發(fā)布時間：2018-11-10 12:08

【摘要】：氣體靜壓軸承是超精密機床的重要支撐部件,具有摩擦損耗小、無污染、精度高、壽命長等優(yōu)點。隨著超精密技術(shù)的不斷發(fā)展,對氣體靜壓軸承承載特性、回轉(zhuǎn)精度和穩(wěn)定性的要求也不斷提高。多孔質(zhì)氣體靜壓軸承以其穩(wěn)定性好、承載力高和精度更優(yōu)等特點,正逐步替代小孔節(jié)流形式的靜壓軸承成為國內(nèi)外學(xué)者研究的重點。然而,制造誤差對多孔質(zhì)氣體靜壓軸承靜動態(tài)特性影響規(guī)律的研究仍然存在困難,是進一步提高超精密機床精度亟待解決的問題。針對這一問題,本文在分析國內(nèi)外氣體靜壓軸承的研究理論及方法的基礎(chǔ)上展開研究工作,旨在探求多孔質(zhì)氣體靜壓主軸制造誤差的表征方法、制造誤差對靜動態(tài)特性的影響規(guī)律。本文主要研究內(nèi)容如下:(1)改進了多孔質(zhì)氣體靜壓軸承靜動態(tài)特性的數(shù)值求解方法�；诹黧w力學(xué)基本方程,結(jié)合多孔質(zhì)內(nèi)部流場規(guī)律,建立了多孔質(zhì)氣體靜壓軸承的求解方程;基于流體力學(xué)軟件,建立了多孔質(zhì)氣體靜壓軸承的數(shù)值求解模型;基于動網(wǎng)格技術(shù)改進了軸承轉(zhuǎn)子的動態(tài)回轉(zhuǎn)精度預(yù)測方法,通過將轉(zhuǎn)動速度轉(zhuǎn)化為線速度,添加至Naiver-Stokes方程動量源項的方式解決了回轉(zhuǎn)運動網(wǎng)格畸變問題,實現(xiàn)了對主軸運動過程的動態(tài)模擬,這將有利于推動靜壓軸承的影響規(guī)律的研究工作;(2)研究了制造誤差的表征方法及其對軸承靜態(tài)特性的影響規(guī)律�；趯嶒灉y量與數(shù)學(xué)函數(shù)擬合的方式,對不同形式的制造誤差進行了表征,并嵌入到軸承的數(shù)值計算模型中;計算了不同形式的制造誤差對多孔質(zhì)氣體靜壓軸承的靜態(tài)特性的影響規(guī)律,得到了制造誤差的類型與幅值對徑向及軸向承載力和剛度的變化關(guān)系;靜態(tài)特性實驗驗證了考慮制造誤差時的計算結(jié)果更接近真實值。上述工作將有助于多孔質(zhì)氣體靜壓軸承的結(jié)構(gòu)設(shè)計。(3)分析了不同制造誤差對多孔質(zhì)氣體靜壓軸承動態(tài)特性的影響規(guī)律。基于軸承轉(zhuǎn)子的回轉(zhuǎn)運動分析,研究了動不平衡量及圓度誤差對回轉(zhuǎn)精度的影響規(guī)律;通過比較有無制造誤差時,軸承間隙內(nèi)部的壓強分布、速度矢量及承載力的變化規(guī)律,分析了圓度誤差的動態(tài)影響機理;通過將圓柱度誤差對軸向的影響轉(zhuǎn)化為力的形式,采用動網(wǎng)格技術(shù)將其嵌入到軸向求解方程中,求解得到了其對軸向動態(tài)特性的影響規(guī)律;最后,回轉(zhuǎn)精度實驗測試結(jié)果驗證了上述有關(guān)結(jié)論,上述研究工作將有助于推動提升超精密機床精度的研究。
[Abstract]:Aerostatic bearing is an important supporting part of ultra-precision machine tools. It has the advantages of low friction loss, no pollution, high precision and long life. With the continuous development of ultra-precision technology, the bearing characteristics, rotary accuracy and stability of aerostatic bearing have been improved. Because of its good stability, high bearing capacity and better precision, porous gas hydrostatic bearing is gradually replacing the hydrostatic bearing with small orifice throttle form, which has become the focus of scholars at home and abroad. However, it is still difficult to study the influence of manufacturing errors on static and dynamic characteristics of porous aerostatic bearings, which is an urgent problem to improve the accuracy of ultra-precision machine tools. In order to solve this problem, based on the analysis of the theory and method of aerostatic bearing at home and abroad, the purpose of this paper is to find out the characterization method of manufacturing error of porous gas hydrostatic spindle. The influence of manufacturing error on static and dynamic characteristics. The main contents of this paper are as follows: (1) the numerical solution of static and dynamic characteristics of porous aerostatic bearing is improved. Based on the basic equations of fluid mechanics and the law of internal flow field of porous mass, the solution equation of porous gas hydrostatic bearing is established, and the numerical solution model of porous gas static bearing is established based on hydrodynamic software. Based on the dynamic mesh technology, the dynamic rotation accuracy prediction method of the bearing rotor is improved. By transforming the rotational velocity into the linear velocity and adding it to the momentum source term of the Naiver-Stokes equation, the problem of the rotating mesh distortion is solved. The dynamic simulation of the spindle motion process is realized, which will be beneficial to the research of the influence law of the hydrostatic bearing. (2) the characterization method of manufacturing error and its influence on the static characteristics of bearing are studied. Based on the experimental measurement and mathematical function fitting, the manufacturing errors of different forms are characterized and embedded into the numerical calculation model of bearings. The influence of different manufacturing errors on the static characteristics of porous gas static bearing is calculated. The relationship between the type of manufacturing error and amplitude on radial and axial bearing capacity and stiffness is obtained. The static characteristic experiments show that the calculated results are closer to the real value when the manufacturing error is taken into account. The above work will contribute to the structural design of porous gas hydrostatic bearing. (3) the influence of different manufacturing errors on the dynamic characteristics of porous gas hydrostatic bearing is analyzed. Based on the rotary motion analysis of the bearing rotor, the influence of dynamic unbalance and roundness error on the rotary accuracy is studied. The dynamic influence mechanism of roundness error is analyzed by comparing the pressure distribution, velocity vector and bearing capacity of bearing clearance with or without manufacturing error. By transforming the influence of the cylinder error to the axial force, the dynamic grid technique is used to embed it into the axial solution equation, and the law of its influence on the axial dynamic characteristic is obtained. Finally, the experimental results of rotary accuracy verify the above conclusions, which will help to improve the precision of ultra-precision machine tools.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TH133.36

