本文選題：多線切割機(jī) + 超聲波振動��； 參考：《浙江工業(yè)大學(xué)》2015年碩士論文

【摘要】：目前單、多晶硅等光電子材料已大量采用多線鋸進(jìn)行切片加工,但由于設(shè)備以及加工工藝復(fù)雜性,加工的晶片容易產(chǎn)生翹曲、崩邊,鋼絲也容易斷線等現(xiàn)象,急需開發(fā)一種新型的加工工藝來解決傳統(tǒng)多線切割機(jī)的加工問題,因此,研究振動輔助多線切割的加工工藝與設(shè)備具有重要意義。振動輔助多線切割是通過振動的作用改善切割時磨粒的運動狀態(tài)及切削性能,能很好的解決普通多線切割的排屑、散熱、斷線等問題,使其加工得到的切片表面質(zhì)量更高,損傷層的厚度大大降低,為實現(xiàn)更高精度的多線鋸加工提供了1條新的方法。本課題通過多線切割的原理開發(fā)了一種新型多線切割加工設(shè)備,該設(shè)備搭載了超聲波振動輔助裝置,可很好的完成振動輔助多線切割任務(wù),并對K9光學(xué)玻璃進(jìn)行切割實驗,實驗結(jié)果驗證了振動輔助多線鋸的加工效果。本文的主要工作和成果如下:1、介紹了課題的研究背景和意義、多線切割機(jī)的工作原理和其走線原理圖、游離磨料線切割和固著磨料線切割的加工機(jī)理、國內(nèi)外多線鋸加工設(shè)備的研究現(xiàn)狀、超聲波振動輔助多線鋸切割的理論基礎(chǔ)。2、根據(jù)實驗要求的多線切割機(jī)設(shè)計指標(biāo)和設(shè)計要求,設(shè)計出了具有超聲波振動輔助系統(tǒng)的ZGD100A多線切割機(jī),該部分包括多線切割機(jī)的結(jié)構(gòu)總體設(shè)計方案和多線切割機(jī)控制系統(tǒng)總體設(shè)計方案,重點對加工系統(tǒng)、導(dǎo)輪系統(tǒng)、排線系統(tǒng)、進(jìn)給系統(tǒng)、供漿系統(tǒng)、收放線系統(tǒng)、線張力控制裝置、箱體的結(jié)構(gòu)進(jìn)行了具體的分析設(shè)計,通過SolidWorks軟件建立了各個系統(tǒng)的三維模型圖,完成了整機(jī)的虛擬裝配,并且對主要的零部件進(jìn)行了詳細(xì)的強(qiáng)度校核。3、根據(jù)ZGD100A多線切割機(jī)的控制總體設(shè)計方案,完成了控制系統(tǒng)各功能模塊的設(shè)計和選型,對各功能模塊的作用和參數(shù)進(jìn)行了說明。并對多線切割機(jī)的多電機(jī)速度同步控制和張力控制兩個關(guān)鍵技術(shù)的程序設(shè)計進(jìn)行了介紹說明。4、根據(jù)超聲波振動系統(tǒng)的總體設(shè)計方案,完成了超聲波電源選型、超聲波換能器和超聲波變幅桿的材料選擇和結(jié)構(gòu)設(shè)計,并根據(jù)密封和裝配規(guī)則,完成了超聲波振動臺的虛擬裝配,對超聲波振動臺的制造有非常重要的指導(dǎo)意義。5、通過實驗驗證了超聲波振動輔助多線切割加工設(shè)備的合理性,得出了在相同的加工條件下,超聲波振動輔助鋸切加工優(yōu)于普通鋸切加工,且表面質(zhì)量有明顯的提升。
[Abstract]:At present, many optoelectronic materials, such as polysilicon, have been sliced by multi-wire saws. However, due to the complexity of equipment and processing technology, the processed wafers are prone to warp, collapse and wire breakage, etc. It is urgent to develop a new processing technology to solve the problem of traditional multi-wire cutting machine. Therefore, it is of great significance to study the processing technology and equipment of vibration assisted multi-wire cutting. Vibration-assisted multi-wire cutting is to improve the motion state and cutting performance of abrasive particles by vibration. It can solve the problems of chip removal, heat dissipation, wire breakage and so on, so that the surface quality of slicing can be improved. The thickness of the damaged layer is greatly reduced, which provides a new method for achieving higher precision multi-wire saw machining. Through the principle of multi-wire cutting, a new type of multi-wire cutting equipment is developed in this paper. The equipment is equipped with ultrasonic vibration auxiliary device, which can accomplish the task of vibration assisted multi-wire cutting, and carry on the experiment of K9 optical glass cutting. The experimental results verify the machining effect of vibration assisted multi-wire saw. The main work and results of this paper are as follows: 1. It introduces the research background and significance of the subject, the working principle of the multi-wire cutting machine and its schematic diagram, the machining mechanism of the free abrasive wire cutting and the fixed abrasive wire cutting. The research status of multi-wire saw processing equipment at home and abroad, the theoretical basis of ultrasonic vibration assisted multi-wire saw cutting, and the design index and design requirements of multi-wire cutting machine according to the experimental requirements, The ZGD100A multi-wire cutting machine with ultrasonic vibration auxiliary system is designed. This part includes the overall design scheme of the structure of the multi-wire cutting machine and the overall design of the control system of the multi-wire cutting machine, focusing on the machining system, the guide wheel system and the wire arrangement system. The feed system, slurry supply system, line collecting system, line tension control device and the structure of the box are analyzed and designed. The 3D model diagram of each system is established by SolidWorks software, and the virtual assembly of the whole machine is completed. According to the overall design scheme of ZGD100A multi-line cutting machine, the design and selection of each function module of the control system are completed, and the function and parameters of each function module are explained. The program design of two key technologies of speed synchronization control and tension control of multi-wire cutting machine is introduced. According to the overall design scheme of ultrasonic vibration system, ultrasonic power source selection is completed. The material selection and structure design of ultrasonic transducer and ultrasonic horn, and the virtual assembly of ultrasonic vibration table are completed according to the sealing and assembly rules. It has a very important guiding significance for the manufacture of ultrasonic vibration table. The rationality of ultrasonic vibration assisted multi-wire cutting processing equipment is verified by experiments, and it is concluded that under the same processing conditions, Ultrasonic vibration assisted sawing is superior to conventional sawing, and the surface quality is improved obviously.
【學(xué)位授予單位】：浙江工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TB559

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