本文選題：全息閃耀光柵 + 傅里葉合成曝光　； 參考：《上海理工大學》2013年博士論文

【摘要】：全息光柵是一種廣泛應用于光譜儀器的分光器件,也是光譜儀器的核心器件。光柵分光能力將直接制約著光譜儀器的分辨本領。就目前國內(nèi)光譜儀器高端市場主要為國外品牌所壟斷的現(xiàn)狀,積極研發(fā)具有自主知識產(chǎn)權的高性能分光器件的經(jīng)濟價值十分突出。本論文依托于國家重大科學儀器開發(fā)專項--高性能光譜儀器關鍵元器件與部件的應用及工程化開發(fā)(2011YQ15004004),以傅里葉合成曝光為基礎,重點研究特種全息光柵(包括全息中階梯光柵,亞波長金屬線柵)的全息制作工藝,并理論研究了雙層金屬線柵結構的偏振特性及其潛在的應用。作為高端光譜儀器的核心分光器件,目前中階梯光柵產(chǎn)品的制作技術僅為國外幾家公司所掌握,且均采用機械刻劃和鍍膜復制的方法制作而成。本文以傅里葉級數(shù)為依據(jù),提出了一種任意槽型閃耀光柵的全息制作方法,并以中階梯光柵為例,設計了全息光路,精確控制了各傅里葉級數(shù)的匹配疊加,曝光顯影后在光刻膠上實現(xiàn)了近似的中階梯光柵槽型,為全息閃耀光柵的制作提供了一種新的思路。較傳統(tǒng)的機械刻劃光柵,全息光柵具有快速、低成本、無鬼線等優(yōu)點,對制作環(huán)境也較為寬松,且光路參數(shù)可以自由調(diào)整,理論上可以能夠制作任意槽型的閃耀光柵。金屬線柵偏振器是一種以微納結構為基礎的新型偏振器件,較傳統(tǒng)的晶體雙折射偏振器件體積更小、性能更優(yōu),因此已經(jīng)廣泛使用于光線通信、LCD顯示、偏振光成像等領域。然金屬線柵的制作通常使用電子束直寫和納米壓印技術,工藝復雜成本高。本文結合實驗室現(xiàn)有的全息工藝基礎和離子束蝕刻條件,設計并制作了一種近紅外波段的金屬線柵偏振器,測試結果顯示該偏振片基本上達到了設計指標,能夠使用于近紅外波段。利用FDTD算法(時域有限差分法)分析了各種結構參數(shù)對金屬線柵偏振器性能的影響,為金屬線柵偏振器的設計提供理論依據(jù);就目前市場暫無紫外波段的線柵偏振器的現(xiàn)狀,根據(jù)雙層金屬線柵的特性,設計了一種可調(diào)諧式金屬線柵偏振器,運用壓電陶瓷的調(diào)諧作用,使得特定波長的TM透射增強而TE偏振干涉相消,從而極大地提高雙層線柵結構的消光比,因此該器件可使用于紫外波段,有效地將金屬線柵偏振器的應用波段擴展至深紫外波段。另外,仿真分析發(fā)現(xiàn),雙層金屬線柵結構具有豐富的物理現(xiàn)象,除單層金屬線柵的偏振特性外,當兩層線柵的間距在波長量級以內(nèi)時,還具有表面波耦合效應,即產(chǎn)生特定波段的透射增強;當線柵的間距遠大于入射波長時,雙層線柵表現(xiàn)為F-P腔的特性,即滿足諧振條件的特定波長干涉相長,從而獲得較高的透過率,不滿足諧振條件的波長干涉相消,透過率降低。減反射表面一直是應用光學的研究熱點,已廣泛應用于光纖通信、太陽能電池、光電探測器等光學系統(tǒng)和光學器件。針對激光系統(tǒng)的光學反饋敏感性,設計了一種極低反射率的雙層光柵表面,正入射時反射率可以低至10-4,較普通的單層光柵抗反射結構有很大的提高。利用雙層金屬線柵的F-P腔特性,提出了一種改進型的F-P腔折射率傳感器,較常見的F-P腔傳感器不同,該器件具有TM偏振和TE偏振的兩路信號,可根據(jù)兩路信號的位相關系判斷折射率的增加或者減小,即可以判斷折射率的變化趨勢,因此該器件可應用于化學可逆反應的實時監(jiān)測等領域。
[Abstract]:Holographic grating is a kind of optical device which is widely used in spectral instruments. It is also the core component of spectral instruments. The ability of grating light splitting will directly restrict the discernibility of spectral instruments. At present, the high end market of the domestic spectral instruments is mainly monopolized by foreign brands, and is actively developing a high-performance optical splitter with independent intellectual property rights. Based on the application and engineering development of key components and components of high performance spectral instruments (2011YQ15004004), based on Fu Liye synthetic exposure, this paper focuses on the study of special holographic gratings (including holographic gratings in holography, subwavelength wire grid). The polarization characteristics and potential applications of the two-layer metal grid structure are studied in theory. As the core optical component of the high end spectral instrument, the production technology of the ladder grating product is only mastered by several foreign companies at present, and is made by the method of mechanical characterization and plating film replication. This paper is based on Fourier class On the basis of the number, a holographic making method of the flashing gratings with arbitrary grooves is proposed, and the holographic optical path is designed with the medium ladder grating as an example. The matching superposition of the Fourier series is controlled accurately. The approximate middle step grating groove is realized on the photoresist after exposure development, which provides a new thought for the production of the holographic blazed grating. Compared with the traditional mechanical engraved grating, the holographic grating has the advantages of fast, low cost, and no ghost line. It is also easy to make