本文選題：微納結(jié)構(gòu)　切入點(diǎn)：金剛石切削　出處：《浙江大學(xué)》2016年博士論文

【摘要】：隨著科技產(chǎn)品向高性能化、高精度化、高集成化方向發(fā)展,微制造結(jié)構(gòu)表面在航空航天、電子制造、光機(jī)電、生物醫(yī)療等高端產(chǎn)業(yè)得到了越來(lái)越廣泛的應(yīng)用。隨著制造技術(shù)的不斷突破和過(guò)程不斷復(fù)雜化,如何保證制造精度給現(xiàn)代檢測(cè)提出了新的挑戰(zhàn),而高精度測(cè)量已成為保障微納加工質(zhì)量的唯一有效的技術(shù)手段�，F(xiàn)代微納制造尤其是超精密金剛石切削加工技術(shù)不斷呈現(xiàn)新的特征,加工出的微納結(jié)構(gòu)形貌從原來(lái)簡(jiǎn)單的一維發(fā)展為三維結(jié)構(gòu),具有橫向跨尺度、縱向復(fù)雜化的特征,然而:1)現(xiàn)有高精度測(cè)量系統(tǒng)對(duì)不同特征復(fù)雜微結(jié)構(gòu)的測(cè)量顧此失彼,無(wú)法同時(shí)實(shí)現(xiàn)大面積、大行程、高精度快速測(cè)量,更重要的是對(duì)一些復(fù)雜難測(cè)微納結(jié)構(gòu)存在測(cè)不到、測(cè)不準(zhǔn)的技術(shù)難題;2)現(xiàn)有多數(shù)高精度測(cè)量系統(tǒng)冗余復(fù)雜,環(huán)境要求苛刻,無(wú)法推廣到空間有限、環(huán)境多樣化的微納加工過(guò)程中,因而只能用于離線測(cè)量,即需要將工件從加工現(xiàn)場(chǎng)拆卸,由于工件二次裝夾誤差的存在,中斷了后續(xù)的加工工藝;3)現(xiàn)有的在位測(cè)量手段大多局限于局部線輪廓的測(cè)量,對(duì)三維復(fù)雜微納結(jié)構(gòu)的整體面型掃描仍然存在瓶頸;4)由于微納加工現(xiàn)場(chǎng)諸多不確定性因素,真實(shí)可靠地綜合評(píng)估面型測(cè)量結(jié)果、實(shí)現(xiàn)測(cè)量加工的有機(jī)融合和微納加工面型的質(zhì)量控制有待進(jìn)一步研究。本論文針對(duì)微納加工過(guò)程制造精度和質(zhì)量控制的要求,從難測(cè)結(jié)構(gòu)的大范圍快速測(cè)量技術(shù)、測(cè)量系統(tǒng)集成、復(fù)雜三維微納結(jié)構(gòu)的空間在位螺旋測(cè)量方法、面向超精密單點(diǎn)金剛石切削加工過(guò)程的應(yīng)用等多個(gè)層面提出一系列創(chuàng)新性方法和解決方案,形了系統(tǒng)性的關(guān)鍵技術(shù),并開發(fā)了具有自主知識(shí)產(chǎn)權(quán)的用于超精密金剛石機(jī)床的在位測(cè)量?jī)x器裝備,成功實(shí)現(xiàn)了復(fù)雜微納結(jié)構(gòu)的三維形貌高精度在位測(cè)量和加工誤差評(píng)估反饋,有效地保障了金剛石切削微納結(jié)構(gòu)的加工精度。本論文總共分為以下六章:第一章概述了微納制造技術(shù)的研究背景,指出微納器件結(jié)構(gòu)復(fù)雜化的發(fā)展趨勢(shì)以及快速高精度測(cè)量對(duì)微納制造的重要意義。對(duì)目前主流的微納結(jié)構(gòu)測(cè)量?jī)x器和優(yōu)缺點(diǎn)作出了簡(jiǎn)要概述,明確了掃描探針顯微鏡在微納檢測(cè)中的有效性。描述了目前國(guó)內(nèi)外微納結(jié)構(gòu)測(cè)量領(lǐng)域的研究現(xiàn)狀,指出微納結(jié)構(gòu)測(cè)量所面臨的測(cè)不準(zhǔn)測(cè)不快等技術(shù)難題,以及在位測(cè)量的重要性,并概述了本論文的主要研究?jī)?nèi)容和意義。第二章針對(duì)微納加工結(jié)構(gòu)大面積高精度掃描測(cè)試及掃描探頭在機(jī)床中微納米定位的需求,設(shè)計(jì)了一種壓電陶瓷驅(qū)動(dòng)的新型兩自由度具有多級(jí)放大的微納米定位平臺(tái),避免了精密電機(jī)運(yùn)動(dòng)平臺(tái)造價(jià)高、回程誤差、動(dòng)態(tài)響應(yīng)低、裝配誤差等一系列問(wèn)題。來(lái)源于"微夾持器"的概念,所設(shè)計(jì)平臺(tái)通過(guò)Z形導(dǎo)向放大機(jī)構(gòu)的彎曲放大最終實(shí)現(xiàn)了兩個(gè)自由度的運(yùn)動(dòng)傳遞以及解耦導(dǎo)向,使樣品的大面積掃描測(cè)試和掃描探頭在機(jī)床中的微納米定位成為可能。第三章開發(fā)了基于掃描隧道效應(yīng)的測(cè)量探頭,提出了基于反對(duì)稱變換的快速探頭伺服測(cè)量技術(shù),有效解決了深溝槽等難測(cè)結(jié)構(gòu)測(cè)不快、測(cè)不準(zhǔn)的技術(shù)難題。將其嵌入到金剛石飛刀切削的微加工過(guò)程中,實(shí)現(xiàn)了加工后工件的快速在位測(cè)量,通過(guò)測(cè)量結(jié)果反饋加工,菱形陣列的形貌得到了保證。實(shí)驗(yàn)結(jié)果表明,所研發(fā)的快速伺服測(cè)量探頭及在位測(cè)量技術(shù)在微切削結(jié)構(gòu)形貌控制方面起到重要的作用。第四章提出了面向超精密單點(diǎn)金剛石切削的在位測(cè)量技術(shù)和高長(zhǎng)徑比探針的自動(dòng)對(duì)中策略;提出了空間在位螺旋測(cè)量方法,可以實(shí)現(xiàn)探針對(duì)三維微納結(jié)構(gòu)曲面基底的法向矢量跟蹤,通過(guò)面型重構(gòu)達(dá)到了傳統(tǒng)離線儀器難以獲取的優(yōu)異面型輪廓,并能準(zhǔn)確地表征三維微納結(jié)構(gòu)的加工誤差。第五章針對(duì)微納結(jié)構(gòu)形貌誤差表征高精度、高可靠性的檢測(cè)需求,同時(shí)考慮了加工和測(cè)量誤差對(duì)形貌誤差評(píng)估結(jié)果的重要影響,建立了基于門特卡羅算法的加工測(cè)量一體化形貌誤差在位評(píng)估模型,并得到了實(shí)驗(yàn)驗(yàn)證。最后,所提出基于快速探頭伺服測(cè)量技術(shù)的在位螺旋測(cè)量系統(tǒng)與快速刀具伺服加工系統(tǒng)融合形成協(xié)同工作方式,實(shí)現(xiàn)了加工-測(cè)量反饋-補(bǔ)償加工的制造模式。第六章總結(jié)了本論文的主要工作、創(chuàng)新點(diǎn)和關(guān)鍵技術(shù),并對(duì)面向微制造過(guò)程的在位測(cè)量的研究進(jìn)行了展望。
