【摘要】：高性能的聚酰亞胺(PI)薄膜以及涂層材料由于具有較強的機械強度、優(yōu)異的耐化學(xué)性、良好的穩(wěn)定性等特征而廣泛應(yīng)用于微電子行業(yè)。然而隨著科技的不斷發(fā)展,傳統(tǒng)的聚酰亞胺薄膜已經(jīng)不能滿足高科技產(chǎn)品對薄膜的性能的要求,研究人員通過優(yōu)化制膜工藝和對薄膜進行納米改性兩個途徑來提高薄膜的性能。然而前者反應(yīng)周期長,投資巨大,對設(shè)備要求高,而后者成本低、見效快,目前已經(jīng)成為制備性能優(yōu)異的聚酰亞胺薄膜的主要途徑。本文采用兩相法成功的制備了油酸(OA)包覆的二氧化鋯(ZrO2)、鈦酸鋇(BaTiO3)、以及水熱法制備了氫氧化鑭(La(OH)3)納米晶,并對ZrO2內(nèi)米晶和BaTiO3納米晶進行了改性,使之與聚酰亞胺能很好的混合,最后制備了PI/ZrO2、PI/BaTiO3、 PI/La(OH)3雜化薄膜。通過透射電子顯微鏡(TEM)、X射線衍射儀(XRD)、臺階儀、掃描電子顯微鏡(SEM)、精密電容電感電阻測試儀(LCR)、傅里葉紅外光譜儀(FTIR)等對納米粒子及聚酰亞胺雜化薄膜進行了測試和表征。并且對所得結(jié)果進行了分析研究。實驗結(jié)果表明：在我們制備的雜化薄膜中,無機納米粒子以顆粒狀均勻的分布在聚酰亞胺基體中。我們合成了介電常數(shù)為6.1的PI/ZrO2雜化薄膜,介電常數(shù)為44的PI/BaTiO3雜化薄膜和介電常數(shù)為4.6的PI/La(OH)3雜化薄膜。雜化膜的介電常數(shù)遠遠高于普通聚酰亞胺薄膜。
[Abstract]:High performance polyimide (PI) films and coatings are widely used in the microelectronics industry due to their strong mechanical strength, excellent chemical resistance and good stability. However, with the development of science and technology, the traditional polyimide films can not meet the performance requirements of high-tech products. Researchers improve the performance of the films by optimizing the process of film preparation and nano-modification of films. However, the former has the advantages of long reaction period, huge investment and high demand for equipment, while the latter has become the main way to prepare excellent polyimide films with low cost and fast efficiency. In this paper, zirconium dioxide (ZrO2), barium titanate (BaTiO3) coated with oleic acid (OA) and lanthanum hydroxide (La (OH) _ 3) nanocrystals were successfully prepared by two-phase method, and the micrite and BaTiO3 nanocrystals in ZrO2 were modified. PI/ZrO2,PI/BaTiO3, PI/La (OH) _ 3 hybrid film was prepared by mixing it well with polyimide. Transmission electron microscope (TEM) (TEM), X ray diffractometer (XRD),) and scanning electron microscope (SEM),) (SEM), precision capacitance inductance resistance tester (LCR),) were used. The nanoparticles and polyimide hybrid films were measured and characterized by Fourier transform infrared spectroscopy (FTIR). The results are analyzed and studied. The experimental results show that the inorganic nanoparticles are uniformly distributed in the polyimide matrix in the hybrid films prepared by our method. We synthesized PI/ZrO2 hybrid films with dielectric constant 6.1, PI/BaTiO3 hybrid films with dielectric constant 44 and PI/La (OH) 3 hybrid films with dielectric constant 4.6. The dielectric constant of hybrid films is much higher than that of ordinary polyimide films.
【學(xué)位授予單位】：長春工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TB383.2

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本文編號：2317521