本文選題：駐極體 + 雙極性��； 參考：《杭州電子科技大學(xué)》2017年碩士論文

【摘要】：隨著微機(jī)電系統(tǒng)(MEMS)技術(shù)的快速發(fā)展,MEMS傳感器被廣泛的應(yīng)用于大型橋梁或建筑的安全監(jiān)控、動物跟蹤、無線遙感監(jiān)測等領(lǐng)域,并向低功耗、便攜、自供能等方向發(fā)展。然而,相對滯后的微能源技術(shù)制約著MEMS傳感器的發(fā)展。通過收集周圍環(huán)境中的各種能源(如機(jī)械振動能、太陽能、熱能等)實(shí)現(xiàn)自供能,構(gòu)建“自驅(qū)動系統(tǒng)”,使得分布式的傳感器能夠無源、持續(xù)、免維護(hù)地運(yùn)行成為當(dāng)前研究的熱點(diǎn)�；隈v極體的微振動能量采集器是自驅(qū)動系統(tǒng)微能源領(lǐng)域研究的一個重要方向。駐極體(electret)又名“永電體”,是一種能夠長期儲存空間電荷與偶極電荷并具有持久保持電極化強(qiáng)度的電介質(zhì)材料。靜電效應(yīng)是其具有的基本物理效應(yīng)�；隈v極體的微振動能量采集器正是利用其靜電效應(yīng)在駐極體與電極之間構(gòu)建可變電容,通過外界激勵改變電容量實(shí)現(xiàn)振動能向電能的轉(zhuǎn)換。當(dāng)前駐極體能量采集器的研究主要集中在駐極體材料性能與極化方法、微振動能采集方式、能量采集效率三個方面。在采集器的結(jié)構(gòu)中,一般采用在駐極體材料一面鍍電極的方式,沒有利用駐極體材料正反兩面呈現(xiàn)雙極性的特點(diǎn),因而能量轉(zhuǎn)換效率較低。本文采用具有優(yōu)異電荷存儲性能的FEP/THV/FEP三明治型復(fù)合駐極體薄膜為對象,系統(tǒng)研究了該材料的雙極性分布特性、以及電荷存儲的穩(wěn)定性和均勻性。在此基礎(chǔ)上,提出了基于雙極性駐極體的雙間隙能量采集系統(tǒng)。通過對采集系統(tǒng)工作原理的理論分析,設(shè)計(jì)制備了非諧振式和諧振式兩種振動能量采集器。通過對能量采集器輸出特性的測量分析,研究了影響振動能量采集器輸出功率的因素。所取得的主要結(jié)論如下:(1)通過高溫?zé)釅汗に?將非極性材料FEP與極性材料THV復(fù)合,制備得到了三明治型復(fù)合膜材料FEP/THV/FEP;通過“電暈極化/熱極化/電暈極化”的混合極化方法對復(fù)合膜進(jìn)行注極,制備得到了雙極性復(fù)合駐極體膜。經(jīng)過200h的穩(wěn)定性跟蹤測試表明,駐極體薄膜呈現(xiàn)穩(wěn)定的雙極性特點(diǎn),上下表面平均電位分別為-1230V和910V,表面電荷密度分別為σ1=-3.69mC/m2、σ2=2.74mC/m2。顯示出了優(yōu)異的電荷存儲的穩(wěn)定性。(2)通過自行搭建的二維表面電位分布測量平臺,首次跟蹤測試了三次極化后的三明治型復(fù)合膜材料FEP/THV/FEP表面電位分布的變化情況,得到了極化10.5h及200h后4cm×4cm面積樣品的表面電位分布圖。結(jié)果表明:極化10.5h時后,樣品表面電位集中在核心區(qū)域,表面電位分布均勻,且保持較高的電位;存放200h后,樣品表面電位向周圍擴(kuò)散,分布均勻。上下表面電場極性相反,電位變化規(guī)律相同。(3)設(shè)計(jì)了基于雙極性駐極體的雙空氣間隙非諧振振動能量采集器。采集器中,雙極性駐極體薄膜被放置在上下兩電極中間,在上下電極與駐極體膜之間存在兩層空氣間隙,等效為兩個可變電容串聯(lián)�；诖私Y(jié)構(gòu),建立了數(shù)學(xué)理論模型,推導(dǎo)得到了輸出電壓和電流的表達(dá)式。得出了輸出電壓遵循正弦波特性、輸出電流遵循余弦波特性的結(jié)論。(4)通過自行設(shè)計(jì)的測試平臺,測試了基于雙極性駐極體的雙空氣間隙非諧振振動能量采集器的輸出特性,結(jié)果表明,輸出波特性與理論推導(dǎo)一致,呈現(xiàn)交流波行為。輸出行為經(jīng)二極管整流后,交流輸出信號負(fù)相位部分轉(zhuǎn)換成正相位,并且振幅擴(kuò)大,振動周期加倍。與單氣隙采集器相比,在低頻條件下,能量輸出效率顯著提高。對基于此能量采集結(jié)構(gòu)設(shè)計(jì)制備的電子名片的測試表明,用手指單次觸碰采集器就可點(diǎn)亮液晶屏幕(LCD),顯示了良好的靈敏性。(5)采用在上下電極和駐極體膜之間嵌入微彈簧的方式,制備了諧振式能量采集器。通過對能量采集器的輸出特性測量分析表明,輸出電流、電壓及功率在測量頻率域30HZ~200HZ內(nèi)呈現(xiàn)單峰對稱分布,輸出功率與振動幅度呈現(xiàn)正相關(guān)性;隨駐極體膜表面電位的增大,最大輸出功率增加,最佳振動頻率向高頻方向移動;隨駐極體膜振動面積的增大,輸出功率增加,最佳振動頻率向低頻方向移動;根據(jù)對振動驅(qū)動力與輸出功率相關(guān)性實(shí)驗(yàn)結(jié)果的曲線擬合表明,隨振動驅(qū)動力的增加,輸出功率呈現(xiàn)類指數(shù)式增漲,當(dāng)振動驅(qū)動力為0.5N時,輸出功率為14.1μW,當(dāng)F=2N時,輸出功率高達(dá)11.12mW。由上述工作可得出,基于雙極性駐極體的雙氣隙能量采集系統(tǒng)具有輸出功率高、靈敏度好、制作簡單等優(yōu)點(diǎn)。本論文的工作,將會有力地促進(jìn)駐極體能量采集器研究的發(fā)展,加快微振動能量采集器在“自驅(qū)動系統(tǒng)”中的應(yīng)用進(jìn)程。
[Abstract]:With the rapid development of microelectromechanical system (MEMS) technology, MEMS sensors are widely used in the safety monitoring of large bridges or buildings, animal tracking, wireless remote sensing monitoring and other fields, and are developing in the direction of low power, portable, and self supply. However, the relatively lagged micro energy source technology restricts the development of MEMS sensors. All kinds of energy in the environment (such as mechanical vibration energy, solar energy, heat energy, etc.) realize self supply and build a "self driving system", which makes the distributed sensor passive, continuous and