【摘要】：科學技術的發(fā)展,MEMS加工制造技術的進步,使得航空航天、生物醫(yī)學以及精細化學等領域對于微流體傳輸有了更高的要求,這極大地促進了微泵的發(fā)展。以壓電材料為驅動部件的壓電作動型微泵,具有響應迅速、能量密度大、集成度高和無電磁干擾等特點,得到了國內外眾多研究學者的關注。因此,在微化學混合、燃料電池、生物檢測、胰島素注入等領域均有著廣泛的應用前景。作為有閥壓電泵的核心部件,單向起止閥的可靠性對于整個壓電泵的壽命和性能有著至關重要的影響。當壓電泵在運行時,單向起止閥的頻繁往復運動容易使閥體產生疲勞損傷,且傳統(tǒng)懸臂梁式閥體還易導致應力集中,進而加重疲勞受損情況,最終導致閥體失效,有閥壓電泵也隨之不能正常工作。針對此種情況,本文提出一種鈸型開槽式閥體,該閥體由鈸型隔柵和鈸型開槽膜片所組成,以期能降低閥體所受應力,提高閥體的使用壽命,增加有閥壓電泵的運行可靠性,并根據鈸型開槽式閥體設計出鈸型開槽式閥壓電泵。本研究對鈸型開槽式閥壓電泵及其相關部件所做的研究工作及取得的成果如下:1.基于材料力學等相關原理對鈸型開槽式閥壓電泵的鈸型開槽膜片進行理論推導,建立了鈸型開槽膜片開合度與膜片高度的數學表達式,闡明了膜片各個參數對于膜片開合度的影響;建立了鈸型開槽式閥壓電泵的流量表達式,揭示了振子參數、膜片參數、傳輸介質參數等與泵流量間的相互關系。2.基于靜力分析對鈸型開槽膜片和平板開槽膜片進行應力對比,論證了鈸型開槽式閥體設計方案的合理性;綜合考慮了泵內水體對壓電泵的附加質量影響,對鈸型開槽式閥壓電泵進行了濕模態(tài)和諧響應分析,確定了壓電泵的工作頻率及壓電振子的振動形態(tài),為泵流量試驗平臺的搭建提供了參考。3.基于閥體與流場的耦合作用,構建了鈸型開槽式閥壓電泵的流固耦合模型,深入分析流固耦合情況下的鈸型開槽膜片位移變化以及所受應力大小,探明壓電泵內部壓力與流場的變化規(guī)律,進一步分析鈸型開槽式閥壓電泵的性能,驗證設計方案的可行性。4.使用SLA激光快速成型技術加工了鈸型開槽式閥壓電泵樣機,并搭建了鈸型開槽式閥壓電泵的輸出特性測試平臺;對壓電振子和壓電泵分別進行了振動特性和輸出特性測試,獲得了不同驅動頻率下,振子位移與泵流量曲線;結合流固耦合計算結果,闡述了振子振幅、膜片應力及泵流量這三者間的相互關系,分析結果可為膜片優(yōu)化工作提供參考。
[Abstract]:With the development of science and technology and the progress of MEMS manufacturing technology, the fields of aerospace, biomedicine and fine chemistry have higher requirements for microfluid transport, which has greatly promoted the development of micropumps. Piezoelectric actuated micropump with piezoelectric material as the driving component has the characteristics of rapid response, high energy density, high integration and no electromagnetic interference, etc., which has attracted the attention of many researchers at home and abroad. Therefore, microchemical mixing, fuel cells, biological detection, insulin injection and other fields have a wide range of applications. As the core component of piezoelectric pump with valve, the reliability of one-way starting and stopping valve plays an important role in the life and performance of piezoelectric pump. When the piezoelectric pump is in operation, the frequent reciprocating movement of the one-way starting and stopping valve will easily cause fatigue damage to the valve body, and the traditional cantilever valve body will also easily lead to stress concentration, which will aggravate the fatigue damage and eventually lead to the failure of the valve body. With the valve pump also can not work properly. In this paper, a cymbal slotted valve body is proposed, which is composed of cymbal diaphragm and cymbal diaphragm in order to reduce the stress on the valve body, improve the service life of the valve body and increase the reliability of the piezoelectric pump with valve. And according to cymbals type slotted valve body design cymbal type slotted valve pressure pump. The research work of cymbals slotted valve piezoelectric pump and its related parts are as follows: 1. Based on the theory of material mechanics, the cymbal slotted diaphragm of cymbal slotted valve piezoelectric pump is derived theoretically, and the mathematical expression of cymbals slotted diaphragm opening degree and diaphragm height is established. The influence of diaphragm parameters on diaphragm opening and closing degree is clarified, the flow expression of cymbal slotted valve piezoelectric pump is established, and the relationship between oscillator parameter, diaphragm parameter, transmission medium parameter and pump flow rate is revealed. Based on static analysis, the stress comparison between cymbal slotted diaphragm and plate slotted diaphragm is carried out, the rationality of cymbal slotted valve body design scheme is demonstrated, and the effect of water body in pump on the additional mass of piezoelectric pump is considered synthetically. The harmonic response of wet mode of cymbal slotted valve piezoelectric pump is analyzed. The frequency of piezoelectric pump and the vibration form of piezoelectric vibrator are determined, which provides a reference for the construction of pump flow test platform. Based on the coupling between valve body and flow field, the fluid-solid coupling model of cymbal slotted valve piezoelectric pump is constructed, and the displacement and stress of cymbal slotted diaphragm under fluid-solid coupling are analyzed. The variation law of internal pressure and flow field of piezoelectric pump is proved, and the performance of cymbal slotted valve piezoelectric pump is further analyzed, and the feasibility of the design scheme is verified. The prototype of cymbal slotted valve piezoelectric pump was fabricated by SLA laser rapid prototyping technology, and the output characteristic test platform of cymbal slotted valve piezoelectric pump was built, and the vibration and output characteristics of piezoelectric vibrator and piezoelectric pump were tested respectively. The displacement curves of the vibrator and the flow rate of the pump are obtained at different driving frequencies, and the relationship among the vibrator amplitude, diaphragm stress and pump flow rate is expounded in combination with the fluid-solid coupling calculation results. The analysis results can provide a reference for the optimization of the diaphragm.
【學位授予單位】：江蘇大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TH38

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