本文選題：復(fù)合真空計 + 模糊PID�。� 參考：《東南大學(xué)》2016年碩士論文

【摘要】：復(fù)合真空計是用于測量真空度的工具之一,其性能指標(biāo)將直接影響科研、生產(chǎn)任務(wù)的完成質(zhì)量。隨著科學(xué)技術(shù)的發(fā)展,進一步提高真空計測量指標(biāo)與數(shù)字化程度,具有一定的研究意義和實用價值。論文目的是研究與設(shè)計一種由電離規(guī)和電阻規(guī)復(fù)合的寬量程真空計。文章主要對直接影響高真空測量指標(biāo)的穩(wěn)定發(fā)射電流控制、離子流檢測電路展開研究。首先明確高真空測量對電離規(guī)發(fā)射電流穩(wěn)定的需求指標(biāo),結(jié)合被控對象特征,進行了常用控制算法在穩(wěn)發(fā)射電流應(yīng)用中的可行性分析,在此基礎(chǔ)上,重點討論了參數(shù)模糊自整定PID算法控制發(fā)射電流穩(wěn)定的原理,對其功能進行仿真分析,并在單片機平臺上實現(xiàn)了發(fā)射電流的數(shù)字閉環(huán)穩(wěn)定控制。其次在對離子流信號的產(chǎn)生機理、檢測影響因素進行分析后,選取基于T型電阻網(wǎng)絡(luò)的改進型I-V轉(zhuǎn)換法作為離子流信號檢測方案,電路跨阻增益可切換、并對信號進行多級濾波以抑制噪聲,使電路能夠覆蓋檢測從皮安到微安的6個量級電流信號。復(fù)合真空計測試從穩(wěn)定發(fā)射電流、離子流信號檢測功能模塊電路和系統(tǒng)整機三個方面進行。結(jié)果表明,離子流信號測量范圍1pA～6uA,測量分辨率0.2pA,噪聲小于1.5mV；電離規(guī)發(fā)射電流、加速極、陰極對地電位示值誤差及時間穩(wěn)定度均小于±0.8%；電阻規(guī)1Pa-103Pa主要測量范圍內(nèi),示值誤差不超過±10%；電離規(guī)10-8Pa-10-1Pa測量范圍內(nèi),等效離子流法測試示值誤差不超過±1%。測試結(jié)果符合JBT10074-2004、JBT7463-2005等現(xiàn)行國家標(biāo)準(zhǔn)規(guī)定,能夠滿足一般工業(yè)生產(chǎn)及科學(xué)研究中的真空測量要求。
[Abstract]:A compound vacuum meter is one of the tools used to measure the vacuum degree. Its performance index will directly affect the quality of the research and production tasks. With the development of science and technology, it is of great significance and practical value to further improve the measurement index and digital degree of the vacuum meter. The purpose of this paper is to study and design a kind of ionization gauge and the design of a kind of ionization gauge. A wide range vacuum gauge combined with a resistance gauge. The article mainly studies the stable emission current control which directly affects the high vacuum measurement index and the ion flow detection circuit. First, the requirement of the high vacuum measurement for the stability of the ionization gauge is determined, and the common control algorithm is applied to the stable emission current in combination with the characteristics of the controlled object. On the basis of the feasibility analysis, the principle of parameter fuzzy self-tuning PID algorithm to control the stability of the emission current is discussed, and its function is simulated and analyzed, and the digital closed loop stable control of the emission current is realized on the single chip platform. Secondly, after the analysis of the mechanism of the ion flow signal and the analysis of the influencing factors, the selection of the influence factors is selected. An improved I-V conversion method based on T type resistance network is taken as an ion flow signal detection scheme. The circuit cross resistance gain can be switched and multistage filtering is used to suppress the noise. The circuit can cover 6 magnitude current signals from Pico to micro safety. The composite vacuum meter tests the function of the stable emission current and the ion flow signal detection function. The results show that the measurement range of the module circuit and the system is carried out in three aspects. The results show that the measurement range of the ion flow signal is 1pA to 6uA, the measurement resolution is 0.2pA, the noise is less than 1.5mV, the emission current of the ionization gauge, the acceleration pole, the indication error of the cathode to ground potential and the time stability are less than + 0.8%, and the indication error is not more than 1 within the main measuring range of the resistance gauge 1Pa-103Pa. 0%, within the measurement range of the ionization gauge 10-8Pa-10-1Pa, the measurement error of the equivalent ion flow method is not more than + 1%.. The test results are in accordance with the current national standards such as JBT10074-2004, JBT7463-2005 and so on. It can meet the requirements of the vacuum measurement in the general industrial production and scientific research.
【學(xué)位授予單位】：東南大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TB772

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本文編號：2001337