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  本文選題：非晶碳 + 梯度復(fù)合薄膜��； 參考：《浙江大學(xué)》2014年碩士論文

【摘要】：非晶碳(a-C)薄膜具有低的摩擦系數(shù)、高的硬度、優(yōu)異的耐磨性能以及良好的生物相容性,在摩擦學(xué)和生物醫(yī)學(xué)等領(lǐng)域具有很大的應(yīng)用前景。然而,膜生長過程中產(chǎn)生的高內(nèi)應(yīng)力和高硬度容易導(dǎo)致薄膜的結(jié)合失效,限制其在表面保護(hù)工程方面的實際應(yīng)用。本文把元素?fù)诫s、功能梯度結(jié)構(gòu)、多層結(jié)構(gòu)應(yīng)用于非晶碳基薄膜的設(shè)計當(dāng)中,并探索了薄膜組織結(jié)構(gòu)和機械性能的變化規(guī)律與內(nèi)在機理。 采用磁控濺射法制備出厚度約為1.5μm的含鈦非晶碳復(fù)合薄膜,并將偏壓梯度(bias-graded,從-20V逐漸變化到-150V)成功應(yīng)用于該薄膜的結(jié)構(gòu)設(shè)計中。研究發(fā)現(xiàn),偏壓梯度對含鈦非晶碳膜層中的TiC沒有太大的影響,但是偏壓梯度薄膜的內(nèi)應(yīng)力和sp3碳含量均有所降低,與常偏壓薄膜相比,偏壓梯度薄膜不僅能維持較高的硬度(約19GPa),還具有良好的韌性與結(jié)合強度。在1ON高載荷條件下,偏壓梯度復(fù)合薄膜在空氣中的摩擦系數(shù)和磨損率分別約為0.08和2.89×10-16m3N-1m-1；而在Hanks'溶液中的摩擦系數(shù)也為0.08,但磨損率低至4.63×10-17m3N-1m-1,展現(xiàn)出良好的耐磨性能,Hanks'溶液提供了明顯的潤滑效果。 通過非平衡磁控濺射設(shè)備系統(tǒng)沉積制備a-C/a-C:Ti納米多層薄膜和a-C薄膜,對a-C/a-C:Ti納米多層薄膜進(jìn)行初步探索。研究發(fā)現(xiàn),與a-C薄膜相比,該納米多層薄膜的硬度高達(dá)25GPa,且具有良好的韌性。由于TiC納米晶粒和大量界面的存在,薄膜的硬度和結(jié)合強度得到很大改善。另外,在無外界潤滑條件下,該多層薄膜的摩擦系數(shù)和磨損率分別約為0.080和1.95×10-16m3N-1m-1；而在Hanks'溶液中,其摩擦系數(shù)和磨損率則分別低至0.074和4.25×10-17m3N-1m-1。 通過沉積不同調(diào)制周期(12-70nm)的a-C/a-C:Ti納米多層薄膜,對多層薄膜進(jìn)行更深入的研究。結(jié)果表明,這一系列薄膜厚度均達(dá)到3μm左右,展現(xiàn)出良好的膜基協(xié)調(diào)能力和高的承載能力,隨著調(diào)制周期的減小,a-C/a-C:Ti納米多層薄膜的力學(xué)性能和摩擦學(xué)性能逐漸變好,調(diào)制周期為12nm的多層薄膜具有最高的結(jié)合強度、硬度(26GPa)、彈性模量(231.5GPa)、最低的摩擦系數(shù)(0.093)和磨損率(8.06×10-17m3N-1m-1)。
[Abstract]:Amorphous carbon monoxide (AC-C) thin films have high friction coefficient, high hardness, excellent wear resistance and good biocompatibility, so they have great application prospect in tribology and biomedicine.However, the high internal stress and high hardness produced during the growth of the film can easily lead to the failure of the film binding, which limits its practical application in the field of surface protection engineering.In this paper, elemental doping, functionally gradient structure and multilayer structure are applied to the design of amorphous carbon-based films. The changes of microstructure and mechanical properties of the films are discussed.Ti-containing amorphous carbon composite films with thickness of about 1.5 渭 m were prepared by magnetron sputtering. The bias-graded bias gradient was gradually changed from -20V to -150V) and successfully applied to the structural design of the films.It is found that the bias gradient has little effect on TiC in the amorphous carbon film containing titanium, but the internal stress and sp3 carbon content of the biasing gradient film are decreased, compared with that of the conventional bias film.The bias gradient film can not only maintain high hardness (about 19 GPA), but also have good toughness and bonding strength.Under the condition of high load of 1ON,The friction coefficient and wear rate of the bias gradient composite film in air are about 0.08 and 2.89 脳 10-16 m3N-1m-1, respectively, and the friction coefficient in Hanks' solution is 0.08, but the wear rate is as low as 4.63 脳 10-17m3N-1m-1.A-C/a-C:Ti nanocrystalline multilayer films and a-C thin films were prepared by unbalanced magnetron sputtering equipment, and the a-C/a-C:Ti nanocrystalline multilayer films were preliminarily explored.It is found that compared with a-C film, the hardness of the nanocrystalline multilayer film is as high as 25GPaand has good toughness.Due to the existence of TiC nanocrystals and a large number of interfaces, the hardness and bonding strength of the films were greatly improved.In addition, the friction coefficient and wear rate of the multilayer film are about 0.080 and 1.95 脳 10 ~ (-16) m ~ (3N-1m ~ (-1)) without external lubrication, while in Hanks' solution, the friction coefficient and wear rate are as low as 0.074 脳 10 ~ (-17) m ~ (-3) N ~ (-1) m ~ (-1) and 4.25 脳 10 ~ (-17) m ~ (3) N ~ (-1) m ~ (-1) respectively.By depositing a-C/a-C:Ti nanocrystalline multilayer films with different modulation periods (12-70 nm), the multilayer films were studied.The results show that the thickness of these films is about 3 渭 m, showing good coordination ability and high bearing capacity. With the decrease of modulation period, the mechanical properties and tribological properties of a-C / a-C: ti nanomultilayer films become better and better.The multilayer films with a modulation period of 12nm have the highest bonding strength, the hardness is 26 GPA, the elastic modulus is 231.5 GPaA, the lowest friction coefficient is 0.093) and the wear rate is 8.06 脳 10-17m3N-1m-1.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2014
【分類號】：TB383.2

【參考文獻(xiàn)】

相關(guān)期刊論文 前1條

1 宋建全;劉正堂;耿東生;鄭修麟;;長波紅外增透保護(hù)薄膜的進(jìn)展[J];材料導(dǎo)報;2001年12期

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本文編號：1743597