本文選題：深反應(yīng)離子刻蝕 + 各向異性濕法腐蝕　； 參考：《大連理工大學(xué)》2012年碩士論文

【摘要】：微針是一種對全世界醫(yī)療領(lǐng)域的發(fā)展起著舉足輕重作用的微型產(chǎn)品,其主要用于給病人注射藥物和為生物分析而從病人身上抽取血液兩種應(yīng)用目的。本課題通過對仿生概念的了解,進(jìn)而以蚊子口器的結(jié)構(gòu)和吸血動作為切入點,利用MEMS工藝制作出了孔徑與蚊子口器內(nèi)徑相當(dāng)?shù)漠惼矫婵招奈⑨橁嚵小?采用干法刻蝕和濕法腐蝕相結(jié)合的辦法制作出一種異平面空心微針陣列。具體來說,干法刻蝕用于刻穿針孔,但由于單面刻蝕時深寬比難以達(dá)到35：1,同時會使孔側(cè)壁過于粗糙不利于進(jìn)樣,故采用兩步和雙向深反應(yīng)離子刻蝕工藝確保微針孔的完全刻穿和其側(cè)壁的光滑性；采用各向異性濕法腐蝕工藝,腐蝕單晶硅片得到側(cè)壁為{411}晶面的硅微針。最終得到高度為100μm-120μm、針孔直徑為10μm-25μm、針孔中心偏離針尖5μm-10μm的空心硅微針尖。 對豬皮樣品進(jìn)行了多次進(jìn)樣測試,證明這種空心微針陣列微針具有一定的強度,可以重復(fù)使用而不折斷。我們采用微機(jī)電系統(tǒng)工藝制作的微針在未來的無痛透皮給藥系統(tǒng)中具有潛在的應(yīng)用前景。
[Abstract]:Microneedle is a kind of microproduct which plays an important role in the development of medical field all over the world. It is mainly used for injecting drugs to patients and extracting blood from patients for biological analysis. Through understanding the concept of bionics and taking the structure of mosquito mouthpiece and the blood sucking action as the starting point, the different plane hollow microneedle array with the aperture equivalent to the inner diameter of the mosquito mouthpiece was fabricated by using the MEMS process. A heterogeneous hollow microneedle array was fabricated by dry etching and wet etching. In particular, dry etching is used to cut through a pinhole, but because the aspect ratio is difficult to reach 35: 1 when etching on one side, the sidewall of the hole is too rough to be suitable for sample injection. Therefore, two step and two way deep reactive ion etching process is used to ensure the complete etching of the micropinhole and the smoothness of the side wall of the microneedle, and the anisotropic wet etching process is used to obtain the silicon microneedle with {411} side wall by etching the single crystal silicon wafer. Finally, a hollow silicon microtip with a height of 100 渭 m ~ 120 渭 m, a pinhole diameter of 10 渭 m ~ 25 渭 m and a pinhole center deviation of 5 渭 m ~ 10 渭 m was obtained. The pig skin samples were tested for many times. It was proved that the hollow microneedle array microneedles had a certain strength and could be reused without breaking. The micro-needle made by micro-electromechanical system has potential application prospect in the future painless transdermal drug delivery system.
【學(xué)位授予單位】：大連理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2012
【分類號】：TH789

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