maintenance free. The micro vibration energy collector based on electret is an important part of the research of the micro energy field of the self driving system. The electret (electret), also known as the "permanent electric body", is a dielectric material that can store space charge and dipole charge for a long time and maintain the electrode strength for a long time. The electrostatic effect is the basic physical effect. The micro vibration energy collector based on electret is using its electrostatic effect to construct between the electret and the electrode. At present, the research of the electret energy collector mainly focuses on the three aspects of the electret material performance and polarization method, the micro vibration energy acquisition mode and the energy acquisition efficiency. In the collector structure, the electret material is usually plated on the electret material. In a polar way, the energy conversion efficiency is low by using the positive and negative two sides of the electret material, so the energy conversion efficiency is low. In this paper, the FEP/THV/FEP sandwich composite electret film with excellent charge storage performance is used as the object. The bipolar distribution characteristics of the material and the stability and uniformity of the charge storage are systematically studied. On this basis, a dual gap energy acquisition system based on bipolar electret is proposed. Through the theoretical analysis of the working principle of the acquisition system, two kinds of non resonant and harmonious vibrational energy collector are designed and prepared. The output power of the vibration energy collector is studied by measuring and analyzing the output characteristics of the energy collector. The main conclusions are as follows: (1) the sandwich composite membrane material FEP/THV/FEP was prepared by compounding the non polar material FEP and the polar material THV through the high temperature hot pressing process, and the bipolar composite electret was prepared by the mixed polarization method of "corona polarization / thermal polarization / corona polarization". The stability tracking test of the 200H shows that the electret film shows a stable bipolar characteristic, the average potential of the upper and lower surfaces is -1230V and 910V, the surface charge density is respectively Sigma 1=-3.69mC/m2, and the sigma 2=2.74mC/m2. shows excellent stability of the charge storage. (2) the two-dimensional surface potential distribution is measured by self constructed flat surface. The surface potential distribution of the sandwich composite membrane material FEP/THV/FEP after three polarizations was measured for the first time. The surface potential distribution map of the area samples of 4cm x 4cm after polarization 10.5h and 200H was obtained. The results showed that the surface potential of the sample was concentrated in the core area after polarization 10.5h and 200H, and the surface potential distribution was uniform and maintained. High potential, after storage of 200H, the surface potential of the sample diffuses around and