本文選題：玻璃應(yīng)力 + 磁光調(diào)制��； 參考：《中國(guó)科學(xué)院研究生院（西安光學(xué)精密機(jī)械研究所）》2014年博士論文

【摘要】：本文主要討論了利用磁光調(diào)制實(shí)現(xiàn)玻璃內(nèi)應(yīng)力高精度檢測(cè)系統(tǒng)的理論分析與工程實(shí)現(xiàn)問題。 本文首先對(duì)玻璃內(nèi)應(yīng)力的形成原因及其存在時(shí)的影響進(jìn)行了簡(jiǎn)要的描述，介紹了應(yīng)力檢測(cè)的用途，進(jìn)而介紹了國(guó)內(nèi)外應(yīng)力檢測(cè)技術(shù)發(fā)展的現(xiàn)狀，指出我國(guó)應(yīng)力檢測(cè)技術(shù)與國(guó)外的差距。高精度、自動(dòng)化測(cè)量是目前玻璃內(nèi)應(yīng)力高端測(cè)量領(lǐng)域普遍需要具備的功能，以我國(guó)目前內(nèi)應(yīng)力檢測(cè)技術(shù)的發(fā)展?fàn)顩r，無(wú)法滿足玻璃內(nèi)應(yīng)力高精度測(cè)量的需求。國(guó)內(nèi)高精度內(nèi)應(yīng)力測(cè)量領(lǐng)域均采用國(guó)外設(shè)備，設(shè)備極其昂貴，這就為研究一種新型的、具有國(guó)內(nèi)自主知識(shí)產(chǎn)權(quán)的高精度玻璃內(nèi)應(yīng)力檢測(cè)技術(shù)提出了迫切的需求。 磁光調(diào)制法是對(duì)玻璃內(nèi)應(yīng)力進(jìn)行高精度檢測(cè)的新途徑。論文詳細(xì)介紹了磁光調(diào)制技術(shù)測(cè)量玻璃內(nèi)應(yīng)力的基本原理、結(jié)構(gòu)組成和關(guān)鍵的技術(shù)環(huán)節(jié)，指出了它的性能和特點(diǎn)對(duì)于以往的測(cè)量方法是一種技術(shù)上的改進(jìn)。文中采用矩陣光學(xué)的方式詳細(xì)推導(dǎo)了系統(tǒng)的基本測(cè)量原理以及信號(hào)處理方法，并對(duì)系統(tǒng)中選用的關(guān)鍵元器件，以及器件和信號(hào)處理方法等各個(gè)因素對(duì)系統(tǒng)測(cè)量精度帶來(lái)的影響，進(jìn)行了詳細(xì)的介紹和分析。搭建了實(shí)驗(yàn)平臺(tái)并對(duì)進(jìn)行了實(shí)驗(yàn)驗(yàn)證，實(shí)驗(yàn)結(jié)果證明了該方法相對(duì)以往測(cè)量系統(tǒng)在測(cè)量精度有了一定的提高，且測(cè)量應(yīng)力雙折射結(jié)果的離散性在0.4nm/cm，該方法測(cè)量過程中需要在180°范圍內(nèi)多次旋轉(zhuǎn)待測(cè)玻璃和檢偏器，以得到足夠多的測(cè)量數(shù)據(jù)，來(lái)保證擬合結(jié)果的準(zhǔn)確性，整個(gè)過程復(fù)雜繁瑣，測(cè)量時(shí)間較長(zhǎng)，完成一次測(cè)量操作需要2個(gè)小時(shí)左右的時(shí)間，導(dǎo)致系統(tǒng)實(shí)用價(jià)值不高。 根據(jù)改變旋光器驅(qū)動(dòng)電壓可以控制偏振光旋轉(zhuǎn)角度，達(dá)到改變偏振光旋轉(zhuǎn)角度的目的，可以避免旋轉(zhuǎn)檢偏器；且待測(cè)玻璃的旋轉(zhuǎn)角度和旋光器旋光角度具有一定的關(guān)系，增加了解算被測(cè)應(yīng)力雙折射和方向的信息，利用這些角度關(guān)系能夠進(jìn)行內(nèi)應(yīng)力信息的直接解算，就可以避免多次旋轉(zhuǎn)待測(cè)玻璃和檢偏器。本文根據(jù)以上思路提出了磁光調(diào)制加旋光器的方法來(lái)測(cè)量玻璃內(nèi)應(yīng)力，對(duì)測(cè)量原理進(jìn)行了詳細(xì)的推導(dǎo)。測(cè)量過程中首先進(jìn)行了旋光器的標(biāo)定實(shí)驗(yàn)，得出了驅(qū)動(dòng)電壓和旋光角度的線性關(guān)系，根據(jù)該關(guān)系進(jìn)而完成了磁光調(diào)制加旋光器法測(cè)量玻璃內(nèi)應(yīng)力的實(shí)驗(yàn)，發(fā)現(xiàn)了實(shí)驗(yàn)過程中存在的問題，電壓較大時(shí)會(huì)使旋光器驅(qū)動(dòng)線圈發(fā)熱，阻值變化，影響旋光角度。