納米結(jié)構(gòu)類金剛石薄膜的制備及其摩擦學(xué)性能的研究
發(fā)布時間：2019-02-13 20:18
【摘要】：本文以等離子體增強化學(xué)氣相沉積(PECVD)設(shè)備,利用高功率脈沖技術(shù)、恒流雙極脈沖技術(shù)和液相碳源制備了納米結(jié)構(gòu)的類金剛石薄膜。考察了各種工藝參數(shù)對薄膜納米結(jié)構(gòu)的影響,探討了薄膜納米結(jié)構(gòu)與其機械性能、摩擦學(xué)和表面特性之間的相關(guān)性。通過選擇合適的參數(shù)制備系列納米結(jié)構(gòu)類金剛石薄膜。討論了納米結(jié)構(gòu)薄膜力學(xué)性能的產(chǎn)生機制。同時考察了特殊納米結(jié)構(gòu)在薄膜摩擦過程中的結(jié)構(gòu)演化,并進一步討論了納米結(jié)構(gòu)對摩擦學(xué)性能的貢獻機理。主要研究結(jié)果如下： 1.利用高功率PECVD制備了一類指紋狀納米結(jié)構(gòu)類金剛石薄膜,考察了沉積參數(shù)對薄膜結(jié)構(gòu)及性能的影響。研究表明高的等離子體能量對薄膜的納米結(jié)構(gòu)有顯著的影響,并通過該方法制備出具有優(yōu)異機械和摩擦學(xué)性能的納米結(jié)構(gòu)類金剛石薄膜。這種納米結(jié)構(gòu)碳基薄膜表現(xiàn)出優(yōu)異的力學(xué)性能,如高硬度21.5GPa和高彈性(彈性回復(fù)85%)。更重要的是,薄膜在相對濕度為35%的大氣環(huán)境下表現(xiàn)出超低摩擦系數(shù)(～0.009)。通過高分辨透射電鏡的分析發(fā)現(xiàn),指紋狀的納米結(jié)構(gòu)在磨屑中可以穩(wěn)定存在,并認為這可能是超低摩擦產(chǎn)生的一個主要原因。 2.利用恒流雙極脈沖直流PECVD制備出納米洋蔥/非晶(COs/a-C:H)復(fù)合類金剛石薄膜。由于這種獨特的碳洋蔥分散在無定形基體的雙重納米結(jié)構(gòu),薄膜表現(xiàn)出優(yōu)異的機械性能和良好的摩擦學(xué)性能。該薄膜擁有高達92%的超高彈性回復(fù),同時在相對濕度30%的空氣環(huán)境下表現(xiàn)出超低的摩擦系數(shù)(μ0.008)和磨損率(6.41×10-18m3/Nm)。為了更深入的理解薄膜表現(xiàn)出的優(yōu)異摩擦學(xué)性能,利用高分辨透射電鏡考察了COs/a-C:H薄膜中納米洋蔥的結(jié)構(gòu)和分布演化,發(fā)現(xiàn)碳洋蔥分子可以在磨屑中穩(wěn)定存在。磨屑中的碳洋蔥在微觀上存在納米滾動效應(yīng),其在摩擦過程中起到“分子滾動軸承”的作用,將滑動行為轉(zhuǎn)化為滾動行為,導(dǎo)致產(chǎn)生超低的摩擦系數(shù)和磨損率 3.以環(huán)戊二烯做為碳源,在低壓條件下氣化,采用等離子體化學(xué)氣相沉積法,在Si單晶100面上制備了富勒烯納米團簇/非晶復(fù)合納米結(jié)構(gòu)類金剛石薄膜。利用透射電子顯微鏡和拉曼光譜發(fā)現(xiàn),該類金剛石薄膜是多層卷曲富勒烯納米團簇包裹在非晶基體的復(fù)合結(jié)構(gòu)。結(jié)果表明,由于這種特殊的納米結(jié)構(gòu),薄膜表現(xiàn)出了優(yōu)異的力學(xué)和摩擦學(xué)性能。 4.研究了所制備的具有類富勒烯結(jié)構(gòu)的碳基薄膜在離子液體作為潤滑劑條件下的摩擦磨損性能。結(jié)果表明,含氫類富勒烯碳基薄膜在低頻率摩擦?xí)r表現(xiàn)出減摩性能；在高頻率摩擦中表現(xiàn)出優(yōu)異的抗磨性能,磨損壽命顯著提高。并用邊界潤滑理論對其減摩抗磨作用做了探討。
[Abstract]:In this paper, nanocrystalline diamond-like carbon films were prepared by plasma enhanced chemical vapor deposition (PECVD) equipment, high power pulse technique, constant current bipolar pulse technique and liquid carbon source. The effects of various technological parameters on the nanostructures of the films were investigated, and the correlation between the nanostructures and their mechanical properties, tribological properties and surface properties was discussed. A series of nanocrystalline diamond-like carbon films were prepared by selecting appropriate parameters. The mechanism of mechanical properties of nanostructured films was discussed. At the same time, the structure evolution of special nanostructures in the friction process of thin films was investigated, and the contribution mechanism of nanostructures to tribological properties was discussed. The main results are as follows: 1. A kind of fingerprint nanostructured diamond-like carbon films were prepared by high power PECVD. The effects of deposition parameters on the structure and properties of the films were investigated. The results show that the high plasma energy has a significant effect on the nanostructures of the films, and the diamond like carbon films with excellent mechanical and tribological properties have been prepared by this method. The nanostructured carbon based films exhibit excellent mechanical properties such as high hardness 21.5GPa and high elasticity (elastic recovery 85%). More importantly, the thin film exhibits ultra-low friction coefficient (~ 0.009) in the atmosphere with relative humidity of 35%. Through the analysis of high resolution transmission electron microscope, it is found that the fingerprint nanostructures can exist stably in the wear debris, and it is considered that this may be one of the main causes of ultra-low friction. 2. Nanocrystalline onion / amorphous (COs/a-C:H) composite diamond-like carbon films were prepared by constant current bipolar pulsed DC PECVD. The thin films exhibit excellent mechanical properties and good tribological properties due to the unique carbon onion double nanostructures dispersed in amorphous substrates. The film has an ultra-high elastic recovery of 92% and an ultra-low friction coefficient (渭 0.008) and wear rate (6.41 脳 10-18m3/Nm) at 30% relative humidity. In order to better understand the excellent tribological properties of the films, the structure and distribution evolution of nano-onions in COs/a-C:H thin films were investigated by high-resolution transmission electron microscopy. It was found that carbon onion molecules could exist stably in the wear debris. The nano-rolling effect exists in the carbon onion in the grinding chips, which plays the role of "molecular rolling bearing" in the friction process. The sliding behavior is transformed into the rolling behavior, resulting in extremely low friction coefficient and wear rate of 3. Fullerene nanoclusters / amorphous composite diamond-like carbon films were prepared on Si single crystal by plasma chemical vapor deposition with cyclopentadiene as carbon source at low pressure. By means of transmission electron microscope and Raman spectroscopy, it is found that the diamond films are multilayer crimped fullerene nanoclusters coated in amorphous substrates. The results show that the thin films exhibit excellent mechanical and tribological properties due to the special nanostructures. 4. The friction and wear properties of carbon based films with fullerene-like structure were investigated under the condition of ionic liquid as lubricant. The results show that the hydrogen-containing fullerene-based films exhibit antifriction properties at low frequency and excellent wear resistance at high frequency friction. The antifriction and antiwear effect of the boundary lubrication theory is discussed.
