本文選題：精密隔振系統(tǒng)　切入點：正負剛度并聯(lián)　出處：《華中科技大學》2014年博士論文

【摘要】：精密主動隔振系統(tǒng)是超精密加工、制造與測量裝備納米級精度生成的必要保障之一。它通過隔離精密設備外部環(huán)境的振動,以解決影響超精密裝備精度生成的微振動問題。隨著超精密裝備精度朝著納米、甚至亞納米的演進,對隔振系統(tǒng)的性能要求也愈加苛刻,進一步降低系統(tǒng)固有頻率以及實現(xiàn)共振峰附近振動的高效隔離成為提升隔振系統(tǒng)性能的關鍵,同時也是當前精密隔振領域研究的熱點與難點。本論文依托國家重大科研項目,面向重大工程的實際需求,針對精密主動隔振系統(tǒng)越來越高的隔振要求,從結構新構型和振動主動控制兩方面入手,研究實現(xiàn)超低頻隔振關鍵單元的隔振機理,以及多自由度隔振系統(tǒng)精密定位-高性能隔振復合振動主動控制策略,完成主動隔振系統(tǒng)樣機的設計與應用,以進一步提升隔振系統(tǒng)的性能,使其滿足超精密加工、制造與測量裝備日益苛刻的性能要求。 首先,本文分析了影響精密隔振系統(tǒng)性能的關鍵因素,提出了基于正負剛度并聯(lián)的精密隔振新構型,解決了隔振系統(tǒng)為保障大承載力而難以實現(xiàn)超低頻隔振的問題。研究了基于磁引力的負剛度磁彈簧,分析了其剛度非線性的影響因素,通過參數(shù)優(yōu)化設計降低了剛度非線性度,為其在精密隔振系統(tǒng)中的應用提供了基礎。提出了基于磁斥力的負剛度磁彈簧,通過曲線擬合獲得了剛度的近似表達式,搭建了單自由度隔振實驗裝置,對磁斥力負剛度磁彈簧的可行性與有效性進行了驗證。建立了正負剛度并聯(lián)精密隔振系統(tǒng)單元級和系統(tǒng)級的數(shù)學模型,為控制策略的研究與制定提供了模型基礎。 然后,通過對振源特性和精密隔振系統(tǒng)自身隔振特性的分析,研究了正負剛度并聯(lián)精密隔振系統(tǒng)的主動控制策略。提出了基于天棚阻尼的多自由度獨立模態(tài)振動主動控制方法,解決了制約傳統(tǒng)隔振系統(tǒng)低頻振動傳遞率和高頻振動衰減率不可兼得的矛盾。結合精密隔振系統(tǒng)精密定位-高性能隔振復合功能的需求,設計了位置控制器和多自由度模態(tài)解耦主動控制器,完成了隔振系統(tǒng)樣機控制單元的硬件設計和軟件設計。 最后,構建隔振系統(tǒng)測試實驗臺對磁引力負剛度磁彈簧的有效性進行了驗證,并對隔振系統(tǒng)性能進行了初步測試。測試結果表明,隔振系統(tǒng)實現(xiàn)了低至約1Hz的固有頻率,振動傳遞率大于2Hz時小于-20dB(振動衰減了90%),大于10Hz時小于-40dB(振動衰減了99%)。在實際工程應用中,將隔振系統(tǒng)樣機應用于光刻機隔振機架,對隔振系統(tǒng)的時域和頻域性能進行了最終測試,垂向精密定位精度為±4μm,共振峰傳遞率0dB,隔振系統(tǒng)性能滿足使用要求。實驗結果表明,以正負剛度并聯(lián)隔振新構型配合多自由度主動控制策略使得隔振系統(tǒng)具有極低的固有頻率,保證隔振系統(tǒng)高頻衰減率的同時降低了固有頻率附近振動的傳遞,大大提高了隔振系統(tǒng)的有效隔振帶寬。
[Abstract]:Precision active vibration isolation system is one of the necessary guarantees for nano-level precision generation of ultra-precision machining manufacturing and measuring equipment.By isolating the vibration of the external environment of the precision equipment, the problem of micro-vibration which affects the precision of the ultra-precision equipment is solved.As the precision of ultra-precision equipment evolves towards nanometers, even subnanometers, the performance requirements of vibration isolation systems become more and more stringent.Further reducing the natural frequency of the system and effectively isolating the vibration near the resonance peak become the key to improve the performance of the isolation system, and it is also a hot and difficult point in the field of precision vibration isolation.This paper relies on the national important scientific research project, facing the actual demand of the major project, aiming at the higher and higher vibration isolation requirement of the precision active vibration isolation system, starting from the structure new configuration and the vibration active control two aspects.The vibration isolation mechanism of the key unit of ultra-low frequency vibration isolation and the active vibration control strategy of multi-degree-of-freedom vibration isolation system are studied. The design and application of the prototype of the active vibration isolation system are completed.In order to further improve the performance of vibration isolation system, to meet the ultra-precision machining, manufacturing and measuring equipment increasingly demanding performance requirements.Firstly, the key factors affecting the performance of precision vibration isolation system are analyzed, and a new configuration of precision isolation system based on positive and negative stiffness parallel connection is proposed, which solves the problem that the vibration isolation system is difficult to achieve