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納米鐵磁金屬粉體及鐵氧體薄膜微波磁共振特性研究

發(fā)布時(shí)間:2019-07-01 12:44
【摘要】:微波磁性材料可以用作屏蔽材料、雷達(dá)吸波材料以及整合到多種高頻微波器件中,根據(jù)應(yīng)用背景,對(duì)微波磁性能提出了各種要求,進(jìn)而推動(dòng)了相關(guān)基礎(chǔ)理論研究。微波磁共振研究的核心內(nèi)容是結(jié)合材料的結(jié)構(gòu)、性能,構(gòu)建磁共振物理模型,推導(dǎo)材料的靜態(tài)與動(dòng)態(tài)磁性參數(shù)間的定量關(guān)系,從而為微波磁性材料的分析和設(shè)計(jì)提供理論指導(dǎo)。材料的形狀和尺寸對(duì)微波磁譜有著重要的影響。當(dāng)理論推導(dǎo)形狀各向異性磁性粉體復(fù)合物的等效電磁參數(shù)時(shí),需要考慮顆粒的的形狀及取向情況對(duì)本征磁導(dǎo)率表達(dá)式以及有效媒質(zhì)公式的影響。但是現(xiàn)有的計(jì)算方法過于復(fù)雜,不利于指導(dǎo)材料設(shè)計(jì)。當(dāng)材料尺寸降到納米量級(jí)時(shí),通常呈現(xiàn)出多共振吸收峰,此時(shí)傳統(tǒng)塊材的共振模型將無法予以解釋,自旋波理論(交換共振模式)填補(bǔ)了這一空白。但是到目前為止,有關(guān)納米鐵磁顆粒間的磁偶極相互作用對(duì)微波共振磁譜的影響研究相對(duì)比較薄弱。此外,本文首次發(fā)現(xiàn)采用水熱合成技術(shù)制備的納米自組裝結(jié)構(gòu)的微米尺度鐵磁金屬粉體同樣可以激發(fā)出多共振吸收峰,有必要結(jié)合現(xiàn)有理論進(jìn)行更深入的分析。阻尼因子是影響微波共振磁譜特性的一個(gè)重要無量綱系數(shù)。隨著與磁性薄膜鐵磁共振密切相關(guān)的自旋電子學(xué)的深入研究,要求薄膜在納米厚度的同時(shí)保證有足夠小的阻尼因子。釔鐵石榴石(YIG)鐵氧體是目前已知所有磁性材料中阻尼系數(shù)最小的材料之一,如果通過磁控濺射成功制備出具有低阻尼系數(shù)的納米YIG薄膜,對(duì)實(shí)現(xiàn)基于YIG薄膜的自旋電子器件的商業(yè)化應(yīng)用具有重要的現(xiàn)實(shí)意義。本文正是針對(duì)上述問題,進(jìn)行相應(yīng)的闡述。主要研究工作分為如下四個(gè)部分:1.各相關(guān)參變量對(duì)薄膜及粉體復(fù)合材料微波磁譜的影響研究。(1)根據(jù)外加靜磁場,微波場與各向異性場(不含退磁場)之間的角度關(guān)系,推導(dǎo)薄膜磁性材料的磁譜及磁共振表達(dá)式。(2)根據(jù)片狀鐵磁顆粒在基體中的取向情況,構(gòu)建磁結(jié)構(gòu)物理模型。結(jié)合吉爾伯特方程,采用雙坐標(biāo)系的處理方法,推導(dǎo)出更加簡潔的本征磁譜表達(dá)式,進(jìn)而為納米鐵磁顆粒的微波磁譜計(jì)算提供了簡便的渠道。(3)結(jié)合修正后的Maxwell-Garnett有效媒質(zhì)公式進(jìn)行復(fù)合物微波磁譜的仿真計(jì)算,直觀反映出微波磁導(dǎo)率與參變量間的相互關(guān)系,并得到實(shí)驗(yàn)驗(yàn)證,為高頻磁性材料的設(shè)計(jì)提供更準(zhǔn)確的理論依據(jù)。2.納米尺度粉體及薄膜磁性材料的微波多共振特性補(bǔ)充研究。(1)首先概述了納米磁性粉體與薄膜的多共振機(jī)理。通過機(jī)械攪拌的方式成功實(shí)現(xiàn)了納米尺度鐵(Fe)粉在粘結(jié)劑石蠟中高度均勻的混合,為準(zhǔn)確分析納米復(fù)合材料的微波多共振磁譜特性提供了可能。(2)首次引入納米顆粒間的磁偶極相互作用分析研究納米尺度Fe粉在厘米波段(0.5GHz-18GHz)和毫米波段(26GHz-40GHz)的動(dòng)態(tài)磁化行為,進(jìn)一步完善了納米磁結(jié)構(gòu)的共振機(jī)制。(3)實(shí)驗(yàn)發(fā)現(xiàn)在微米尺度Fe中添加適當(dāng)比例的納米Fe,在增強(qiáng)的磁偶極相互作用下,有助于提高在較低頻段(0.5GHz-2GHz)的磁導(dǎo)率,這為解決電磁波在低頻段的吸收瓶頸問題提供了一種思路。3.含有納米結(jié)構(gòu)單元的微米尺度鐵磁金屬粉體的多共振機(jī)制研究。(1)采用水熱合成方式制備了多種納米自組裝結(jié)構(gòu)的微米尺度鐵磁金屬粉體,它們?cè)谖⒉l段都激發(fā)出了多共振吸收峰。本文探索性將交換共振模式移植到納米結(jié)構(gòu)單元,豐富了非一致進(jìn)動(dòng)共振模式的研究內(nèi)容。(2)結(jié)合吉爾伯特方程,采用多共振峰疊加的思路推導(dǎo)了Ni納米薄帶粉體多共振模式下的磁譜表達(dá)式,理論值與實(shí)驗(yàn)結(jié)果比較吻合,證實(shí)了這一理論計(jì)算方法的合理性。4.磁控濺射沉積低阻尼YIG鐵氧體納米薄膜的微波鐵磁共振特性及與其相關(guān)的自旋電子效應(yīng)研究。(1)通過優(yōu)化磁控濺射的沉積工藝條件,在Gd3Ga5O12(GGG)襯底上制備了低阻尼系數(shù)的YIG納米薄膜。與目前普遍采用的脈沖激光沉積(PLD)工藝相比,不僅具有相當(dāng)?shù)腇MR線寬,而且薄膜的均勻性和結(jié)果的可重復(fù)性都要優(yōu)于PLD薄膜。與此同時(shí),嘗試了在金屬底電極HEAN-Cu-HEAN(HCH)上沉積相對(duì)高質(zhì)量的YIG納米薄膜,為實(shí)現(xiàn)將YIG薄膜用于商業(yè)低損耗微波單片集成器件中奠定了基礎(chǔ)。(2)在較高Ar氣流速(16sccm)及高溫沉積(750oC)條件下,YIG納米薄膜表面存在大量突起的晶粒,導(dǎo)致表面粗糙度變大,產(chǎn)生雙磁散射過程。這不僅擴(kuò)展了FMR線寬,而且對(duì)依賴于界面條件的自旋電子效應(yīng)也產(chǎn)生不利影響。(3)YIG/Pt結(jié)構(gòu)的逆自旋霍爾效應(yīng)(ISHE)電壓的測量結(jié)果表明:與采用PLD工藝制備的YIG/Pt相比,ISHE電壓信號(hào)有顯著提升,促進(jìn)了基于YIG自旋電子學(xué)的深入研究。此外,測試發(fā)現(xiàn)基于自旋泵效應(yīng)而提高的阻尼系數(shù)要低于實(shí)驗(yàn)測量結(jié)果,從另一側(cè)面證實(shí)了近鄰磁化效應(yīng)(MPE)的存在。
[Abstract]:The microwave magnetic material can be used as a shielding material, a radar wave-absorbing material and a whole-in-to-many high-frequency microwave devices. The core content of the microwave magnetic resonance study is to combine the structure and performance of the material, to construct the magnetic resonance physical model, to derive the quantitative relation between the static and dynamic magnetic parameters of the material, so as to provide the theoretical guidance for the analysis and design of the microwave magnetic material. The shape and size