the manufacturing environment, and the parameters of the optical path can be adjusted freely. In theory, it can be able to make any slot type blazed grating. The metal grating polarizer is a new polarization device based on the micro structure, and it is more traditional. Crystal birefringent polarizer has a smaller size and better performance, so it has been widely used in light communication, LCD display, polarized light imaging and other fields. However, the fabrication of metal grids usually uses electronic beam direct writing and nano imprint technology, with high complex cost. This paper combines the existing holographic technology base and ion beam etching conditions in the laboratory. A metal wire grating polarizer in the near infrared band is designed and fabricated. The test results show that the polarizer basically reaches the design index and can be used in the near infrared band. Using the FDTD algorithm (FD), the influence of various structural parameters on the metal grid polarizer's energy is analyzed, which provides the design of the metal grid polarizer. In theory, a tunable metal grating polarizer is designed according to the characteristics of the two-layer metal grid, which makes the TM transmission of a specific wavelength enhanced and the TE polarization interference cancels, thus greatly improving the extinction of the double grid structure. As a result, the device can be used in the ultraviolet band to effectively extend the application band of the metal grid polarizer to the deep ultraviolet band. In addition, the simulation analysis shows that the double layer metal grid structure has a rich physical phenomenon. Besides the polarization characteristics of the single layer wire grid, the surface of the two layer grid is also with the surface when the distance is within the wavelength order. The wave coupling effect produces transmission enhancement in a particular band. When the spacing of the grid is far greater than the incident wavelength, the double grid shows the characteristic of the F-P cavity, that is, the specific wavelength interferes with the specific wavelength of the resonant condition, thus obtaining higher transmittance. The wavelength interference cancellation is not satisfied and the transmittance is reduced. The surface of the antireflection surface is always the same. It has been widely used in optical systems, such as optical fiber communications, solar cells, photodetectors and other optical systems and optical devices. For the optical feedback sensitivity of the laser system, a very low reflectivity double grating surface is designed. The reflectivity can be as low as 10-4 at positive incidence, which is larger than that of the ordinary single layer grating anti reflective structure. By using the F-P cavity characteristics of a double layer wire grid, an improved F-P cavity refractive index sensor is proposed, which is different from the common F-P cavity sensor. The device has two signals of TM polarization and TE polarization. The refractive index can be judged to be increased or reduced according to the phase relation of the two signals, that is, the trend of the refractive index can be judged. Therefore, the device can be applied to real time monitoring of chemical reversible reactions.
【學位授予單位】：上海理工大學
【學位級別】：博士
【學位授予年份】：2013
【分類號】：TH744.1
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本文編號：2085489