本文關(guān)鍵詞： 直流電弧等離子噴射 金剛石自支撐膜 高溫紅外透過　出處：《材料工程》2017年02期 　論文類型：期刊論文

【摘要】：由于金剛石具有低吸收和優(yōu)異的力學(xué)與導(dǎo)熱性能使其成為長波(8~12μm)紅外光學(xué)窗口材料的重要選擇。對于許多極端條件的應(yīng)用,化學(xué)氣相沉積(CVD)金剛石自支撐膜的高溫光學(xué)性質(zhì)至關(guān)重要。應(yīng)用直流電弧等離子噴射法制備光學(xué)級金剛石自支撐膜進行變化溫度的紅外光學(xué)透過性能研究,采用光學(xué)顯微鏡、X射線衍射、激光拉曼和傅里葉變換紅外-拉曼光譜儀檢測CVD金剛石膜的表面形貌、結(jié)構(gòu)特征和紅外光學(xué)性能。結(jié)果表明:在27℃時金剛石膜長波紅外8~12μm之間的平均透過率達到65.95%,在500℃時8~12μm處的平均透過率為52.5%。透過率下降可分為3個階段。對應(yīng)于透過率隨溫度的下降,金剛石膜的吸收系數(shù)隨溫度的升高而增加。金剛石自支撐膜表面狀態(tài)的變化,對金剛石膜光學(xué)性能的影響顯著大于內(nèi)部結(jié)構(gòu)的影響。
[Abstract]:Due to its low absorption and excellent mechanical and thermal conductivity, diamond has become an important choice of infrared optical window materials with long wave 810 渭 m. The high temperature optical properties of CVD diamond self-supporting films are very important. The infrared optical transmittance of optical-grade diamond self-supporting films prepared by DC arc plasma spray method is studied. The surface morphology of CVD diamond films was examined by optical microscope X-ray diffraction, laser Raman spectroscopy and Fourier transform infrared Raman spectroscopy. Structural characteristics and infrared optical properties. The results show that the average transmittance of diamond films reaches 65.95 渭 m at 27 鈩，

本文編號：1534333