本文選題：復(fù)合泵 + 開發(fā)設(shè)計(jì)��； 參考：《東北大學(xué)》2014年碩士論文

【摘要】：羅茨一旋片泵機(jī)組是低、中真空的常用獲得設(shè)備,也是高真空、超高真空泵的常用前級(jí)獲得設(shè)備。但旋片—羅茨泵真空機(jī)組仍有體積大、集成度低、消耗功率高、組裝復(fù)雜、使用元件多等缺點(diǎn)。本課題來源于浙江飛越機(jī)電有限公司的旋片一羅茨復(fù)合泵專利的設(shè)想,開發(fā)設(shè)計(jì)一種全新的復(fù)合泵。本復(fù)合泵可替代抽速為150L/s的羅茨—旋片泵機(jī)組,與機(jī)組相比,復(fù)合泵具有體積小,集成度高,消耗功率低,使用元件少等優(yōu)點(diǎn)。本復(fù)合泵工程實(shí)用性強(qiáng),具有明顯的市場(chǎng)優(yōu)勢(shì),前景廣闊。本文的主要研究工作如下：(1)基于浙江飛越機(jī)電有限公司的復(fù)合泵專利設(shè)想設(shè)計(jì)了全新的旋片—羅茨復(fù)合泵,包括泵的所有零部件的設(shè)計(jì)和選型,利用Solid Works軟件建立了初代樣機(jī)模型。(2)基于有限元理論,利用ANSYS Workbench12.0軟件對(duì)復(fù)合泵傳動(dòng)部件進(jìn)行了強(qiáng)度分析。(3)對(duì)樣機(jī)關(guān)鍵結(jié)構(gòu)進(jìn)行了優(yōu)化,包括轉(zhuǎn)子、傳動(dòng)部件及流道結(jié)構(gòu)等。(4)對(duì)復(fù)合泵樣機(jī)的主要性能參數(shù)進(jìn)行了計(jì)算和理論分析并與羅茨—旋片泵機(jī)組的相應(yīng)參數(shù)進(jìn)行了對(duì)比分析,復(fù)臺(tái)泵的各項(xiàng)性能優(yōu)于機(jī)組。(5)對(duì)復(fù)合泵樣機(jī)的容積效率、最大零流量壓縮比等進(jìn)行了計(jì)算和理論分析,確定了旋片—羅茨復(fù)合泵的適用范圍。主要結(jié)論如下：(1)本課題實(shí)現(xiàn)了旋片—羅茨復(fù)合泵設(shè)想從無到有的過程,建立了初代虛擬樣機(jī),從強(qiáng)度分析可以確定傳動(dòng)部件所受應(yīng)力和變形量很小,機(jī)械性能較好,對(duì)初代機(jī)進(jìn)行的結(jié)構(gòu)優(yōu)化形式為其它機(jī)械真空泵的結(jié)構(gòu)優(yōu)化設(shè)計(jì)提供了參考,為該產(chǎn)品的設(shè)計(jì)開發(fā)奠定了良好的基礎(chǔ)。(2)由旋片—羅茨復(fù)合泵的主要性能參數(shù)可以得到：與羅茨—旋片泵機(jī)組相比,復(fù)合泵性能優(yōu)于機(jī)組并具有明顯的市場(chǎng)優(yōu)勢(shì),后者集成度高、占用空間小、使用元件少、消耗功率低,為復(fù)合泵的實(shí)際生產(chǎn)、應(yīng)用及推廣提供了有力的數(shù)據(jù)支持。(3)旋片—羅茨復(fù)合泵的容積效率隨著入口氣體壓強(qiáng)的降低而升高,適用于低、中真空系統(tǒng)中,或作為前級(jí)泵在中、高真空范圍內(nèi)使用。(4)被抽氣體的分子量越小、溫度越高,旋片—羅茨復(fù)合泵的最大零流量壓縮比越小,不適用于在被抽氣體的分子量很小或溫度很高的工況下使用。
[Abstract]:Roots-vane pump unit is a common equipment for obtaining low and medium vacuum, as well as advanced equipment for high vacuum and ultra-high vacuum pump. However, the vacuum unit of rotary vane-Roots pump still has many disadvantages, such as large volume, low integration, high power consumption, complex assembly and many components. This subject comes from Zhejiang overflying Electromechanical Co., Ltd.'s idea of patent of rotary vane-Roots compound pump, developing and designing a new kind of compound pump. The compound pump can replace the Roots / rotary vane pump unit with 150 L / s pumping speed. Compared with the unit, the compound pump has the advantages of small volume, high integration, low power consumption and less components. The complex pump project has strong practicability, obvious market advantages and broad prospects. The main research work of this paper is as follows: (1) based on the patent conception of the composite pump of Zhejiang overflying Electromechanical Co., Ltd., a new rotary vane Roots compound pump is designed, including the design and selection of all parts of the pump. Based on finite element theory, using ANSYS Workbench 12.0 software to analyze the strength of driving parts of composite pump, the key structure of the prototype is optimized, including the rotor, the key structure of the prototype is established by using solid works software, which is based on the finite element theory, and the software ANSYS Workbench 12.0 is used to analyze the strength of the driving parts of the composite pump. The main performance parameters of the composite pump prototype are calculated and theoretically analyzed, and compared with the corresponding parameters of the Roots rotary vane pump unit. The performance of compound pump is better than that of unit. 5) the volume efficiency and the maximum zero flow compression ratio of composite pump prototype are calculated and analyzed theoretically, and the applicable range of rotary vane-Roots compound pump is determined. The main conclusions are as follows: (1) in this paper, the idea of rotary vane-Roots compound pump is realized, and the initial virtual prototype is established. From the strength analysis, it can be concluded that the stress and deformation of the transmission parts are very small, and the mechanical properties are better. The structural optimization form of the original machine provides a reference for the structural optimization design of other mechanical vacuum pumps. It lays a good foundation for the design and development of the product.) from the main performance parameters of the rotary vane-Roots composite pump, the performance of the compound pump is superior to that of the Roots-rotary vane pump and has obvious market advantages. The latter has the advantages of high integration, small space occupation, less components used and low power consumption, which is the practical production of the compound pump. The volumetric efficiency of the rotary plate-Roots composite pump increases with the decrease of the inlet gas pressure and is suitable for use in low, medium vacuum systems or as a front stage pump. The smaller the molecular weight of the extracted gas and the higher the temperature, the smaller the maximum zero flow compression ratio of the rotary vane-Roots composite pump, which is not suitable for use under the condition that the molecular weight of the extracted gas is very small or the temperature is very high.
【學(xué)位授予單位】：東北大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2014
【分類號(hào)】：TB752

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本文編號(hào)：2030054