本文選題：微機(jī)電系統(tǒng) + 宏模型�。� 參考：《西北工業(yè)大學(xué)》2015年博士論文

【摘要】：航空、航天等國防科技領(lǐng)域?qū)Ω叨薓EMS產(chǎn)品的需求,給MEMS產(chǎn)品的性能指標(biāo)提出了更高要求,這使得MEMS產(chǎn)品的設(shè)計(jì)和開發(fā)面臨新的挑戰(zhàn)。而MEMS器件的微型化和多學(xué)科交叉的特性,使得MEMS的建模和仿真通常涉及多物理場耦合,相應(yīng)的動態(tài)行為方程具有非線性特性。因此在高端MEMS與IC聯(lián)合仿真中,如何建立MEMS器件及非線性電路的非線性宏模型,加速高端MEMS系統(tǒng)級設(shè)計(jì)與優(yōu)化成為一個重要的研究課題。本文針對MEMS與IC聯(lián)合仿真對具有高精度、高效率和良好擴(kuò)展性的非線性宏模型的需求,研究了基于軌跡分段線性化(TPWL)方法的非線性宏建模方法,并利用非線性傳輸線電路、柔性熱敏傳感器、微機(jī)械開關(guān)、柔性微熱執(zhí)行器、平板式微熱執(zhí)行器和靜電微泵隔膜對方法的有效性進(jìn)行了分析驗(yàn)證。主要研究工作如下：1)針對目前非線性熱電耦合問題宏建模研究的不足,利用TPWL方法解決了復(fù)雜結(jié)構(gòu)的熱電耦合MEMS器件的宏建模問題。以MEMS柔性熱敏傳感器為例,分析了局部降階階數(shù)和線性化點(diǎn)個數(shù)對宏模型精度、階數(shù)和運(yùn)行時間的影響。研究結(jié)果表明,利用TPWL方法生成的熱電耦合宏模型在具有很高的仿真效率和近似精度的同時,還具有良好的可擴(kuò)展性,可用于MEMS熱電器件的優(yōu)化設(shè)計(jì)和系統(tǒng)級仿真。2)提出了基于全局最大誤差控制的改進(jìn)TPWL方法(TPWL-GMEC方法),解決了TPWL方法難于選取高質(zhì)量線性化點(diǎn)的問題。通過非線性傳輸線RC電路、非線性傳輸線RLC電路和微機(jī)械開關(guān)驗(yàn)證了TPWL-GMEC方法的有效性。相比于其他線性化點(diǎn)選擇算法,本文方法既適用于單軌跡情形又適用于多軌跡情形,所生成的宏模型具有更小的階數(shù)、更少的局部線性模型個數(shù)、更高的近似精度和更好的可擴(kuò)展性。3)為了更好地實(shí)現(xiàn)MEMS熱電器件的系統(tǒng)級仿真、減少其優(yōu)化設(shè)計(jì)過程中的仿真工作量,以兩個MEMS熱微執(zhí)行器為例,介紹了TPWL-GMEC方法在MEMS熱電器件宏建模中的應(yīng)用,進(jìn)一步展示了TPWL-GMEC方法在提取非線性熱電耦合宏模型時具有仿真精度高、降階效果好、加速比高和擴(kuò)展性好等優(yōu)點(diǎn)。4)針對TPWL-GMEC方法提取宏模型的計(jì)算花費(fèi)略大于其他方法的不足,通過縮小線性化點(diǎn)選擇范圍和改變投影矩陣生成方式,提出了結(jié)合POD的二次選點(diǎn)TPWL-GMEC方法。該方法在保證精度的前提下,將TPWL-GMEC方法的宏建模效率提高了數(shù)倍,從而彌補(bǔ)了其在宏建模效率方面的不足。最后,以平板式熱微執(zhí)行器、微機(jī)械開關(guān)和靜電微泵隔膜三個MEMS器件為例,展示了方法的實(shí)用性和有效性。
[Abstract]:The demand for high-end MEMS products in aviation, aerospace and other fields of national defense technology puts forward higher requirements for the performance of MEMS products, which makes the design and development of MEMS products face new challenges. Because of the miniaturization and interdisciplinary characteristics of MEMS devices, the modeling and simulation of MEMS usually involve the coupling of multiple physical fields, and the corresponding dynamic behavior equations are nonlinear. Therefore, how to establish nonlinear macro models of MEMS devices and nonlinear circuits and speed up the design and optimization of high-end MEMS systems has become an important research topic in the joint simulation of high-end MEMS and IC. Aiming at the demand of MEMS and IC joint simulation for nonlinear macro model with high precision, high efficiency and good expansibility, a nonlinear macro modeling method based on trajectory piecewise linearization (TPWL) is studied, and the nonlinear transmission line circuit is used. The effectiveness of the method is analyzed and verified by flexible thermal sensors, micromechanical switches, flexible microthermal actuators, flat microthermal actuators and electrostatic micropump separators. The main work of this paper is as follows: (1) aiming at the deficiency of macro modeling of nonlinear thermoelectric coupling problem, the problem of macromodeling of thermoelectric coupled MEMS devices with complex structures is solved by using TPWL method. Taking MEMS flexible thermal sensor as an example, the effects of local order reduction and the number of linearized points on the accuracy, order and running time of the macro model are analyzed. The results show that the thermoelectric coupling macro model generated by the TPWL method has high simulation efficiency and approximate precision, but also has good scalability. An improved TPWL method based on global maximum error control (TPWL-GMEC method) is proposed to solve the problem that it is difficult for TPWL method to select high quality linearization points. The effectiveness of TPWL-GMEC method is verified by nonlinear transmission line RC circuit, nonlinear transmission line RLC circuit and micromechanical switch. Compared with other linearization point selection algorithms, this method is suitable for both single-locus and multi-locus cases. The resulting macro models have smaller order and fewer local linear models. In order to achieve better system-level simulation of MEMS thermoelectric devices and reduce the simulation workload in the optimization design process, two MEMS thermal microactuators are taken as an example. The application of TPWL-GMEC method in macro modeling of MEMS thermoelectric devices is introduced. It is further demonstrated that TPWL-GMEC method has high simulation accuracy and good order reduction effect in extracting nonlinear thermoelectric coupling macro models. The computation cost of extracting macro model by TPWL-GMEC method is slightly higher than that of other methods. By reducing the selection range of linearization points and changing the method of projection matrix generation, In this paper, a method of quadratic point selection TPWL-GMEC combined with POD is proposed. This method can improve the efficiency of macro modeling of TPWL-GMEC method several times under the premise of ensuring precision, thus making up for the deficiency in macro modeling efficiency of TPWL-GMEC method. Finally, three MEMS devices, such as flat thermal microactuator, micromechanical switch and electrostatic micropump diaphragm, are taken as examples to demonstrate the practicability and effectiveness of the method.
【學(xué)位授予單位】：西北工業(yè)大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2015
【分類號】：TH-39
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本文編號：2062001