本文選題：精密隔振系統(tǒng)　切入點(diǎn)：正負(fù)剛度并聯(lián)　出處：《華中科技大學(xué)》2014年博士論文

【摘要】：精密主動(dòng)隔振系統(tǒng)是超精密加工、制造與測量裝備納米級精度生成的必要保障之一。它通過隔離精密設(shè)備外部環(huán)境的振動(dòng),以解決影響超精密裝備精度生成的微振動(dòng)問題。隨著超精密裝備精度朝著納米、甚至亞納米的演進(jìn),對隔振系統(tǒng)的性能要求也愈加苛刻,進(jìn)一步降低系統(tǒng)固有頻率以及實(shí)現(xiàn)共振峰附近振動(dòng)的高效隔離成為提升隔振系統(tǒng)性能的關(guān)鍵,同時(shí)也是當(dāng)前精密隔振領(lǐng)域研究的熱點(diǎn)與難點(diǎn)。本論文依托國家重大科研項(xiàng)目,面向重大工程的實(shí)際需求,針對精密主動(dòng)隔振系統(tǒng)越來越高的隔振要求,從結(jié)構(gòu)新構(gòu)型和振動(dòng)主動(dòng)控制兩方面入手,研究實(shí)現(xiàn)超低頻隔振關(guān)鍵單元的隔振機(jī)理,以及多自由度隔振系統(tǒng)精密定位-高性能隔振復(fù)合振動(dòng)主動(dòng)控制策略,完成主動(dòng)隔振系統(tǒng)樣機(jī)的設(shè)計(jì)與應(yīng)用,以進(jìn)一步提升隔振系統(tǒng)的性能,使其滿足超精密加工、制造與測量裝備日益苛刻的性能要求。 首先,本文分析了影響精密隔振系統(tǒng)性能的關(guān)鍵因素,提出了基于正負(fù)剛度并聯(lián)的精密隔振新構(gòu)型,解決了隔振系統(tǒng)為保障大承載力而難以實(shí)現(xiàn)超低頻隔振的問題。研究了基于磁引力的負(fù)剛度磁彈簧,分析了其剛度非線性的影響因素,通過參數(shù)優(yōu)化設(shè)計(jì)降低了剛度非線性度,為其在精密隔振系統(tǒng)中的應(yīng)用提供了基礎(chǔ)。提出了基于磁斥力的負(fù)剛度磁彈簧,通過曲線擬合獲得了剛度的近似表達(dá)式,搭建了單自由度隔振實(shí)驗(yàn)裝置,對磁斥力負(fù)剛度磁彈簧的可行性與有效性進(jìn)行了驗(yàn)證。建立了正負(fù)剛度并聯(lián)精密隔振系統(tǒng)單元級和系統(tǒng)級的數(shù)學(xué)模型,為控制策略的研究與制定提供了模型基礎(chǔ)。 然后,通過對振源特性和精密隔振系統(tǒng)自身隔振特性的分析,研究了正負(fù)剛度并聯(lián)精密隔振系統(tǒng)的主動(dòng)控制策略。提出了基于天棚阻尼的多自由度獨(dú)立模態(tài)振動(dòng)主動(dòng)控制方法,解決了制約傳統(tǒng)隔振系統(tǒng)低頻振動(dòng)傳遞率和高頻振動(dòng)衰減率不可兼得的矛盾。結(jié)合精密隔振系統(tǒng)精密定位-高性能隔振復(fù)合功能的需求,設(shè)計(jì)了位置控制器和多自由度模態(tài)解耦主動(dòng)控制器,完成了隔振系統(tǒng)樣機(jī)控制單元的硬件設(shè)計(jì)和軟件設(shè)計(jì)。 最后,構(gòu)建隔振系統(tǒng)測試實(shí)驗(yàn)臺(tái)對磁引力負(fù)剛度磁彈簧的有效性進(jìn)行了驗(yàn)證,并對隔振系統(tǒng)性能進(jìn)行了初步測試。測試結(jié)果表明,隔振系統(tǒng)實(shí)現(xiàn)了低至約1Hz的固有頻率,振動(dòng)傳遞率大于2Hz時(shí)小于-20dB(振動(dòng)衰減了90%),大于10Hz時(shí)小于-40dB(振動(dòng)衰減了99%)。在實(shí)際工程應(yīng)用中,將隔振系統(tǒng)樣機(jī)應(yīng)用于光刻機(jī)隔振機(jī)架,對隔振系統(tǒng)的時(shí)域和頻域性能進(jìn)行了最終測試,垂向精密定位精度為±4μm,共振峰傳遞率0dB,隔振系統(tǒng)性能滿足使用要求。實(shí)驗(yàn)結(jié)果表明,以正負(fù)剛度并聯(lián)隔振新構(gòu)型配合多自由度主動(dòng)控制策略使得隔振系統(tǒng)具有極低的固有頻率,保證隔振系統(tǒng)高頻衰減率的同時(shí)降低了固有頻率附近振動(dòng)的傳遞,大大提高了隔振系統(tǒng)的有效隔振帶寬。
[Abstract]:Precision active vibration isolation system is one of the necessary guarantees for nano-level precision generation of ultra-precision machining manufacturing and measuring equipment.By isolating the vibration of the external environment of the precision equipment, the problem of micro-vibration which affects the precision of the ultra-precision equipment is solved.As the precision of ultra-precision equipment evolves towards nanometers, even subnanometers, the performance requirements of vibration isolation systems become more and more stringent.Further reducing the natural frequency of the system and effectively isolating the vibration near the resonance peak become the key to improve the performance of the isolation system, and it is also a hot and difficult point in the field of precision vibration isolation.This paper relies on the national important scientific research project, facing the actual demand of the major project, aiming at the higher and higher vibration isolation requirement of the precision active vibration isolation system, starting from the structure new configuration and the vibration active control two aspects.The vibration isolation mechanism of the key unit of ultra-low frequency vibration isolation and the active vibration control strategy of multi-degree-of-freedom vibration isolation system are studied. The design and application of the prototype of the active vibration isolation system are completed.In order to further improve the performance of vibration isolation system, to meet the ultra-precision machining, manufacturing and measuring equipment increasingly demanding performance requirements.Firstly, the key factors affecting the performance of precision vibration