of the material have an important influence on the microwave magnetic spectrum. When the equivalent electromagnetic parameters of the anisotropic magnetic powder composites are derived theoretically, the influence of the shape and orientation of the particles on the intrinsic permeability and the effective medium formula needs to be taken into account. However, the existing calculation method is too complicated to guide the material design. When the size of the material drops to the nanometer level, a multi-resonance absorption peak is usually present, at which time the resonance model of the conventional block will not be explained, and the spin-wave theory (switched resonance mode) fills this gap. So far, the influence of the magnetic dipole interaction between the nano-ferromagnetic particles on the microwave resonance magnetic spectrum is relatively weak. In addition, this paper first finds that the nano-scale ferromagnetic metal powder prepared by the hydrothermal synthesis technology can also excite the multi-resonance absorption peak, and it is necessary to carry out more in-depth analysis in combination with the existing theory. The damping factor is an important dimensionless factor that affects the properties of the microwave resonant magnetic spectrum. With the in-depth study of the spin electronics, which is closely related to the magnetic resonance of the magnetic thin film, the film is required to have a sufficiently small damping factor at the same time as the nano-thickness. The iron garnet (YIG) ferrite is one of the materials currently known to have the least damping coefficient in all the magnetic materials, and if the nano-YIG film with the low damping coefficient is successfully prepared by magnetron sputtering, It is of great practical significance to realize the commercial application of the spin electronic device based on the YIG film. In this paper, the above-mentioned problems are set forth in this paper. The main research work is divided into four parts:1. The influence of each related parameter on the microwave magnetic spectrum of the thin film and the powder composite was studied. (1) according to the angle relation between the applied static magnetic field, the microwave field and the anisotropic field (excluding the demagnetizing field), the magnetic spectrum and the magnetic resonance expression of the thin-film magnetic material are deduced. And (2) constructing a magnetic structure physical model according to the orientation of the flaky ferromagnetic particles in the matrix. In combination with the Gilbert's equation, a more concise intrinsic magnetic spectrum expression is derived by using a two-coordinate system, and a simple channel is provided for the calculation of the microwave magnetic spectrum of the nano-ferromagnetic particles. And (3) combining the modified Maxwell-Garnett effective medium formula to carry out the simulation calculation of the complex microwave magnetic spectrum, and the mutual relation between the microwave permeability and the parametric variable is directly reflected, and the experimental verification is obtained, so that a more accurate theoretical foundation is provided for the design of the high-frequency magnetic material. Study on microwave multi-resonance characteristics of nano-scale powder and thin-film magnetic material. (1) The multi-resonant mechanism of the nano-magnetic powder and the thin film is introduced first. By means of mechanical stirring, the highly uniform mixing of the nano-scale