本文選題：全息閃耀光柵 + 傅里葉合成曝光　； 參考：《上海理工大學(xué)》2013年博士論文

【摘要】：全息光柵是一種廣泛應(yīng)用于光譜儀器的分光器件,也是光譜儀器的核心器件。光柵分光能力將直接制約著光譜儀器的分辨本領(lǐng)。就目前國(guó)內(nèi)光譜儀器高端市場(chǎng)主要為國(guó)外品牌所壟斷的現(xiàn)狀,積極研發(fā)具有自主知識(shí)產(chǎn)權(quán)的高性能分光器件的經(jīng)濟(jì)價(jià)值十分突出。本論文依托于國(guó)家重大科學(xué)儀器開發(fā)專項(xiàng)--高性能光譜儀器關(guān)鍵元器件與部件的應(yīng)用及工程化開發(fā)(2011YQ15004004),以傅里葉合成曝光為基礎(chǔ),重點(diǎn)研究特種全息光柵(包括全息中階梯光柵,亞波長(zhǎng)金屬線柵)的全息制作工藝,并理論研究了雙層金屬線柵結(jié)構(gòu)的偏振特性及其潛在的應(yīng)用。作為高端光譜儀器的核心分光器件,目前中階梯光柵產(chǎn)品的制作技術(shù)僅為國(guó)外幾家公司所掌握,且均采用機(jī)械刻劃和鍍膜復(fù)制的方法制作而成。本文以傅里葉級(jí)數(shù)為依據(jù),提出了一種任意槽型閃耀光柵的全息制作方法,并以中階梯光柵為例,設(shè)計(jì)了全息光路,精確控制了各傅里葉級(jí)數(shù)的匹配疊加,曝光顯影后在光刻膠上實(shí)現(xiàn)了近似的中階梯光柵槽型,為全息閃耀光柵的制作提供了一種新的思路。較傳統(tǒng)的機(jī)械刻劃光柵,全息光柵具有快速、低成本、無(wú)鬼線等優(yōu)點(diǎn),對(duì)制作環(huán)境也較為寬松,且光路參數(shù)可以自由調(diào)整,理論上可以能夠制作任意槽型的閃耀光柵。金屬線柵偏振器是一種以微納結(jié)構(gòu)為基礎(chǔ)的新型偏振器件,較傳統(tǒng)的晶體雙折射偏振器件體積更小、性能更優(yōu),因此已經(jīng)廣泛使用于光線通信、LCD顯示、偏振光成像等領(lǐng)域。然金屬線柵的制作通常使用電子束直寫和納米壓印技術(shù),工藝復(fù)雜成本高。本文結(jié)合實(shí)驗(yàn)室現(xiàn)有的全息工藝基礎(chǔ)和離子束蝕刻條件,設(shè)計(jì)并制作了一種近紅外波段的金屬線柵偏振器,測(cè)試結(jié)果顯示該偏振片基本上達(dá)到了設(shè)計(jì)指標(biāo),能夠使用于近紅外波段。利用FDTD算法(時(shí)域有限差分法)分析了各種結(jié)構(gòu)參數(shù)對(duì)金屬線柵偏振器性能的影響,為金屬線柵偏振器的設(shè)計(jì)提供理論依據(jù);就目前市場(chǎng)暫無(wú)紫外波段的線柵偏振器的現(xiàn)狀,根據(jù)雙層金屬線柵的特性,設(shè)計(jì)了一種可調(diào)諧式金屬線柵偏振器,運(yùn)用壓電陶瓷的調(diào)諧作用,使得特定波長(zhǎng)的TM透射增強(qiáng)而TE偏振干涉相消,從而極大地提高雙層線柵結(jié)構(gòu)的消光比,因此該器件可使用于紫外波段,有效地將金屬線柵偏振器的應(yīng)用波段擴(kuò)展至深紫外波段。另外,仿真分析發(fā)現(xiàn),雙層金屬線柵結(jié)構(gòu)具有豐富的物理現(xiàn)象,除單層金屬線柵的偏振特性外,當(dāng)兩層線柵的間距在波長(zhǎng)量級(jí)以內(nèi)時(shí),還具有表面波耦合效應(yīng),即產(chǎn)生特定波段的透射增強(qiáng);當(dāng)線柵的間距遠(yuǎn)大于入射波長(zhǎng)時(shí),雙層線柵表現(xiàn)為F-P腔的特性,即滿足諧振條件的特定波長(zhǎng)干涉相長(zhǎng),從而獲得較高的透過(guò)率,不滿足諧振條件的波長(zhǎng)干涉相消,透過(guò)率降低。減反射表面一直是應(yīng)用光學(xué)的研究熱點(diǎn),已廣泛應(yīng)用于光纖通信、太陽(yáng)能電池、光電探測(cè)器等光學(xué)系統(tǒng)和光學(xué)器件。針對(duì)激光系統(tǒng)的光學(xué)反饋敏感性,設(shè)計(jì)了一種極低反射率的雙層光柵表面,正入射時(shí)反射率可以低至10-4,較普通的單層光柵抗反射結(jié)構(gòu)有很大的提高。利用雙層金屬線柵的F-P腔特性,提出了一種改進(jìn)型的F-P腔折射率傳感器,較常見的F-P腔傳感器不同,該器件具有TM偏振和TE偏振的兩路信號(hào),可根據(jù)兩路信號(hào)的位相關(guān)系判斷折射率的增加或者減小,即可以判斷折射率的變化趨勢(shì),因此該器件可應(yīng)用于化學(xué)可逆反應(yīng)的實(shí)時(shí)監(jiān)測(cè)等領(lǐng)域。
[Abstract]:Holographic grating is a kind of optical device which is widely used in spectral instruments. It is also the core component of spectral instruments. The ability of grating light splitting will directly restrict the discernibility of spectral instruments. At present, the high end market of the domestic spectral instruments is mainly monopolized by foreign brands, and is actively developing a high-performance optical splitter with independent intellectual property rights. Based on the application and engineering development of key components and components of high performance spectral instruments (2011YQ15004004), based on Fu Liye synthetic exposure, this paper focuses on the study of special holographic gratings (including holographic gratings in holography, subwavelength wire grid). The polarization characteristics and potential applications of the two-layer metal grid structure are studied in theory. As the core optical component of the high end spectral instrument, the production technology of the ladder grating product is only mastered by several foreign companies at present, and is made by the method of mechanical characterization and plating film replication. This paper is based on Fourier class On the basis of the number, a holographic making method of the flashing gratings with arbitrary grooves is proposed, and the holographic optical path is designed with the medium ladder grating as an example. The matching superposition of the Fourier series is controlled accurately. The approximate middle step grating groove is realized on the photoresist