本文選題：振動　切入點(diǎn)：壓電式　出處：《中北大學(xué)》2014年碩士論文

【摘要】：無線傳感網(wǎng)絡(luò)節(jié)點(diǎn)的供電問題是影響無線傳感網(wǎng)絡(luò)發(fā)展的重要因素，傳統(tǒng)電池供電存在體積大、壽命短等問題，無法滿足傳感網(wǎng)絡(luò)節(jié)點(diǎn)對高性能供電電源的要求。振動式能量采集微能源具有高能量密度、長壽命、無污染、較強(qiáng)環(huán)境適應(yīng)能力、易實(shí)現(xiàn)微小型化等優(yōu)勢，有望為海量無線網(wǎng)絡(luò)傳感節(jié)點(diǎn)提供穩(wěn)定、可靠的能源供應(yīng)。 本文研究的基于四懸臂梁-中心質(zhì)量塊基礎(chǔ)結(jié)構(gòu)MEMS壓電-磁電復(fù)合式微能源器件可實(shí)現(xiàn)機(jī)械振動能-電能的轉(zhuǎn)化，將壓電發(fā)電與磁電發(fā)電兩種能量轉(zhuǎn)換方式相結(jié)合，提高了器件整體輸出能量；采用的四懸臂梁-中心質(zhì)量塊基礎(chǔ)結(jié)構(gòu)諧振頻率低，適于低頻振動環(huán)境；通過分離懸臂梁上壓電功能材料互異模態(tài)區(qū)域，實(shí)現(xiàn)壓電敏感單元的串聯(lián)形式以增大壓電輸出能量，提高了系統(tǒng)的總體能源密度與輸出效率，為實(shí)現(xiàn)高輸出能量密度的MEMS微能源器件設(shè)計(jì)拓展了新思路。 本文揭示了振動驅(qū)動下壓電材料機(jī)電轉(zhuǎn)換效應(yīng)及電磁能量轉(zhuǎn)換機(jī)理；構(gòu)建基于四懸臂梁-中心質(zhì)量塊基礎(chǔ)結(jié)構(gòu)的壓電-磁電復(fù)合式微能源器件結(jié)構(gòu)模型，分析PZT壓電敏感單元尺寸參數(shù)與感應(yīng)線圈尺寸參數(shù)對結(jié)構(gòu)輸出性能的影響，結(jié)合MEMS微加工工藝限制條件，對壓電敏感單元和感應(yīng)線圈進(jìn)行了優(yōu)化設(shè)計(jì)，并優(yōu)化設(shè)計(jì)了微能源器件MEMS加工工藝流程和版圖；采用溶膠-凝膠技術(shù)，實(shí)現(xiàn)了厚約2μmPZT壓電薄膜與3英寸Pt(111)/Ti/SiO_2/Si(100)基片的異質(zhì)集成；突破微納制造兼容關(guān)鍵技術(shù)，完成了四懸臂梁-中心質(zhì)量塊基礎(chǔ)結(jié)構(gòu)、感應(yīng)線圈的加工、永久性磁鐵與基礎(chǔ)結(jié)構(gòu)的二次集成，實(shí)現(xiàn)了基于四懸臂梁-中心質(zhì)量塊基礎(chǔ)結(jié)構(gòu)MEMS壓電-磁電復(fù)合式微能源器件的可靠制造；搭建相應(yīng)測試系統(tǒng)，，測試分析了MEMS壓電-磁電復(fù)合式微能源器件的輸出性能。測試結(jié)果表明：微能源器件的諧振頻率為8Hz，在頻率8Hz、加速度6g振動條件下，壓電開路輸出電壓峰-峰值可達(dá)94mV，單個壓電敏感單元單位面積有效輸出電壓達(dá)2.4V/cm~2，磁電開路輸出電壓峰-峰值可達(dá)8mV。
[Abstract]:The power supply problem of wireless sensor network nodes is an important factor affecting the development of wireless sensor network. Traditional battery power supply has the problems of large size and short life. It can not meet the requirements of sensor network nodes for high performance power supply. Vibratory energy acquisition micro-energy has the advantages of high energy density, long life, no pollution, strong adaptability to the environment, easy to realize micro-miniaturization, etc. It is expected to provide stable and reliable energy supply for massive wireless network sensor nodes. In this paper, MEMS piezoelectric / magnetoelectric composite micro-energy device based on four-cantilever beam and central mass block structure can realize the conversion of mechanical vibration energy and electric energy, combining piezoelectric generation with magnetoelectric power generation. The output energy of the device is improved, the resonant frequency of the four-cantilever beam-center mass block foundation is low, which is suitable for the low-frequency vibration environment, and the region of the different modes of piezoelectric functional materials on the cantilever beam is separated. In order to increase the output energy of piezoelectric sensor in series, the total energy density and output efficiency of the system are improved, and a new idea is developed for the design of MEMS micro-energy device with high output energy density. In this paper, the electromechanical conversion effect and electromagnetic energy conversion mechanism of piezoelectric materials driven by vibration are revealed, and the structure model of piezoelectric magnetoelectric composite micro-energy devices based on four-cantilever beam-center mass block foundation is constructed. The effects of the size parameters of PZT piezoelectric sensing unit and induction coil on the output performance of the structure are analyzed. The piezoelectric sensing element and induction coil are optimized and designed in combination with the limiting conditions of MEMS micromachining technology. The fabrication process and layout of micro energy device MEMS are optimized and designed, and the heterogeneous integration of about 2 渭 mPZT piezoelectric thin film with 3 inch Ptt111 / Ti / Si / Si / Si / 100 substrate is realized by using sol-gel technology, and the key technology of micro / nano fabrication compatibility is broken through. Completed four cantilever beam-center mass block infrastructure, induction coil processing, permanent magnet and the secondary integration of the infrastructure, The MEMS piezoelectric / magnetoelectric composite micro-energy device based on the four-cantilever beam-center mass block foundation structure is realized, and the corresponding testing system is built. The output performance of MEMS piezoelectric / magnetoelectric composite micro energy device is measured and analyzed. The results show that the resonant frequency of the micro energy device is 8 Hz, and the frequency is 8 Hz and the acceleration is 6 g. The open circuit output voltage peak of piezoelectric is up to 94 MV, the effective output voltage per unit area of a single piezoelectric sensor is 2.4 V / cm ~ (2), and the peak value of magnetoelectric output voltage is 8 MV.
【學(xué)位授予單位】：中北大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2014
【分類號】：TM619

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