iron (Fe) powder in the binder paraffin is realized, and it is possible to accurately analyze the properties of the microwave multi-resonant magnetic spectrum of the nanocomposite. (2) The dynamic magnetization behavior of the nano-scale Fe powder in the centimeter wave band (0.5 GHz to 18 GHz) and the millimeter wave band (26 GHz to 40 GHz) is studied by the magnetic dipole interaction analysis between the nano-particles for the first time, and the resonance mechanism of the nano-magnetic structure is further improved. (3) The experiment shows that the proper proportion of the nano-Fe is added to the micro-scale Fe, and the magnetic permeability of the lower-frequency section (0.5 GHz-2 GHz) can be improved under the enhanced magnetic dipole interaction, which provides a thought for solving the problem of the absorption bottleneck of the electromagnetic wave in the low-frequency section. Multi-resonant mechanism of micro-scale ferromagnetic metal powders containing nano-structural units. (1) The micro-scale ferromagnetic metal powder with various self-assembled structures is prepared by hydrothermal synthesis, and the multi-resonance absorption peak is excited in the microwave frequency band. In this paper, the exchange resonance mode is transferred to the nano-structure unit, and the research content of the non-uniform precession resonance mode is enriched. (2) In combination with the Gilbert equation, the magnetic spectrum expression in the multi-resonant mode of the Ni-nano-thin-band powder is derived by using the method of superposition of the multi-resonance peaks, and the theoretical value is in good agreement with the experimental results, and the rationality of the theoretical calculation method is proved. Magnetic resonance and spin-electron effect of a low-damping YIG ferrite nano-film deposited by magnetron sputtering. (1) a YIG nano-film with low damping coefficient is prepared on a Gd3Ga5O12 (GGG) substrate by optimizing the deposition process conditions of the magnetron sputtering. Compared with the currently used pulse laser deposition (PLD) process, not only has the equivalent FMR line width, but also the uniformity of the film and the repeatability of the result are better than that of the PLD film. At the same time, a relatively high quality of YIG nano-film is deposited on the HEAN-Cu-HEAN (HCH) of the metal bottom electrode, which lays a foundation for realizing the use of the YIG thin film in a commercial low-loss microwave monolithic integrated device. (2) Under the condition of higher Ar gas flow rate (16 sccm) and high temperature deposition (750oC), the surface roughness of the YIG nano-film is increased and the double-magnetic scattering process is generated. This not only extends the FMR line width, but also has an adverse effect on the spin-electron effect depending on the interface conditions. (3) The measurement of the anti-spin Hall effect (ISHE) voltage of the YIG/ Pt structure shows that the ISHE voltage signal is obviously improved compared with the YIG/ Pt prepared by the PLD process, and the in-depth study based on the YIG spin electronics is promoted. In addition, the test shows that the damping coefficient, which is improved based on the spin-pump effect, is lower than the experimental measurement, and the existence of the neighbor magnetization effect (MPE) is confirmed from the other side.
【學(xué)位授予單位】:電子科技大學(xué)
【學(xué)位級(jí)別】:博士
【學(xué)位授予年份】:2014
【分類號(hào)】:TM27

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