ultra-low frequency vibration isolation in order to ensure the large bearing capacity.The negative stiffness magnetic spring based on magnetic gravity is studied, and the influencing factors of its stiffness nonlinearity are analyzed. The stiffness nonlinearity is reduced by parameter optimization design, which provides the basis for its application in the precision vibration isolation system.A magnetic spring with negative stiffness based on magnetic repulsion force is proposed. The approximate expression of stiffness is obtained by curve fitting. A single degree of freedom vibration isolation experimental device is built, and the feasibility and effectiveness of the magnetic spring with negative stiffness of magnetic repulsion force are verified.The mathematical models of unit level and system level of parallel precision vibration isolation system with positive and negative stiffness are established, which provide the model basis for the research and formulation of control strategy.Then, the active control strategy of the parallel precision vibration isolation system with positive and negative stiffness is studied by analyzing the vibration source characteristics and the vibration isolation characteristics of the precision isolation system.The active control method of multi-degree-of-freedom independent modal vibration based on ceiling damping is proposed, which solves the contradiction that the low frequency vibration transmission rate and the high frequency vibration attenuation rate of the traditional isolation system can not be obtained simultaneously.The position controller and the multi-mode decoupling active controller are designed according to the requirements of precision positioning and high performance vibration isolation system. The hardware design and software design of the control unit of the vibration isolation system prototype are completed.Finally, the effectiveness of the magnetic spring with negative magnetic stiffness is verified by building a test bench for vibration isolation system, and the performance of the isolation system is preliminarily tested.The test results show that the vibration isolation system achieves the natural frequency of about 1Hz, and the vibration transfer rate is less than -20dB when the vibration is larger than 2Hz (the vibration attenuation is 90???In the practical engineering application, the vibration isolation system prototype is applied to the isolation frame of lithography machine, and the performance of the vibration isolation system in time domain and frequency domain is finally tested.The precision of vertical positioning is 鹵4 渭 m, the transfer rate of resonance peak is 0 dB, and the performance of vibration isolation system meets the requirement of application.The experimental results show that the new configuration of parallel vibration isolation with positive and negative stiffness and the active control strategy of multiple degrees of freedom make the vibration isolation system have extremely low natural frequency, which ensures the high frequency attenuation rate of the isolation system and reduces the vibration transmission near the natural frequency.The effective vibration isolation bandwidth of the vibration isolation system is greatly improved.
【學位授予單位】：華中科技大學
【學位級別】：博士
【學位授予年份】：2014
【分類號】：TB535.1

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本文編號：1717627