【參考文獻】

相關(guān)期刊論文 前10條

1 李歡歡;于賀春;張國慶;趙惠英;馬文琦;;橢圓誤差對多孔質(zhì)徑向氣體靜壓軸承特性的影響[J];制造技術(shù)與機床;2015年06期

2 崔海龍;岳曉斌;張連新;雷大江;夏歡;;基于ANSYS的多孔質(zhì)靜壓軸承徑向特性數(shù)值模擬[J];組合機床與自動化加工技術(shù);2014年11期

3 崔海龍;岳曉斌;雷大江;夏歡;朱建平;;基于ANSYS Workbench的氣體靜壓軸承徑向特性分析[J];潤滑與密封;2014年10期

4 楊朝暉;張進華;洪軍;姚建國;王煜;;超高精度滾動軸承旋轉(zhuǎn)精度測試系統(tǒng)誤差分析[J];浙江大學(xué)學(xué)報(工學(xué)版);2014年06期

5 毛劍峰;鄒鯤;周勤之;;基于球標法的高精度主軸回轉(zhuǎn)誤差測量[J];組合機床與自動化加工技術(shù);2013年12期

6 張在春;仲高艷;;空氣靜壓軸承靜態(tài)特性的工程計算與數(shù)值仿真[J];組合機床與自動化加工技術(shù);2013年03期

7 Xue-Dong Chen;Jin-Cheng Zhu;Han ChenState;;Dynamic characteristics of ultra-precision aerostatic bearings[J];Advances in Manufacturing;2013年01期

8 吳定柱;陶繼忠;;一種多孔質(zhì)石墨滲透系數(shù)測量方法的研究[J];機械強度;2011年01期

9 吳定柱;陶繼忠;;多孔質(zhì)石墨氣體靜壓止推軸承靜態(tài)性能分析[J];中國機械工程;2010年19期

10 張曉峰;林彬;王太勇;;基于Hypermesh的矩形多孔質(zhì)氣體靜壓止推軸承性能有限元分析[J];潤滑與密封;2010年09期

相關(guān)會議論文 前1條

1 崔海龍;王寶瑞;吳定柱;;基于材料特性的多孔質(zhì)空氣靜壓軸承數(shù)值模擬與實驗[A];2015光學(xué)精密工程論壇論文集[C];年

相關(guān)博士學(xué)位論文 前4條

1 龍威;平面空氣靜壓軸承承載特性研究[D];哈爾濱工業(yè)大學(xué);2010年

2 阮宏慧;多孔質(zhì)氣體潤滑軸承設(shè)計理論與實驗方法[D];天津大學(xué);2009年

3 王建敏;超精密氣體靜壓軸系部分關(guān)鍵技術(shù)研究[D];國防科學(xué)技術(shù)大學(xué);2007年

4 張君安;高剛度空氣靜壓軸承研究[D];西北工業(yè)大學(xué);2006年

相關(guān)碩士學(xué)位論文 前3條

1 張孝元;局部多孔質(zhì)靜壓氣體止推軸承的靜態(tài)特性分析與結(jié)構(gòu)優(yōu)化[D];燕山大學(xué);2012年

2 吳定柱;多孔質(zhì)氣體靜壓止推軸承關(guān)鍵技術(shù)研究[D];中國工程物理研究院;2010年

3 張明;空氣靜壓主軸回轉(zhuǎn)誤差測量技術(shù)研究[D];中國工程物理研究院;2008年

，

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