本文關(guān)鍵詞： 爪型干式真空泵 轉(zhuǎn)子型線 有限元分析 輕量化設(shè)計(jì) 磁流體密封　出處：《中北大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：伴隨著工業(yè)5.0的到來,工業(yè)上對真空泵的需求與日俱增,使用者對其要求也越來越高。爪型干式真空泵是眾多干式真空泵中的一種,目前被廣泛應(yīng)用到航天、半導(dǎo)體、制藥、化工等行業(yè)。由于國內(nèi)對爪型干式真空泵的研究工作起步比較晚,因此國內(nèi)市場所使用的高端泵仍然需要從外國進(jìn)口,因此價格也明顯的高于國外。為了滿足高新技術(shù)產(chǎn)業(yè)和特殊使用場合的需求,國內(nèi)有多所高校和科研院所致力于開發(fā)、研究爪型干式真空泵。本論文以爪型干式真空泵為研究對象,對單級爪型干式真空泵的整體結(jié)構(gòu),轉(zhuǎn)子型線設(shè)計(jì)以及密封問題等內(nèi)容進(jìn)行了深入的研究和探討。主要完成了以下工作:(1)論文介紹了國內(nèi)外針對干式真空泵的一些研究現(xiàn)狀,闡述了干式真空泵的概念和分類以及爪型干式真空泵的結(jié)構(gòu)、工作原理和工作過程;(2)對爪型干式真空泵的整體結(jié)構(gòu)和關(guān)鍵零部件進(jìn)行了設(shè)計(jì)。主要包括泵腔的設(shè)計(jì)、轉(zhuǎn)子的設(shè)計(jì)、傳動軸的設(shè)計(jì)、校核及受力分析,密封結(jié)構(gòu)設(shè)計(jì)、齒輪以及電機(jī)的選擇;(3)設(shè)計(jì)了一種新型爪型干式真空泵轉(zhuǎn)子。現(xiàn)有的爪型干式真空泵轉(zhuǎn)子在位于爪頂與爪頂端圓弧相連接的地方會有兩個尖點(diǎn),完成的是點(diǎn)與曲線相嚙合的工作過程,這種工作過程會產(chǎn)生很多弊端。針對這個問題本論文巧妙的將尖點(diǎn)去掉,使得轉(zhuǎn)子在工作過程中避免了點(diǎn)與曲線的嚙合,從而完成圓弧與曲線相嚙合的工作過程;通過輕量化設(shè)計(jì)使得轉(zhuǎn)子重量減輕了1/4到1/5,有效地減少了原材料消耗并使其在工作中降低了能耗;對轉(zhuǎn)子的動平衡進(jìn)行了分析,并通過Pro/e軟件驗(yàn)證了改進(jìn)后轉(zhuǎn)子的平衡性;把爪型干式真空泵工作特性模擬的壓力場、溫度場的分布作為加載條件,利用有限元分析軟件得到了在介質(zhì)壓力作用下轉(zhuǎn)子所受的應(yīng)力情況。(4)將新型磁流體密封技術(shù)應(yīng)用到爪型干式真空泵中。介紹了新型磁流體密封技術(shù)的原理,設(shè)計(jì)了新型磁流體密封結(jié)構(gòu)并裝配到爪型干式真空泵上,利用ANSYS有限元分析軟件對所設(shè)計(jì)的新型磁流體密封結(jié)構(gòu)進(jìn)行了磁場分析,驗(yàn)證了新型磁流體密封技術(shù)滿足密封耐壓要求,并通過對比試驗(yàn)驗(yàn)證了磁流體密封技術(shù)性能的優(yōu)越性。通過對爪型干式真空泵進(jìn)行優(yōu)化設(shè)計(jì),其性能得到顯著提升,為后續(xù)研究出更優(yōu)良的爪型干式真空泵奠定了基礎(chǔ)。
[Abstract]:With the arrival of industry 5.0, the demand for vacuum pumps in industry is increasing day by day, and users are demanding more and more. Claw dry vacuum pumps are one of many dry vacuum pumps, which are widely used in aerospace, semiconductors and pharmaceuticals. Chemical industry and other industries. Because the domestic research work on the claw type dry vacuum pump started relatively late, the high-end pumps used in the domestic market still need to be imported from abroad. Therefore, the price is obviously higher than that of abroad. In order to meet the needs of high and new technology industries and special use occasions, there are many universities and scientific research institutes in China devoted to development. This paper takes the claw type dry vacuum pump as the research object, and analyzes the whole structure of the single stage claw dry vacuum pump. The rotor profile design and sealing problems are deeply studied and discussed. The following work is accomplished: 1) the paper introduces some research status of dry vacuum pump at home and abroad. The concept and classification of the dry vacuum pump and the structure, working principle and working process of the claw type vacuum pump are described. The integral structure and key parts of the claw type dry vacuum pump are designed, including the design of the pump cavity. Rotor design, drive shaft design, check and force analysis, seal structure design, A new type of claw type dry vacuum pump rotor is designed. The existing claw type dry vacuum pump rotor has two sharp points at the point where the claw top is connected to the claw top arc. The work process of point and curve meshing is completed, which will produce many disadvantages. This paper cleverly removes the cusp, which makes the rotor avoid the meshing between point and curve in the working process. The rotor weight is reduced by 1/4 to 1 / 5 by lightweight design, which effectively reduces the consumption of raw materials and reduces the energy consumption in the work. The dynamic balance of the rotor is analyzed. The balance of the improved rotor is verified by Pro/e software, and the pressure field and temperature field distribution of the claw dry vacuum pump are taken as the loading conditions. By using finite element analysis software, the stress of rotor under the action of medium pressure is obtained. The new magnetic fluid seal technology is applied to the claw type dry vacuum pump. The principle of the new magnetic fluid seal technology is introduced. A new type of magnetic fluid seal structure is designed and assembled to the claw type dry vacuum pump. The magnetic field analysis of the new magnetic fluid seal structure is carried out by using ANSYS finite element analysis software. It is verified that the new type of magnetofluid seal technology can meet the requirements of seal pressure, and the superiority of magnetic fluid seal technology is verified by contrast test. By optimizing the design of claw type dry vacuum pump, its performance is greatly improved. It lays a foundation for the further study of a better claw type dry vacuum pump.
【學(xué)位授予單位】：中北大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TB752

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