[Abstract]:With the development of science and technology products to high performance, high precision, high integrated direction, micro structure on the surface of aerospace manufacturing, electronics manufacturing, electrical, medical and other high-end industries have been more and more widely used. With the continuous breakthrough in manufacturing technology and process has become more complicated, how to ensure the accuracy of the proposed new manufacturing the challenge to modern detection, and high precision measurement has become a guarantee of micro nano machining quality the only effective method. The modern micro nano manufacturing especially for ultra precision diamond cutting technology constantly showing new features, processing of the micro nano structure morphology from the original simple one-dimensional development into three-dimensional structure, with a cross scale. The characteristics, longitudinal complicated however: 1) the existing high precision measurement system of micro structure measurement on different characteristics of care for this and lose that complex, large areas can not be achieved at the same time, the large range, high precision and fast measurement The amount, it is more important for some complex and unpredictable micro nano structure exists is not measured, technical problems of uncertainty; 2) most of the existing redundancy and complex high precision measurement system, demanding environment, can not be extended to the limited space, environmentdiversification micromachining process, which can only be used for off-line measurement, which needs to be remove the workpiece from the processing site, due to the two clamping errors, interrupted the follow-up processing; 3) measurement in the existing measuring methods are mostly limited to the local profile, micro nano surface scanning structure of the whole 3D complex there are still bottlenecks; 4) because of the uncertainty factors of micro nano processing the scene, true and reliable evaluation of surface measurement results, further study the quality measurement and processing to achieve organic integration of micro nano machining surface. This thesis focuses on the control of micro nano machining precision and quality of products Control requirements, fast measurement technique from a wide range of unpredictable structure, integrated measurement system, the complex three-dimensional micro structure in the spiral space measurement method, application of ultra precision single point diamond cutting process and many other aspects of a series of innovative methods and solutions, the key technology of the system form, and developed with independent intellectual property for ultra precision diamond machine measurement instruments and equipment, the successful implementation of the complex micro structure of 3D high precision measurement and error evaluation feedback, effectively protect the precision diamond cutting of micro nano structure. This thesis is divided into following six chapters: the first chapter outlines the research background of micro nano manufacturing technology, pointed out the development trend of micro nano structure complicated and rapid high precision measurement of micro nano manufacturing. The significance of the main The flow of the micro nano structure measurement instrument and made a brief overview of advantages and disadvantages, the scanning probe microscope in micro nano validity