【摘要】：隨著有機薄膜電子器件的快速發(fā)展,有機半導體薄膜材料特性的研究成為近年來材料和電子研究的熱門。研究表明,薄膜的結構以及表面形貌影響薄膜的電學特性。因此,為研究有機薄膜光學特性和電學特性的聯(lián)系,本文在現(xiàn)有光學測量系統(tǒng)的基礎上,對電學測量系統(tǒng)以及樣品進行了改進,提出了光電聯(lián)合測量方案,實現(xiàn)了真空環(huán)境下有機薄膜光電特性的在線測量。本文的主要內(nèi)容如下:1、研究了有機薄膜的光電特性以及其導電機理,分析、對比現(xiàn)有的有機薄膜光電特性的測量方法。根據(jù)薄膜表面形貌實時監(jiān)測和電學特性實時測量的需求,設計了光學測量系統(tǒng)和可控電學測量系統(tǒng)結合的光電聯(lián)合測量方案。2、研究了有機薄膜電學特性場效應晶體管測量法的原理,設計并制作了電學測量系統(tǒng),包括離線測量和在線測量。該測量系統(tǒng)可實現(xiàn)測量模式(包括定值、定時和循環(huán)等)的實時切換。在原有的光學測量系統(tǒng)光路中加入了校準光路,通過實時校準減小光譜信號的漂移。3、研究了有機薄膜特性測量所需樣品的結構特點,設計了具有梳齒狀的樣品結構。實驗表明,該結構滿足了測試需求,取得了較好的結果。4、針對本文的測量系統(tǒng)進行性能測試,得出其電壓范圍為?0.2V~?60V,測量電流精度為100 p A,滿足了有機薄膜的測量需求(電壓±30 V,電流μA級)。利用該系統(tǒng)進行了離線和在線樣品的測試。根據(jù)測得的電學信號,得到了樣品的特性曲線和載流子遷移率等有機薄膜的電學特性參數(shù)。根據(jù)測得的光學信號,分不同區(qū)域進行分析,得到了有機薄膜的生長信息。同時測試了加電條件下對應光學信號的變化,驗證了該測量系統(tǒng)在有機薄膜光電特性測量方面的可行性及實時性。
[Abstract]:With the rapid development of organic thin film electronic devices, the research on the properties of organic semiconductor thin film materials has become a hot topic in recent years. The results show that the structure and surface morphology of the films affect the electrical properties of the films. Therefore, in order to study the relationship between the optical and electrical properties of organic thin films, based on the existing optical measurement system, the electrical measurement system and samples were improved, and the photoelectric joint measurement scheme was proposed. The on-line measurement of optical and electrical properties of organic thin films in vacuum environment is realized. The main contents of this paper are as follows: 1. The photoelectric properties and conductive mechanism of organic thin films are studied, and the measurement methods of optical and electrical properties of organic thin films are analyzed and compared. According to the requirements of real-time monitoring and real-time measurement of electrical properties of thin film surface, a combined photoelectric measurement scheme of optical measurement system and controllable electrical measurement system was designed. The principle of organic thin film electrical characteristic field effect transistor (FET) measurement is studied. The electrical measurement system including off-line measurement and on-line measurement is designed and fabricated. The measurement system can realize real-time switching of measurement modes (including fixed value, timing and loop, etc.). The calibration optical path is added to the optical path of the original optical measurement system, and the drift of the spectral signal is reduced by real-time calibration. 3. The structural characteristics of the sample required for the measurement of the characteristics of the organic film are studied, and the sample structure with comb tooth shape is designed. The experimental results show that the structure meets the test requirements and achieves good results. 4. The performance of the measuring system is tested. The voltage range is-0.2V / 60V, the current precision is 100p A, and the measuring current precision is 100p / A, the current precision is 100p / A and the voltage range is-0.2V / 60V. The measurement requirements of organic thin films are satisfied (voltage 鹵30 V, current 渭 A). The off-line and on-line samples were tested by the system. According to the measured electrical signals, the characteristic curves of the samples and the electrical parameters of the organic thin films, such as carrier mobility, have been obtained. According to the measured optical signals, the growth information of organic thin films was obtained by analyzing different regions. At the same time, the change of optical signal under the condition of charging is tested, and the feasibility and real-time performance of the measuring system in the measurement of the photoelectric characteristics of organic film are verified.
【學位授予單位】：天津大學
【學位級別】：碩士
【學位授予年份】：2014
【分類號】：TB383.2

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本文編號：2466208