【摘要】：通過非平衡磁控濺射儀制備了不同Ag含量的ZrWN-Ag納米復合膜,采用X射線衍射儀、掃描電鏡、能譜儀、納米壓痕儀、摩擦磨損儀和三維形貌儀等對薄膜的微結構、成分、表面形貌、力學性能和室溫及高溫摩擦磨損性能進行表征,并探討了復合膜在不同溫度下的摩擦磨損機制.結果表明:ZrWN-Ag復合膜是由面心立方的ZrWN、W_2N和彌散分布的晶態(tài)Ag相組成.隨著Ag含量增加,薄膜的硬度先增大后減小.室溫下,薄膜的摩擦系數和磨損率隨Ag含量增加而逐漸降低;溫度由200℃升高至700℃時,薄膜摩擦系數逐漸降低,磨損率逐漸增大,溫度一定時,Ag含量越高,復合膜的摩擦系數越低,但磨損率越高.研究表明:Ag的加入改善了薄膜力學性能、室溫下的摩擦磨損性能以及高溫下的摩擦性能,但高溫下的磨損性能未得到改善.
[Abstract]:ZrWN-Ag nanocomposite films with different Ag content were prepared by unbalanced magnetron sputtering. The microstructure and composition of the films were investigated by X-ray diffractometer, scanning electron microscope, energy spectrometer, nano-indentation instrument, friction and wear instrument and three-dimensional topography instrument. The surface morphology, mechanical properties, friction and wear properties at room temperature and high temperature were characterized, and the friction and wear mechanisms of the composite films at different temperatures were discussed. The results show that the ZrWN-Ag composite film is composed of ZrWN,W_2N with face centered cube and crystalline Ag phase with dispersive distribution. With the increase of Ag content, the hardness of the film first increases and then decreases. At room temperature, the friction coefficient and wear rate decrease with the increase of Ag content. When the temperature increases from 200 鈩，

本文編號：2399492