distributes evenly. The electric field polarity is opposite to the upper and lower surface, and the potential change law is the same. (3) a double air gap non resonant vibratory energy collector based on bipolar electret is designed. The bipolar electret film is placed in the middle and down of the two electrodes in the collector. There are two layers of air gap between the pole and the electret film, which is equivalent to two variable capacitance series. Based on this structure, a mathematical model is established and the expression of the output voltage and current is derived. The conclusion is drawn that the output voltage follows the characteristic of the sine wave and the output current follows the Yu Xianbo characteristic. (4) through the self designed test platform, The output characteristics of the dual air gap non resonant vibration energy collector based on the bipolar electret are tested. The results show that the output wave characteristic is consistent with the theoretical deduction and presents the behavior of the AC wave. After the diode rectifier, the negative phase part of the AC output signal is converted into positive phase, and the amplitude of the amplitude is enlarged and the vibration period doubles. The energy output efficiency of the air gap collector is significantly increased in low frequency conditions. The test of the electronic card based on the design of this energy acquisition structure shows that the finger single touch collector can light the liquid crystal screen (LCD), showing good sensitivity. (5) the use of a square spring between the upper and lower electrodes and the electret film is used. The output characteristics of the energy collector show that the output current, the voltage and the power show a single peak symmetry distribution in the measurement frequency domain 30HZ~200HZ, and the output power and the amplitude of the vibration show a positive correlation; with the increase of the surface potential of the electret film, the maximum output power is increased and the optimum vibration is obtained. With the increase of the vibration area of the electret film, the output power increases and the optimum vibration frequency moves to the low frequency direction. According to the curve fitting of the experimental results of the vibration driving force and the output power, the output power presents an exponential increase with the increase of the vibration driving force, when the vibration driving force is 0.5N When the output power is 14.1 u W, when F=2N, the output power is up to 11.12mW. by the above work, the dual air gap energy acquisition system based on bipolar electret has the advantages of high output power, good sensitivity and simple fabrication. The work of this paper will effectively promote the development of the electret energy collector research and accelerate the micro vibration kinetic energy. The application process of volume harvester in self driving system.

【學(xué)位授予單位】：杭州電子科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TM619

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本文編號：1850596