二氧化鈦薄膜的制備及光催化性能的研究
發(fā)布時間：2018-09-07 18:09
【摘要】：隨著科技的進(jìn)步和現(xiàn)代工業(yè)化的發(fā)展,環(huán)境污染問題變的日益嚴(yán)峻。在現(xiàn)代化工業(yè)發(fā)展過程中,生成各種對生態(tài)環(huán)境,大氣有害的各種物質(zhì),為了處理這些對環(huán)境和人類有害的物質(zhì),常用的一些物理化學(xué)方法都有各種缺點,例如,周期過長、投資成本過大以及降解不完全徹底。然而在國內(nèi)外科學(xué)家的研究下發(fā)現(xiàn)二氧化鈦的一些光催化性能,這一科學(xué)研究表明利用光催化性能解決生態(tài)環(huán)境污染問題的創(chuàng)新時代即將到來。光催化技術(shù)操作簡單、易于控制、分解污染物效率高、設(shè)備單一,開拓了有關(guān)有機染料、工業(yè)廢水等難降解的環(huán)境污染物的新研究方向。 第一章詳細(xì)介紹了二氧化鈦的物理化學(xué)性質(zhì),用作光催化的基本原理以及提高二氧化鈦光催化性能的途徑,并且介紹了Ti02薄膜在生態(tài)環(huán)境保護(hù)方面的應(yīng)用前景。 第二章介紹了制備Ti02薄膜常用的方法以及各種制備方法的優(yōu)缺點,重點介紹了本次實驗所用的射頻磁控濺射法。對薄膜表征方法作以簡單介紹,并且詳細(xì)介紹了磁控濺射儀制備Ti02薄膜的實驗原理以及甲基橙的分解原理。 第三章分別介紹了磁控濺射儀制備Ti02薄膜的操作流程,并且詳細(xì)說明了制備Ti02靶材、Ti02薄膜的實驗操作步驟。 第四章本章重點討論了襯底溫度和濺射功率對二氧化鈦薄膜晶體結(jié)構(gòu)和光催化性能的影響。利用XRD檢測了薄膜樣品的晶向變化；通過原子力顯微鏡檢測薄膜表面；并通過粗糙度公式計算薄膜表面顆粒大小的變化趨勢；利用紫外光照下分解甲基橙來說明薄膜的光催化性能。 第五章本章重點討論了不同的退火溫度和退火時間對Ti02薄膜的結(jié)構(gòu)和光催化性能的影響作用。對Ti02薄膜光學(xué)性能的檢測通過紫外可見光譜進(jìn)行分析；利用間接帶隙的外推法計算了薄膜樣品的禁帶寬度；利用XRD檢測了隨著退火時間的增加薄膜樣品的晶相變化情況；最后對薄膜的表面形貌由原子力顯微鏡進(jìn)行檢測分析。
[Abstract]:With the progress of science and technology and the development of modern industrialization, the problem of environmental pollution has become increasingly serious. In the process of modern industrial development, a variety of substances harmful to the ecological environment and the atmosphere are produced. In order to deal with these substances harmful to the environment and human beings, some commonly used physical and chemical methods have various shortcomings, for example, the cycle is too long. However, some photocatalytic properties of titanium dioxide have been found by domestic surgeons. This scientific research shows that the new era of using photocatalytic properties to solve the problem of ecological environment pollution is coming. The single equipment opens up new research directions for refractory environmental pollutants such as organic dyes and industrial wastewater.
In the first chapter, the physical and chemical properties of titanium dioxide are introduced in detail. The basic principle of photocatalysis and the ways to improve the photocatalytic performance of titanium dioxide are also introduced. The application prospects of titanium dioxide film in ecological and environmental protection are also introduced.
In the second chapter, the common methods of preparing Ti02 thin films and the advantages and disadvantages of various methods are introduced, especially the RF magnetron sputtering method used in this experiment. The characterization methods of Ti02 thin films are briefly introduced, and the experimental principle of preparing Ti02 thin films by magnetron sputtering and the decomposition principle of methyl orange are introduced in detail.