【學(xué)位授予單位】：蘭州理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2014
【分類號】：TQ163;TB383.2
本文編號：2421833
[Abstract]:In this paper, nanocrystalline diamond-like carbon films were prepared by plasma enhanced chemical vapor deposition (PECVD) equipment, high power pulse technique, constant current bipolar pulse technique and liquid carbon source. The effects of various technological parameters on the nanostructures of the films were investigated, and the correlation between the nanostructures and their mechanical properties, tribological properties and surface properties was discussed. A series of nanocrystalline diamond-like carbon films were prepared by selecting appropriate parameters. The mechanism of mechanical properties of nanostructured films was discussed. At the same time, the structure evolution of special nanostructures in the friction process of thin films was investigated, and the contribution mechanism of nanostructures to tribological properties was discussed. The main results are as follows: 1. A kind of fingerprint nanostructured diamond-like carbon films were prepared by high power PECVD. The effects of deposition parameters on the structure and properties of the films were investigated. The results show that the high plasma energy has a significant effect on the nanostructures of the films, and the diamond like carbon films with excellent mechanical and tribological properties have been prepared by this method. The nanostructured carbon based films exhibit excellent mechanical properties such as high hardness 21.5GPa and high elasticity (elastic recovery 85%). More importantly, the thin film exhibits ultra-low friction coefficient (~ 0.009) in the atmosphere with relative humidity of 35%. Through the analysis of high resolution transmission electron microscope, it is found that the fingerprint nanostructures can exist stably in the wear debris, and it is considered that this may be one of the main causes of ultra-low friction. 2. Nanocrystalline onion / amorphous (COs/a-C:H) composite diamond-like carbon films were prepared by constant current bipolar pulsed DC PECVD. The thin films exhibit excellent mechanical properties and good tribological properties due to the unique carbon onion double nanostructures dispersed in amorphous substrates. The film has an ultra-high elastic recovery of 92% and an ultra-low friction coefficient (渭 0.008) and wear rate (6.41 脳 10-18m3/Nm) at 30% relative humidity. In order to better understand the excellent tribological properties of the films, the structure and distribution evolution of nano-onions in COs/a-C:H thin films were investigated by high-resolution transmission electron microscopy. It was found that carbon onion molecules could exist stably in the wear debris. The nano-rolling effect exists in the carbon onion in the grinding chips, which plays the role of "molecular rolling bearing" in the friction process. The sliding behavior is transformed into the rolling behavior, resulting in extremely low friction coefficient and wear rate of 3. Fullerene nanoclusters / amorphous composite diamond-like carbon films were prepared on Si single crystal by plasma chemical vapor deposition with cyclopentadiene as carbon source at low pressure. By means of transmission electron microscope and Raman spectroscopy, it is found that the diamond films are multilayer crimped fullerene nanoclusters coated in amorphous substrates. The results show that the thin films exhibit excellent mechanical and tribological properties due to the special nanostructures. 4. The friction and wear properties of carbon based films with fullerene-like structure were investigated under the condition of ionic liquid as lubricant. The results show that the hydrogen-containing fullerene-based films exhibit antifriction properties at low frequency and excellent wear resistance at high frequency friction. The antifriction and antiwear effect of the boundary lubrication theory is discussed.
【學(xué)位授予單位】：蘭州理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2014
【分類號】：TQ163;TB383.2
【參考文獻】
相關(guān)期刊論文 前2條
1 閻興斌,徐洮,王博,楊生榮;電化學(xué)沉積DLC膜及其表征[J];材料科學(xué)與工程學(xué)報;2003年05期
2 劉維民,葉承峰,王海忠,余來貴;烷基咪唑四氟硼酸鹽離子液作為潤滑劑的摩擦學(xué)性能[J];摩擦學(xué)學(xué)報;2001年06期
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