after exposure development, which provides a new thought for the production of the holographic blazed grating. Compared with the traditional mechanical engraved grating, the holographic grating has the advantages of fast, low cost, and no ghost line. It is also easy to make the manufacturing environment, and the parameters of the optical path can be adjusted freely. In theory, it can be able to make any slot type blazed grating. The metal grating polarizer is a new polarization device based on the micro structure, and it is more traditional. Crystal birefringent polarizer has a smaller size and better performance, so it has been widely used in light communication, LCD display, polarized light imaging and other fields. However, the fabrication of metal grids usually uses electronic beam direct writing and nano imprint technology, with high complex cost. This paper combines the existing holographic technology base and ion beam etching conditions in the laboratory. A metal wire grating polarizer in the near infrared band is designed and fabricated. The test results show that the polarizer basically reaches the design index and can be used in the near infrared band. Using the FDTD algorithm (FD), the influence of various structural parameters on the metal grid polarizer's energy is analyzed, which provides the design of the metal grid polarizer. In theory, a tunable metal grating polarizer is designed according to the characteristics of the two-layer metal grid, which makes the TM transmission of a specific wavelength enhanced and the TE polarization interference cancels, thus greatly improving the extinction of the double grid structure. As a result, the device can be used in the ultraviolet band to effectively extend the application band of the metal grid polarizer to the deep ultraviolet band. In addition, the simulation analysis shows that the double layer metal grid structure has a rich physical phenomenon. Besides the polarization characteristics of the single layer wire grid, the surface of the two layer grid is also with the surface when the distance is within the wavelength order. The wave coupling effect produces transmission enhancement in a particular band. When the spacing of the grid is far greater than the incident wavelength, the double grid shows the characteristic of the F-P cavity, that is, the specific wavelength interferes with the specific wavelength of the resonant condition, thus obtaining higher transmittance. The wavelength interference cancellation is not satisfied and the transmittance is reduced. The surface of the antireflection surface is always the same. It has been widely used in optical systems, such as optical fiber communications, solar cells, photodetectors and other optical systems and optical devices. For the optical feedback sensitivity of the laser system, a very low reflectivity double grating surface is designed. The reflectivity can be as low as 10-4 at positive incidence, which is larger than that of the ordinary single layer grating anti reflective structure. By using the F-P cavity characteristics of a double layer wire grid, an improved F-P cavity refractive index sensor is proposed, which is different from the common F-P cavity sensor. The device has two signals of TM polarization and TE polarization. The refractive index can be judged to be increased or reduced according to the phase relation of the two signals, that is, the trend of the refractive index can be judged. Therefore, the device can be applied to real time monitoring of chemical reversible reactions.
【學(xué)位授予單位】：上海理工大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2013
【分類號(hào)】：TH744.1
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本文編號(hào)：2085489