【摘要】：為實現(xiàn)45°入射情況下K9基底上雙波段截止分色的特性(截止帶波長0.5~0.68μm、0.73~0.79μm,通帶波長0.83~0.87μm),采用F-P型的帶通濾光片膜系結構為初始結構,與常規(guī)設計理念相比有效減少了膜層的數(shù)量,薄膜的高折材料采用Ti O2,低折材料采用Si O2,以實現(xiàn)雙波段截止的目的。膜層的設計層數(shù)為23層,總厚度為2.278μm,借助電子束蒸發(fā)物理氣相沉積法實現(xiàn)了鍍制,利用分光光度計對鍍制樣品的透過率進行評估。測試結果顯示,截止區(qū)(0.5~0.68μm和0.73~0.79μm)平均截止深度分別達到了12.57%和20.39%,通帶0.83~0.87μm波段內的平均透過率達到了91.35%,樣品測試曲線與設計相比,"藍移"將近10 nm。薄膜樣品基本實現(xiàn)了設計目標,具有雙波段截止、高通帶透過率的特性。在環(huán)境測試中:薄膜表現(xiàn)出顯著的穩(wěn)定性,膜層間匹配度適宜。該雙波段截止分色濾光片能夠應用在一些極端的情況下。
[Abstract]:In order to realize the characteristics of double band cutoff color separation on K9 substrate at 45 擄incidence (cut-off band wavelength 0.5 ~ 0.68 渭 m ~ 0.73 ~ 0.79 渭 m, passband wavelength 0.83 ~ 0.87 渭 m), F-P type bandpass filter membrane system was used as the initial structure. Compared with the conventional design concept, the number of film layers is reduced effectively. Ti O _ 2 is used as the high refractive material and Si O _ 2 is used as the low refractive material in order to achieve the purpose of double band cut-off. The designed layer is 23 layers and the total thickness is 2.278 渭 m. By means of electron beam evaporation physical vapor deposition, the transmittance of the deposited samples is evaluated by spectrophotometer. The results show that the average cutoff depth in the cutoff region (0.5 ~ 0.68 渭 m and 0.73 ~ 0.79 渭 m) is 12.57% and 20.39%, respectively, and the average transmittance in the band of 0.83 ~ 0.87 渭 m is 91.35 渭 m, and the average cut-off depth of 0.73 渭 m and 0.73 渭 m are 12.57% and 20.39 渭 m, respectively. Compared with the design, the "blue shift" of the sample test curve is nearly 10 nm.. The thin film samples have achieved the design goal and have the characteristics of double band cutoff and high pass band transmittance. In the environmental test, the film shows remarkable stability and suitable matching degree between layers. The dual band cutoff color separation filter can be used in some extreme cases.
【作者單位】： 江南大學理學院江蘇省輕工光電工程技術研究中心;
【基金】：上海市全固態(tài)激光器與應用技術重點實驗室開放課題(2012ADL03) 國家自然科學基金(60908041) 江蘇省研究生創(chuàng)新項目(SJLX16_0492)資助~~
【分類號】：O484.41

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