【摘要】：隨著電子器件的集成化程度越來越高,設(shè)備之間的傳導(dǎo)干擾,電磁輻射干擾引發(fā)了一系列的電磁兼容和設(shè)備可靠性問題,抗電磁干擾問題不容忽視。軟磁薄膜應(yīng)用于抗電磁干擾領(lǐng)域面臨兩大問題,一方面,軟磁薄膜為金屬薄膜,表面電阻率過低,容易導(dǎo)致微波阻抗失配,從而嚴重影響到器件的微波性能。另一方面,薄膜共振頻帶較窄不適用于抗電磁干擾器件寬頻帶的應(yīng)用。本論文主要提出一種基于圖形化多層結(jié)構(gòu)的軟磁薄膜。一方面,通過隔離層的引入,提高薄膜電阻率,在多層膜中實現(xiàn)高頻磁響應(yīng)疊加,拓寬薄膜共振頻帶。另一方面,通過圖形化在軟磁薄膜中引入形狀各向異性,提高薄膜共振頻率。本論文結(jié)合微磁學(xué)及磁共振損耗理論,對圖形化多層薄膜進行設(shè)計及制備,分析制備出的圖形化多層薄膜的磁損耗機理,旨在提高薄膜電阻率并達到“高頻”、“寬帶”的效果,為薄膜抗電磁干擾器件提供研究基礎(chǔ)。主要研究工作如下:1、連續(xù)多層薄膜磁特性研究(1)制備FeCoB/SiO_2(xnm)/FeCoSiB多層薄膜,研究隔離層對多層薄膜磁特性的影響。研究結(jié)果表明,在SiO_2隔離層厚度達到7nm時,能夠有效隔離FeCoB層與FeCoSiB層的耦合作用,該多層薄膜的動態(tài)磁響應(yīng)能夠明顯地觀察到獨立的雙共振峰。該結(jié)果表明,在多層膜中引入隔離層可以在各磁性層之間建立高頻磁響應(yīng)疊加模型。(2)制備FeNi/SiO_2/FeCoSiB多層薄膜和FeNi/SiO_2/FeCoB多層薄膜,研究二者磁性能。多層薄膜的動態(tài)響應(yīng)均具有明顯雙峰,驗證了隔離層在多層膜的各磁性層之間建立高頻磁響應(yīng)疊加模型依然適用于FeNi合金。2、連續(xù)與圖形化復(fù)合多層薄膜的磁特性研究。制備FeNi/SiO_2/FeCoSiB條紋復(fù)合多層薄膜。研究表明,其微波磁譜在1.4GHz與4.8GHz具有明顯的獨立雙峰,通過調(diào)節(jié)最上層FeCoSiB條紋薄膜的厚度可實現(xiàn)對第二峰位的調(diào)控。3、圖形化多層薄膜的磁特性研究。制備FeCoSiB條紋多層薄膜,通過不同厚度的FeCoSiB條紋薄膜組合形成多層薄膜。研究表明,FeCoSiB條紋多層薄膜的動態(tài)響應(yīng)在4.8GHz與7.5GH具有獨立雙峰,實現(xiàn)高頻的共振峰拓寬。通過調(diào)節(jié)最上層FeCoSiB條紋薄膜的厚度可實現(xiàn)對第二峰位的調(diào)控。
[Abstract]:With the increasing integration of electronic devices, the conduction interference between devices, electromagnetic radiation interference has caused a series of electromagnetic compatibility and equipment reliability problems, the problem of anti-electromagnetic interference can not be ignored. There are two problems in the application of soft magnetic thin films in the field of electromagnetic interference. On the one hand, the soft magnetic thin films are metal films, the surface resistivity is too low, which easily leads to microwave impedance mismatch, which seriously affects the microwave performance of the devices. On the other hand, thin film resonance band is not suitable for wide band applications of electromagnetic interference devices. In this paper, a kind of soft magnetic thin film based on graphical multilayer structure is proposed. On the one hand, through the introduction of the isolation layer, the resistivity of the film is improved, the high frequency magnetic response superposition is realized in the multilayer film, and the resonance band of the film is widened. On the other hand, the shape anisotropy is introduced into the soft magnetic thin film by graphics, and the resonance frequency of the thin film is improved. Based on the theory of micromagnetics and magnetic resonance loss, the paper designs and fabricates the graphical multilayer thin films, and analyzes the magnetic loss mechanism of the graphically multilayer films. The purpose of this paper is to improve the resistivity of the films and achieve "high frequency". The effect of wideband provides a basis for the study of thin film electromagnetic interference devices. The main research work is as follows: 1. The magnetic properties of continuous multilayer thin films (1) FeCoB/SiO_2 (xnm) / FeCoSiB multilayer films were prepared and the effect of isolation layer on the magnetic properties of multilayer films was studied. The results show that the coupling interaction between FeCoB layer and FeCoSiB layer can be effectively isolated when the thickness of SiO_2 insulator layer reaches 7nm. The dynamic magnetic response of the multilayer thin film can obviously observe the independent double resonance peak. The results show that the superposition model of high frequency magnetic response can be established between the magnetic layers by introducing the isolation layer into the multilayer film. (2) the FeNi/SiO_2/FeCoSiB multilayer film and the FeNi/SiO_2/FeCoB multilayer film are prepared and their magnetic properties are studied. The dynamic response of multilayer films has obvious double peaks, which verifies that the superposition model of high frequency magnetic response between the magnetic layers of the multilayer films is still suitable for the study of magnetic properties of FeNi alloy. 2. FeNi/SiO_2/FeCoSiB fringe composite multilayer films were prepared. The results show that the microwave magnetic spectrum has two distinct peaks in 1.4GHz and 4.8GHz, and the second peak position can be adjusted by adjusting the thickness of the upper layer of FeCoSiB stripe film. 3. The magnetic properties of the graphically multilayer thin films are studied. The FeCoSiB stripe multilayer films were prepared and the multilayer films were formed by the combination of FeCoSiB stripe films with different thickness. The results show that the dynamic response of FeCoSiB stripe multilayer films has two independent peaks in 4.8GHz and 7.5GH, and the high frequency resonance peaks can be widened. The second peak position can be regulated by adjusting the thickness of the upper layer of FeCoSiB fringe film.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TM271;O484

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