isolation system are analyzed, and a new configuration of precision isolation system based on positive and negative stiffness parallel connection is proposed, which solves the problem that the vibration isolation system is difficult to achieve ultra-low frequency vibration isolation in order to ensure the large bearing capacity.The negative stiffness magnetic spring based on magnetic gravity is studied, and the influencing factors of its stiffness nonlinearity are analyzed. The stiffness nonlinearity is reduced by parameter optimization design, which provides the basis for its application in the precision vibration isolation system.A magnetic spring with negative stiffness based on magnetic repulsion force is proposed. The approximate expression of stiffness is obtained by curve fitting. A single degree of freedom vibration isolation experimental device is built, and the feasibility and effectiveness of the magnetic spring with negative stiffness of magnetic repulsion force are verified.The mathematical models of unit level and system level of parallel precision vibration isolation system with positive and negative stiffness are established, which provide the model basis for the research and formulation of control strategy.Then, the active control strategy of the parallel precision vibration isolation system with positive and negative stiffness is studied by analyzing the vibration source characteristics and the vibration isolation characteristics of the precision isolation system.The active control method of multi-degree-of-freedom independent modal vibration based on ceiling damping is proposed, which solves the contradiction that the low frequency vibration transmission rate and the high frequency vibration attenuation rate of the traditional isolation system can not be obtained simultaneously.The position controller and the multi-mode decoupling active controller are designed according to the requirements of precision positioning and high performance vibration isolation system. The hardware design and software design of the control unit of the vibration isolation system prototype are completed.Finally, the effectiveness of the magnetic spring with negative magnetic stiffness is verified by building a test bench for vibration isolation system, and the performance of the isolation system is preliminarily tested.The test results show that the vibration isolation system achieves the natural frequency of about 1Hz, and the vibration transfer rate is less than -20dB when the vibration is larger than 2Hz (the vibration attenuation is 90???In the practical engineering application, the vibration isolation system prototype is applied to the isolation frame of lithography machine, and the performance of the vibration isolation system in time domain and frequency domain is finally tested.The precision of vertical positioning is 鹵4 渭 m, the transfer rate of resonance peak is 0 dB, and the performance of vibration isolation system meets the requirement of application.The experimental results show that the new configuration of parallel vibration isolation with positive and negative stiffness and the active control strategy of multiple degrees of freedom make the vibration isolation system have extremely low natural frequency, which ensures the high frequency attenuation rate of the isolation system and reduces the vibration transmission near the natural frequency.The effective vibration isolation bandwidth of the vibration isolation system is greatly improved.
【學(xué)位授予單位】：華中科技大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2014
【分類號(hào)】：TB535.1

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本文編號(hào)：1717627