【摘要】：為抑制負(fù)載擾動對恒流控制的影響,針對等離子體負(fù)載需求,提出一種基于前饋控制的等離子體電源恒流控制策略。首先根據(jù)恒流源的開環(huán)傳遞矩陣,探討輸出導(dǎo)納對恒流電源負(fù)載擾動的影響機(jī)理,然后在分析等離子體負(fù)載模型以及電弧放電所帶來的負(fù)載擾動問題的基礎(chǔ)上,將電壓前饋控制引入電流閉環(huán)中。從降低恒流控制變換器的等效導(dǎo)納的角度,進(jìn)行電壓前饋補(bǔ)償函數(shù)的設(shè)計,并分析負(fù)載模型參數(shù)對前饋補(bǔ)償函數(shù)的影響,對比引入電壓前饋控制前后負(fù)載擾動的噪聲衰減情況。仿真和實驗結(jié)果表明,基于前饋控制的等離子體電源恒流控制策略能有效抑制等離子體負(fù)載突變對恒流輸出的擾動,改善了恒流控制系統(tǒng)的動態(tài)響應(yīng)性能,并對減少濺射鍍層缺陷、提高膜層質(zhì)量有良好的效果。
[Abstract]:In order to restrain the influence of load disturbance on constant current control, a constant current control strategy for plasma power supply based on feedforward control is proposed to meet the demand of plasma load. Based on the open-loop transfer matrix of the constant current source, the influence mechanism of the output admittance on the load disturbance of the constant current power supply is discussed. Then, based on the analysis of the plasma load model and the load disturbance caused by the arc discharge, the influence mechanism of the output admittance on the load disturbance of the constant current power supply is discussed. The voltage feedforward control is introduced into the current closed loop. In order to reduce the equivalent admittance of the constant current control converter, the voltage feedforward compensation function is designed, and the influence of load model parameters on the feedforward compensation function is analyzed. The noise attenuation of the load disturbance before and after the introduction of voltage feedforward control is compared. The simulation and experimental results show that the constant current control strategy based on feedforward control can effectively suppress the constant current output disturbance caused by the sudden change of plasma load and improve the dynamic response performance of the constant current control system. It has a good effect on reducing the defects of sputtering coating and improving the quality of the film.
【作者單位】： 西安理工大學(xué)自動化與信息工程學(xué)院;
【基金】：國家自然科學(xué)基金青年科學(xué)基金資助項目(51307139)
【分類號】：TM46;O539

【相似文獻(xiàn)】

相關(guān)期刊論文 前3條

1 李戰(zhàn)國;徐偉;;一類新離散混沌系統(tǒng)的前饋控制方法[J];工程數(shù)學(xué)學(xué)報;2011年04期

2 龔禮華;一種前饋控制混沌的方法[J];北京師范大學(xué)學(xué)報(自然科學(xué)版);2004年02期

3 于強(qiáng);俞號峰;劉威;;空間晶體生長爐綜合控制方法[J];空間科學(xué)學(xué)報;2011年01期

相關(guān)碩士學(xué)位論文 前2條

1 修瑛;獵雷聲納基陣姿態(tài)穩(wěn)定系統(tǒng)智能控制研究[D];哈爾濱工程大學(xué);2006年

2 董高高;關(guān)于Sudden Occurrence Chaos控制及同步的研究[D];江蘇大學(xué);2008年

，

本文編號：2390735