test. Describe the domestic and foreign research status of micro nano measuring field structure at present, points out that the uncertainty measurement of micro nano structure facing the measuring speed of technical problems, and the importance of the reign of the measurement, and summarizes the main research content and significance. The second chapter in nano micro positioning in machine tool in micro nano processing structure with large area and high precision scanning test and scanning probe needs, design a new type of piezoelectric ceramic drive has two degrees of freedom micro nano positioning platform multistage amplifier, precision the motor platform cost is high, the return error is avoided, the dynamic response is low, a series of problems. The concept of assembly error from the "micro gripper", the design of bending amplification platform through Z shaped guide amplification mechanism Finally the two degrees of freedom motion transmission and decoupling guidance, so that the sample of large area scanning test and scanning probe micro nano positioning in the machine tool can be developed. The third chapter probe scanning tunneling effect based on the proposed fast servo probe measurement technique based on skew symmetric transformation, effectively solve the deep groove slot are structure measured fast, technical problems of uncertainty. Embedded into the micro machining process of diamond cutting knife in the processed fast measurement, by measuring the results of feedback processing, morphology of diamond array has been ensured. The experimental results show that the fast servo measurement probe and research in measurement technology plays an important role in micro cutting structure and morphology control. The fourth chapter is put forward for ultra precision single point diamond cutting measurement technology and high aspect ratio Probe the automatic adjustment of the strategy; puts forward the space in the spiral measurement method, the probe can be realized on the base of three-dimensional micro nano structure surface normal vector tracking, facial reconstruction through facial contour reached excellent traditional off-line instruments are difficult to obtain, and can accurately characterize the three-dimensional micro nano machining error structure. The fifth chapter in the micro nano structure characterization of high precision detection error, demand high reliability, considering the influence of machining error and measurement error on the evaluation result of profile error, established in the incorporation of processing error evaluation model based on Monte Carlo algorithm gate, and verified by experiments. Finally, the proposed measurement system in spiral fast servo measurement probe with the fast tool servo machining system is formed by the fusion of collaborative work based on the mode of manufacturing and processing - measurement feedback compensation processing In the sixth chapter, the main work, innovation and key technology of this paper are summarized, and the research on the in-situ measurement of the micro manufacturing process is prospected.

【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：TQ163

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