本文選題：多級(jí)羅茨干式真空泵 + 氣固兩相流�。� 參考：《東北大學(xué)》2014年碩士論文

【摘要】：多級(jí)羅茨干式真空泵具有工作壓力范圍寬、可直排大氣、維護(hù)成本低、抽速大等優(yōu)點(diǎn),因此在半導(dǎo)體、制藥、冶金、石油化工、航空航天等領(lǐng)域被廣泛應(yīng)用。在PECVD、刻蝕等工藝過(guò)程中,多級(jí)羅茨干式真空泵往往面臨復(fù)雜苛刻的抽氣環(huán)境,如泵內(nèi)含有腐蝕性氣體、顆粒粉塵及存在溫度變化和壓力的脈動(dòng)等,甚至在泵腔內(nèi)存在復(fù)雜的物理變化和化學(xué)反應(yīng)。因此在苛刻條件下工作的同時(shí)保證多級(jí)羅茨泵的綜合性能意義深遠(yuǎn)。本文采用計(jì)算流體力學(xué)的方法對(duì)多級(jí)羅茨泵相鄰級(jí)流動(dòng)區(qū)域進(jìn)行了多組數(shù)值模擬,并對(duì)計(jì)算的結(jié)果進(jìn)行了對(duì)比分析。首先,本文利用三維建模軟件(Solidworks)按照設(shè)計(jì)尺寸建立了多級(jí)羅茨干式真空泵相鄰級(jí)流動(dòng)區(qū)域的三維幾何模型,并根據(jù)模型各部分的幾何特征及運(yùn)動(dòng)特點(diǎn)分別進(jìn)行了網(wǎng)格劃分。對(duì)于泵腔流動(dòng)區(qū)域,運(yùn)用外接Fortran程序的方法,分別對(duì)轉(zhuǎn)子與轉(zhuǎn)子間嚙合區(qū)域、轉(zhuǎn)子與泵腔間嚙合區(qū)域采用兩種網(wǎng)格更新方式,控制網(wǎng)格節(jié)點(diǎn)的運(yùn)動(dòng),實(shí)現(xiàn)了動(dòng)網(wǎng)格模擬。其次,根據(jù)多相流基本理論,采用歐拉-拉格朗日方法,利用ANSYS CFX軟件實(shí)現(xiàn)了多級(jí)羅茨干式真空泵相鄰級(jí)流動(dòng)區(qū)域在大氣壓條件下的氣固兩相流模擬,得到了收斂良好的計(jì)算結(jié)果。之后根據(jù)模擬結(jié)果分析了注入流場(chǎng)粒子的運(yùn)動(dòng)規(guī)律、跡線特征以及通過(guò)-沉積情況,對(duì)比了單向耦合、完全耦合兩種計(jì)算方法對(duì)模擬結(jié)果的影響,驗(yàn)證了數(shù)值模擬結(jié)果與稀相氣固兩相流理論的相符性。最后,考慮到多級(jí)羅茨干式真空泵在實(shí)際工作中面臨的不同抽氣環(huán)境,分別對(duì)粒子直徑、粒子與壁面相互作用、壓力-壓縮比、壁面粗糙度四個(gè)影響因素進(jìn)行了多組對(duì)比數(shù)值模擬。根據(jù)每組模擬的結(jié)果詳細(xì)分析了在不同工況下各因素對(duì)流場(chǎng)內(nèi)固體粒子運(yùn)動(dòng)參數(shù)影響的側(cè)重點(diǎn)以及通過(guò)-沉積特性。為工程實(shí)際中多級(jí)羅茨干式真空泵的改進(jìn)優(yōu)化提供了理論參考。
[Abstract]:Multistage Roots dry vacuum pump is widely used in semiconductor, pharmaceutical, metallurgy, petrochemical, aerospace and other fields because of its advantages such as wide range of working pressure, direct discharge of atmosphere, low maintenance cost and high pumping speed.In the process of PECVD, etching and so on, multistage Roots dry vacuum pump is often faced with complicated and harsh air extraction environment, such as corrosive gas, particle dust, temperature change and pressure pulsation, etc.Even in the pump cavity there are complex physical changes and chemical reactions.Therefore, it is of great significance to ensure the comprehensive performance of multistage Roots pump while working under harsh conditions.In this paper, the flow region of adjacent stages of multistage Roots pump is simulated by the method of computational fluid dynamics, and the results are compared and analyzed.Firstly, according to the design size, the 3D geometric model of the flow region of the adjacent stage of the multistage Roots dry vacuum pump is established by using the 3D modeling software Solidworks. and the mesh is divided according to the geometric characteristics and the motion characteristics of each part of the model.For the flow region of the pump cavity, two mesh updating methods are used to control the movement of the mesh nodes in the rotor-rotor meshing region and the rotor-pump cavity meshing region by using the method of external Fortran program, and the dynamic mesh simulation is realized.Secondly, according to the basic theory of multiphase flow, using Euler-Lagrangian method and ANSYS CFX software, the gas-solid two-phase flow simulation of adjacent stage flow region of multistage Roots dry vacuum pump under atmospheric pressure is realized.The calculation results with good convergence are obtained.Then, according to the simulation results, the movement law, trace characteristics and travers-deposition of injected particles are analyzed, and the effects of unidirectional coupling and complete coupling on the simulation results are compared.The agreement between the numerical simulation results and the theory of rarefied gas-solid two-phase flow is verified.Finally, considering the different pumping environment of the multistage Roots dry vacuum pump in practice, the particle diameter, the interaction between particle and wall, the pressure-compression ratio are respectively considered.Four factors affecting the roughness of the wall are numerically simulated.According to the results of each group of simulations, the effects of various factors on the motion parameters of solid particles in the convection field are analyzed in detail, as well as the travers-deposition characteristics.It provides a theoretical reference for the improvement and optimization of multistage Roots dry vacuum pump in engineering practice.
【學(xué)位授予單位】：東北大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2014
【分類號(hào)】：TB752

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