In the third chapter, the operational procedures of Ti02 thin films prepared by magnetron sputtering are introduced, and the experimental procedures of Ti02 target and Ti02 thin films prepared by magnetron sputtering are described in detail.
In Chapter 4, the effects of substrate temperature and sputtering power on the crystal structure and photocatalytic properties of titanium dioxide thin films are discussed. The crystal orientation of the thin films are measured by XRD, the surface of the thin films is measured by atomic force microscopy, and the variation trend of the surface particle size is calculated by the roughness formula. The photocatalytic properties of the films are explained by decomposition of methyl orange.
In the fifth chapter, the effects of annealing temperature and annealing time on the structure and photocatalytic properties of Ti02 thin films are discussed. The optical properties of Ti02 thin films are analyzed by UV-Vis spectroscopy, the band gap of the films is calculated by the extrapolation method of indirect band gap, and the band gap is detected by XRD. The morphology of the films was analyzed by atomic force microscopy.
【學(xué)位授予單位】：西北大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2014
【分類號】：O484.1
本文編號：2229024
[Abstract]:With the progress of science and technology and the development of modern industrialization, the problem of environmental pollution has become increasingly serious. In the process of modern industrial development, a variety of substances harmful to the ecological environment and the atmosphere are produced. In order to deal with these substances harmful to the environment and human beings, some commonly used physical and chemical methods have various shortcomings, for example, the cycle is too long. However, some photocatalytic properties of titanium dioxide have been found by domestic surgeons. This scientific research shows that the new era of using photocatalytic properties to solve the problem of ecological environment pollution is coming. The single equipment opens up new research directions for refractory environmental pollutants such as organic dyes and industrial wastewater.
In the first chapter, the physical and chemical properties of titanium dioxide are introduced in detail. The basic principle of photocatalysis and the ways to improve the photocatalytic performance of titanium dioxide are also introduced. The application prospects of titanium dioxide film in ecological and environmental protection are also introduced.
In the second chapter, the common methods of preparing Ti02 thin films and the advantages and disadvantages of various methods are introduced, especially the RF magnetron sputtering method used in this experiment. The characterization methods of Ti02 thin films are briefly introduced, and the experimental principle of preparing Ti02 thin films by magnetron sputtering and the decomposition principle of methyl orange are introduced in detail.
In the third chapter, the operational procedures of Ti02 thin films prepared by magnetron sputtering are introduced, and the experimental procedures of Ti02 target and Ti02 thin films prepared by magnetron sputtering are described in detail.
In Chapter 4, the effects of substrate temperature and sputtering power on the crystal structure and photocatalytic properties of titanium dioxide thin films are discussed. The crystal orientation of the thin films are measured by XRD, the surface of the thin films is measured by atomic force microscopy, and the variation trend of the surface particle size is calculated by the roughness formula. The photocatalytic properties of the films are explained by decomposition of methyl orange.
In the fifth chapter, the effects of annealing temperature and annealing time on the structure and photocatalytic properties of Ti02 thin films are discussed. The optical properties of Ti02 thin films are analyzed by UV-Vis spectroscopy, the band gap of the films is calculated by the extrapolation method of indirect band gap, and the band gap is detected by XRD. The morphology of the films was analyzed by atomic force microscopy.
【學(xué)位授予單位】：西北大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2014
【分類號】：O484.1
【參考文獻(xiàn)】
相關(guān)期刊論文 前2條
1 邊亮;宋綿新;周天亮;趙效勇;戴清清;;Band gap calculation and photo catalytic activity of rare earths doped rutile TiO_2[J];Journal of Rare Earths;2009年03期
2 劉貴昂;楊貴進(jìn);鄭妃盛;;濺射功率對TiO_2薄膜結(jié)構(gòu)與特性的影響[J];真空科學(xué)與技術(shù)學(xué)報;2007年03期
，本文編號：2229024
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