另外，在實(shí)驗(yàn)中發(fā)現(xiàn)，所加電壓的精度的太低，不能精確控制旋光角度，存在一定誤差，導(dǎo)致系統(tǒng)測(cè)量結(jié)果的離散性為0.5nm/cm，且測(cè)量時(shí)旋轉(zhuǎn)了一次待測(cè)玻璃，雖然相對(duì)于磁光調(diào)制法將測(cè)量時(shí)間縮短為約5分鐘，但仍然無(wú)法實(shí)現(xiàn)完全自動(dòng)化測(cè)量。 本文參考美國(guó)Hinds專利技術(shù)—雙光彈調(diào)制測(cè)量方法，并借鑒光機(jī)所在雙磁光調(diào)制實(shí)現(xiàn)空間方位角度快速測(cè)量方面的研究成果，提出了采用雙磁光調(diào)制的方法來(lái)測(cè)量玻璃內(nèi)應(yīng)力。對(duì)測(cè)量原理進(jìn)行了介紹，增加了對(duì)光源進(jìn)行強(qiáng)度調(diào)制的方法提高系統(tǒng)的測(cè)量精度。進(jìn)行實(shí)驗(yàn)發(fā)現(xiàn)，該系統(tǒng)能夠?qū)崿F(xiàn)自動(dòng)化測(cè)量，大大縮短測(cè)量時(shí)間，15秒內(nèi)即可完成一次測(cè)量過程，且避免了使用平移旋轉(zhuǎn)載物臺(tái)和細(xì)分多齒分度臺(tái)，，能夠縮小測(cè)量設(shè)備的體積，但所需的用來(lái)解算內(nèi)應(yīng)力信息的基頻信號(hào)幅值較小，導(dǎo)致探測(cè)信號(hào)中直流分量與基頻分量的幅值相差極大，給信號(hào)檢測(cè)和處理帶來(lái)較大的困難，導(dǎo)致最終測(cè)量結(jié)果的離散性較差。對(duì)應(yīng)力雙折射測(cè)量結(jié)果的離散性為3.1nm/cm，遠(yuǎn)遠(yuǎn)不能到達(dá)要求。 根據(jù)采用光彈調(diào)制器時(shí)交流信號(hào)幅值較大的特點(diǎn)，提出了將雙磁光調(diào)制測(cè)量系統(tǒng)改成磁光調(diào)制加光彈調(diào)制的方法，來(lái)提高基頻信號(hào)的幅值大小，達(dá)到提高系統(tǒng)的測(cè)量性能的目的，本文對(duì)磁光調(diào)制加光彈調(diào)制的方法測(cè)量玻璃內(nèi)應(yīng)力的原理進(jìn)行了理論推導(dǎo)，并將探測(cè)基頻信號(hào)的歸一化幅值和雙磁光調(diào)制的幅值進(jìn)行了仿真比較，仿真結(jié)果表明，在相同的玻璃內(nèi)應(yīng)力測(cè)量信息條件下，采用磁光調(diào)制加光彈調(diào)制的方法，基頻信號(hào)的歸一化幅值遠(yuǎn)遠(yuǎn)大于雙磁光調(diào)制時(shí)的幅值。最后通過進(jìn)行驗(yàn)證實(shí)驗(yàn)，證實(shí)了理論分析的正確性，系統(tǒng)的測(cè)量精度與穩(wěn)定性較高，對(duì)應(yīng)力雙折射的測(cè)量結(jié)果離散性為0.3nm/cm，另外系統(tǒng)的適應(yīng)性與實(shí)用性大大增強(qiáng)，基本指標(biāo)可以滿足高精度玻璃應(yīng)力雙折射測(cè)量的需求。 通過大量的系統(tǒng)調(diào)試與實(shí)驗(yàn)，發(fā)現(xiàn)了測(cè)量系統(tǒng)中存在的一些問題，為后期的系統(tǒng)改進(jìn)提供了一定的參考依據(jù)，并對(duì)系統(tǒng)測(cè)量性能進(jìn)一步的提升奠定了基礎(chǔ)；另外，針對(duì)實(shí)驗(yàn)中的不足，最后一章提出了系統(tǒng)改進(jìn)方案。
[Abstract]:This paper mainly discusses the theoretical analysis and engineering realization of the high accuracy detection system of glass internal stress by magneto-optical modulation.
