了系統(tǒng)能量轉(zhuǎn)換的性能,評價壓電材料質(zhì)量的特征參數(shù)包括縱向應(yīng)變常數(shù)、介電常數(shù)、機電耦合系數(shù)、機械品質(zhì)因數(shù)等,其中縱向應(yīng)變常數(shù)d33是關(guān)鍵性指標之一,它不僅描述了壓電材料換能效率的高低,還反映出彈性性質(zhì)與介電性質(zhì)之間的耦合關(guān)系。因此,準確測量壓電材料的縱向應(yīng)變常數(shù)d33尤為重要。壓電材料縱向應(yīng)變常數(shù)d33的測量方法分為接觸式測量和非接觸式測量。接觸式測量不僅會破壞材料表面,還會降低測量精度。激光干涉法作為非接觸式測量的一種,以其非接觸、可溯源性、高精度等優(yōu)點,被廣泛應(yīng)用于微小動態(tài)位移的測量。本文針對現(xiàn)有接觸式測量儀器精度較低的現(xiàn)狀,擬通過研究激光干涉法測量壓電材料縱向應(yīng)變常數(shù)的影響因素和不確定度評估,探討建立壓電材料縱向應(yīng)變常數(shù)標準裝置的可行性。在建立激光干涉法測量系統(tǒng)的基礎(chǔ)上,研究了壓電材料縱向應(yīng)變常數(shù)d33的影響因素、測量不確定度、方法間的一致性等問題。主要工作包括：1、通過激光干涉光路的搭建、正交信號的獲取、多普勒信號的解調(diào),建立了壓電材料縱向應(yīng)變常數(shù)d33的激光外差干涉法測量系統(tǒng)。詳細分析了縱向應(yīng)變常數(shù)的影響因素,包括激勵場強、頻率、電極、溫度等,并對激光干涉法測量系統(tǒng)進行了不確定度的評估。2、對比激光干涉法和準靜態(tài)法的測量結(jié)果,從縱向應(yīng)變常數(shù)d33的定義出發(fā),分析和探討了正、逆壓電效應(yīng)下縱向應(yīng)變常數(shù)d33之間的一致性以及差異原因。3、研究結(jié)果表明,在遠離諧振頻率點以下,縱向應(yīng)變常數(shù)d33隨著激勵頻率的增加基本保持不變；在激勵場強遠小于極化場強時,硬質(zhì)壓電陶瓷縱向應(yīng)變常數(shù)d33不隨激勵場強而改變,而軟質(zhì)壓電陶瓷縱向應(yīng)變常數(shù)d33與激勵場強存在線性關(guān)系；材料均勻性和極化程度的不同,以及測量時約束條件的制約,壓電材料表面各處縱向應(yīng)變常數(shù)d33數(shù)值往往并不相等,通常呈現(xiàn)中心處數(shù)值最小,邊緣處數(shù)值最大；對激光外差干涉測量法不確定度評定結(jié)果表明,在10nm-150nm范圍內(nèi),縱向應(yīng)變常數(shù)d33測量不確定度優(yōu)于2.30%；方法之間的一致性研究表明,正逆壓電效應(yīng)下的,激光干涉法測量結(jié)果略大于準靜態(tài)法測量結(jié)果,且更接近材料真實d33值,激光干涉法可以作為一種絕對校準方法,給壓電材料的縱向應(yīng)變常數(shù)賦值,并用于準靜態(tài)儀器的校準。
[Abstract]:Piezoelectric material is a kind of functional material which can realize the mutual conversion of electrical energy and mechanical energy and has piezoelectric effect. It is widely used in nondestructive testing, communication technology, biomedicine, military science and technology and so on.The quality of piezoelectric material directly determines the energy conversion performance of the system. The characteristic parameters for evaluating the quality of piezoelectric material include longitudinal strain constant, dielectric constant, electromechanical coupling coefficient, mechanical quality factor, etc.The longitudinal strain constant D33 is one of the key indexes. It not only describes the energy transfer efficiency of piezoelectric materials, but also reflects the coupling relationship between elastic properties and dielectric properties.Therefore, it is very important to accurately measure the longitudinal strain constant d 33 of piezoelectric materials.The measuring methods of longitudinal strain constant d 33 of piezoelectric materials can be divided into contact measurement and non-contact measurement.Contact measurement will not only destroy the surface of the material, but also reduce the measurement accuracy.As a kind of non-contact measurement, laser interferometry is widely used in the measurement of small dynamic displacement because of its advantages of non-contact, traceability and high accuracy.In view of the low precision of the existing contact measuring instruments, this paper intends to study the factors affecting the measurement of longitudinal strain constants of piezoelectric materials by laser interferometry and the evaluation of the uncertainty.The feasibility of establishing a standard device for longitudinal strain constants of piezoelectric materials is discussed.Based on the laser interferometry measurement system, the factors affecting the longitudinal strain constant d33 of piezoelectric materials, the uncertainty of measurement, and the consistency among the methods are studied.The main work includes: 1. The laser heterodyne interferometry measuring system of piezoelectric material longitudinal strain constant D33 is established by constructing the laser interference optical path obtaining the orthogonal signal and demodulating the Doppler signal.The influence factors of longitudinal strain constant, including excitation field strength, frequency, electrode, temperature and so on, are analyzed in detail. The uncertainty of laser interferometry measurement system is evaluated. The results of laser interferometry and quasi-static method are compared.Based on the definition of longitudinal strain constant D33, the consistency of longitudinal strain constant D33 and the cause of the difference under positive and inverse piezoelectric effects are analyzed and discussed. The results show that it is below the resonant frequency point.The longitudinal strain constant d33 remains basically unchanged with the increase of excitation frequency, and the longitudinal strain constant d33 of hard piezoelectric ceramics does not change with the excitation field strength when the excitation field intensity is much smaller than that of polarization field.The longitudinal strain constant D33 of soft piezoelectric ceramics is linearly related to the excitation field strength, and the values of the longitudinal strain constant d33 are not always equal due to the difference of material uniformity and polarization, and the restriction of measurement conditions.In general, the center value is the smallest and the edge value is the largest. The evaluation results of the uncertainty of the laser heterodyne interferometry show that the uncertainty of the longitudinal strain constant d33 is better than 2.30 in the 10nm-150nm range.Under the positive and inverse piezoelectric effect, the measured results by laser interferometry are slightly larger than those by quasi-static method, and are closer to the true D33 value of materials. Laser interferometry can be used as an absolute calibration method to assign the longitudinal strain constants of piezoelectric materials.And used for the calibration of quasi-static instruments.
【學(xué)位授予單位】：北京化工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TB34;TN249

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本文編號：1763501