本文選題：CrAlYN薄膜　切入點(diǎn)：CrAlSiN薄膜　出處：《沈陽(yáng)理工大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：CrAlN薄膜因?yàn)榫哂懈哂捕�、良好的耐磨性能以及�?yōu)異的高溫抗氧化等性能,得到了廣泛的關(guān)注,并已經(jīng)成功應(yīng)用在了刀具、模具、航空等許多領(lǐng)域。但是隨著科技的發(fā)展,對(duì)膜層的性能要求也變得越來(lái)越高。本論文主要研究Y、Si元素的加入對(duì)CrAlN薄膜性能的影響。采用磁控濺射技術(shù),在高速鋼基材上沉積不同Y含量的CrAlYN薄膜,不同Si含量的CrAlSiN薄膜以及CrAlSiYN薄膜,并進(jìn)行了大氣和真空高溫?zé)崽幚韺?shí)驗(yàn)。通過(guò)SEM、EDS、XRD以及納米壓痕儀等設(shè)備對(duì)薄膜元素組成、納米硬度、彈性模量以及熱處理前后的表面形貌和物相結(jié)構(gòu)進(jìn)行了表征。分別研究了Y、Si元素對(duì)薄膜硬度、彈性模量、物相組成、高溫抗氧化性能以及熱穩(wěn)定性能的影響。加入Y后薄膜沒(méi)有新的物相形成,但是(Cr,Al)N相的衍射峰取向由(200)向(111)轉(zhuǎn)變。與CrAlN膜層相比,CrAlYN薄膜Y含量為0.41at.%時(shí)膜層的硬度、彈性模量和高溫抗氧化性能顯著改善,Y含量2.75at.%和3.94at.%時(shí),膜層的綜合性能有所降低。大氣高溫?zé)崽幚砗蟮腃rAlYN膜層,O、Cr、Al、Fe和Y等元素均在晶內(nèi)均勻析出,但是在晶界和島狀大顆粒處,O富集而貧Al和貧Fe。CrAlSiN薄膜,硬度模量在Si含量為7.18at.%時(shí),相對(duì)較優(yōu)。CrAlSiN薄膜,800℃沒(méi)有氧化痕跡,抗氧化性能良好。900℃,出現(xiàn)Cr2O3和Al2O3氧化物,膜層發(fā)生氧化。1000℃膜層隆起,膜層與基體結(jié)合力減弱,存在大量的Fe2O3相和少量的Cr3O相,氧化嚴(yán)重。利用Cr30Al70合金靶制備的CrAlSiYN薄膜的硬度模量遠(yuǎn)低于CrAlSiN和CrAlYN薄膜,利用Cr50Al50合金靶制備的CrAlSiYN薄膜的硬度模量相比于利用Cr30Al70靶制備的CrAlSiYN薄膜有了很大提高,但是與CrAlSiN和CrAlYN膜層相比,硬度模量并沒(méi)有得到明顯改善。CrAlSiYN薄膜的高溫抗氧化性能也沒(méi)有提升,1000℃時(shí),已經(jīng)完全氧化失效。經(jīng)850℃真空熱處理后,熱穩(wěn)定性能良好,真空熱處理溫度升高到950和1050℃時(shí),薄膜表面出現(xiàn)網(wǎng)狀裂紋。1050℃時(shí)膜層表面呈現(xiàn)出沙粒狀向外鼓出的形貌。
[Abstract]:Because of its high hardness, good wear resistance and excellent high temperature oxidation resistance, CrAlN thin film has been widely concerned, and has been successfully applied in many fields, such as cutting tools, mould, aviation and so on. But with the development of science and technology, In this paper, the effect of the addition of Y Si on the properties of CrAlN thin films was studied. The CrAlYN films with different Y content were deposited on high speed steel substrates by magnetron sputtering. CrAlSiN films and CrAlSiYN thin films with different Si content were subjected to high temperature heat treatment in atmosphere and vacuum. The elastic modulus, surface morphology and phase structure of the films before and after heat treatment were characterized. The effect of high temperature oxidation resistance and thermal stability. There was no new phase formation after adding Y, but the diffraction peak orientation of CrAlN phase changed from 200 to 111). The hardness of CrAlYN film was 0.41at.wt% compared with that of CrAlN film. When the modulus of elasticity and oxidation resistance at high temperature improved 2.75at.% and 3.94at.%, the comprehensive properties of the CrAlYN film decreased. After high temperature heat treatment in atmosphere, the elements of CrAlYN film, such as OU, Cr, Al, Fe and Y, were precipitated homogeneously in the crystal. However, when the hardness modulus of Al and Fe.CrAlSiN thin films is 7.18at.wt%, there is no trace of oxidation at 800 鈩，

本文編號(hào)：1570414