This paper first briefly describes the causes of the formation of glass internal stress and its influence in existence, introduces the use of stress detection, and then introduces the status of the development of stress detection technology at home and abroad, and points out the gap between China's stress detection technology and foreign countries. High precision, auto dynamic measurement is the high end measurement field of glass internal stress at present. With the development of the current internal stress detection technology in China, the need for high precision measurement of glass internal stress can not be met. Foreign equipment is used in the field of high precision internal stress measurement in China, and the equipment is extremely expensive. This is a new type of high precision glass internal stress with domestic independent intellectual property right. There is an urgent need for the detection technology.
The magneto optic modulation method is a new method for high precision inspection of internal stress of glass. The paper introduces the basic principle, structure composition and key technical link of the measurement of glass internal stress by magnetic and optical modulation technology, and points out that its performance and characteristics are a kind of technical improvement for the previous measurement methods. The basic measurement principle of the system and the method of signal processing are derived in detail, and the influence of the key components in the system, as well as the influence of the components and signal processing methods on the measurement precision of the system, is introduced and analyzed in detail. The experimental platform is set up and the experimental verification is carried out. The experimental results prove that This method has a certain improvement in measurement accuracy compared with the previous measurement system, and the discreteness of the results of measuring stress birefringence is in 0.4nm/cm. In the process of measurement, the glass and detector need to be rotated many times in the range of 180 degrees to get enough measured data to ensure the accuracy of the fitting results, and the whole process is complex and complex. It takes 2 hours to complete a measurement operation, resulting in a low practical value of the system.
The rotation angle of polarized light can be changed by changing the driving voltage of the polarizer to control the rotation angle of polarized light and to change the rotation angle of polarized light. The rotation angle of the glass can be avoided, and the rotation angle of the measured glass has a certain relationship with the optical rotation angle of the optical rotator, and the information of the double refraction and direction of the measured stress is increased, and the relation of these angles can be used. In this paper, a method of magneto optic modulation and optical rotator is proposed to measure the internal stress of glass, and the measuring principle is derived in detail. In the process of measurement, the calibration experiment of the optical rotator is first carried out, and the driving voltage is obtained. According to the linear relationship with the angle of optical rotation, the experiment of measuring the internal stress of glass with magneto optic modulation and optical rotator is completed according to the relationship, and the problems in the experiment are found. When the voltage is large, the driving coil of the optical rotator will be heated, the resistance change and the angle of the optical rotation are affected. In addition, it is found in the experiment that the precision of the added voltage is too low, The angle of the optical rotation can not be controlled accurately and there is a certain error. The dispersion of the system measurement results is 0.5nm/cm, and the measured glass is rotated at the time of measurement. Although the measurement time is shortened to about 5 minutes relative to the magneto-optical modulation method, it is still unable to realize complete automatic measurement.
In this paper, we refer to the United States Hinds patent technology double photoelastic modulation measurement method, and draw on the research results of the rapid measurement of the spatial azimuth by the dual magnetic light modulation of the optical machine. The dual magnetic light modulation method is proposed to measure the internal stress of the glass. The measurement principle is introduced and the intensity modulation of the light source is added. The method improves the measurement precision of the system. The experiment shows that the system can realize automatic measurement, greatly shorten the measurement time, complete a measurement process within 15 seconds, and avoid the use of the translation and rotating carrier platform and the subdivision multi tooth indexing table, and can reduce the volume of the measuring equipment, but the basic frequency required to solve the internal stress information is needed. The amplitude of the signal is small, which leads to the great difference between the amplitude of the DC component and the basic frequency component in the detection signal, which brings great difficulty to the detection and processing of the signal, which leads to the poor discreteness of the final measurement results. The discreteness of the results of the corresponding force birefringence measurement is 3.1nm/cm, far from reaching the requirement.
In order to improve the amplitude of the fundamental frequency signal and improve the measurement performance of the system, a method of changing the dual magnetic light modulation measurement system into magneto optic modulation and photoelastic modulation is proposed to improve the measurement performance of the system. The theoretical derivation is carried out, and the normalized amplitude of the fundamental frequency signal and the amplitude of the dual magnetic modulation are simulated and compared. The simulation results show that the normalized amplitude of the fundamental frequency signal is far greater than the amplitude of the dual magnetic modulation under the same glass internal stress measurement information. Finally, the correctness of the theoretical analysis is confirmed by the verification experiment. The measurement accuracy and stability of the system are high. The result of the measurement result is 0.3nm/cm, and the adaptability and practicability of the system are greatly enhanced. The basic index can meet the requirement of the high precision glass stress birefringence measurement.
Through a large number of system debugging and experiments, some problems in the measurement system are found, which provide some reference for the later system improvement, and lay the foundation for the further improvement of the system measurement performance. In addition, the system improvement scheme is proposed in the last chapter in view of the shortage in the experiment.

【學(xué)位授予單位】：中國(guó)科學(xué)院研究生院（西安光學(xué)精密機(jī)械研究所）
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2014
【分類號(hào)】：TQ171.114

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