【摘要】：微納操作機(jī)器人是一種可以對(duì)微納米級(jí)目標(biāo)物進(jìn)行夾取及搬運(yùn)操作的機(jī)構(gòu),是當(dāng)前微納米研究的主要工具之一。隨著微納米領(lǐng)域研究的不斷深入,對(duì)微納操作機(jī)器人的控制性能及定位精度的要求也越來(lái)越高。當(dāng)前常見(jiàn)的微納米操作機(jī)器人多采用黏滑機(jī)理進(jìn)行驅(qū)動(dòng),該種驅(qū)動(dòng)方式可以使機(jī)構(gòu)在實(shí)現(xiàn)毫米級(jí)大行程的前提下保持納米級(jí)步距的高精度,但黏滑驅(qū)動(dòng)是一種基于摩擦力差異性的慣性驅(qū)動(dòng)方式,摩擦力的嚴(yán)重非線性特征以及黏滑驅(qū)動(dòng)的固有缺點(diǎn)會(huì)導(dǎo)致機(jī)器人在工作時(shí)具有較明顯的振動(dòng)和回移現(xiàn)象。因此,對(duì)黏滑驅(qū)動(dòng)的機(jī)理進(jìn)行深入研究,利用合適的摩擦力模型對(duì)黏滑驅(qū)動(dòng)過(guò)程進(jìn)行合理描述,進(jìn)而抑制甚至消除黏滑驅(qū)動(dòng)機(jī)構(gòu)所特有的振動(dòng)及回移現(xiàn)象,提升微納操作機(jī)器人的控制及定位性能,成為該領(lǐng)域當(dāng)前的一個(gè)研究熱點(diǎn)。本文在對(duì)國(guó)內(nèi)外黏滑驅(qū)動(dòng)機(jī)構(gòu)的研究進(jìn)行整理及總結(jié)的基礎(chǔ)上,對(duì)黏滑驅(qū)動(dòng)機(jī)理、接觸面間彈塑性變形、摩擦力產(chǎn)生過(guò)程以及構(gòu)建新型摩擦力模型等方面進(jìn)行研究,主要內(nèi)容如下:(1)對(duì)預(yù)滑動(dòng)階段接觸面間彈塑性變形狀態(tài)及該階段摩擦力特性進(jìn)行實(shí)驗(yàn)研究,發(fā)現(xiàn)接觸面之間存在最大彈性變形區(qū)間,且在外力作用下,接觸面間所有小于最大彈性變形量的相對(duì)位移在外力消失后均能夠完全恢復(fù),而大于最大彈性變形量的相對(duì)位移僅能恢復(fù)與最大彈性變形量相等的部分。通過(guò)測(cè)量并分析接觸面間所受切向外力與相對(duì)位移的大小,發(fā)現(xiàn)在最大彈性變形區(qū)間內(nèi),摩擦力與相對(duì)位移大小近似呈線性關(guān)系。通過(guò)對(duì)不同接觸面粗糙度及正壓力下的接觸面彈性變形進(jìn)行實(shí)驗(yàn)研究,得出在相同粗糙度下接觸面最大彈性變形量與接觸面正壓力呈線性關(guān)系,且接觸面越光滑,線性特征越明顯,接觸面越粗糙,非線性特征越明顯。(2)在對(duì)比研究現(xiàn)有摩擦力模型在描述預(yù)滑動(dòng)階段摩擦力特性上的異同及優(yōu)缺點(diǎn)的基礎(chǔ)上,對(duì)現(xiàn)有微凸體模型進(jìn)行分類整理,并構(gòu)建一種新型的微凸體模型,該微凸體模型可以合理描述接觸面切向及法向變形狀態(tài)以及二者之間的關(guān)系。通過(guò)將新型微凸體模型與Maxwell-Slip模型結(jié)合,構(gòu)建一種基于微凸體的混合摩擦力模型,該模型既改善了單狀態(tài)摩擦力模型在描述接觸面彈性變形及非局部記憶磁滯方面的缺陷,又彌補(bǔ)了傳統(tǒng)多狀態(tài)模型在描述接觸面法向磁滯力方面的不足。相對(duì)于GMS等傳統(tǒng)摩擦力模型,新摩擦力模型結(jié)構(gòu)較為簡(jiǎn)單,具有較高的運(yùn)算效率及穩(wěn)定性。(3)利用基于微凸體的混合摩擦力模型對(duì)黏滑驅(qū)動(dòng)機(jī)構(gòu)的運(yùn)動(dòng)過(guò)程進(jìn)行描述,對(duì)鋸齒波驅(qū)動(dòng)下的滑動(dòng)體回移階段運(yùn)動(dòng)進(jìn)行分析,得出滑動(dòng)體在不同條件下的運(yùn)動(dòng)特征,并從摩擦力角度分析了滑動(dòng)體發(fā)生振動(dòng)的原因以及滑動(dòng)體不產(chǎn)生回移的條件。隨后,設(shè)計(jì)制作了黏滑驅(qū)動(dòng)機(jī)構(gòu)實(shí)驗(yàn)樣機(jī),并建立其機(jī)構(gòu)動(dòng)力學(xué)模型,搭建了基于混合摩擦力模型的黏滑驅(qū)動(dòng)機(jī)構(gòu)控制系統(tǒng)。(4)設(shè)計(jì)搭建了黏滑驅(qū)動(dòng)機(jī)構(gòu)實(shí)驗(yàn)系統(tǒng),針對(duì)由柔順機(jī)構(gòu)組成的基座在鋸齒波電壓驅(qū)動(dòng)下具有明顯殘余振動(dòng)的問(wèn)題,通過(guò)dSPACE在壓電陶瓷控制信號(hào)中串聯(lián)改進(jìn)的點(diǎn)阻濾波器,抑制了基座的殘余振動(dòng),減少了基座振動(dòng)對(duì)于黏滑驅(qū)動(dòng)機(jī)構(gòu)運(yùn)動(dòng)的不利影響。針對(duì)滑柱在一個(gè)驅(qū)動(dòng)周期內(nèi)的殘余振動(dòng)對(duì)下一個(gè)驅(qū)動(dòng)周期造成的影響,結(jié)合本實(shí)驗(yàn)機(jī)構(gòu)自身特點(diǎn),優(yōu)化了機(jī)構(gòu)的驅(qū)動(dòng)信號(hào)波形,提高了機(jī)構(gòu)的驅(qū)動(dòng)穩(wěn)定性。針對(duì)黏滑驅(qū)動(dòng)機(jī)構(gòu)輸出端在驅(qū)動(dòng)周期末尾的殘余振動(dòng)問(wèn)題,依據(jù)混合摩擦力模型對(duì)于機(jī)構(gòu)運(yùn)動(dòng)的描述,分析了殘余振動(dòng)產(chǎn)生的原因,并依據(jù)模型的計(jì)算對(duì)機(jī)構(gòu)進(jìn)行前饋輸入整形控制,抑制了機(jī)構(gòu)輸出端的殘余振動(dòng),減少了回移量,提高了機(jī)構(gòu)的驅(qū)動(dòng)效率及定位精度。最后,在總結(jié)本文工作的基礎(chǔ)上,對(duì)今后黏滑驅(qū)動(dòng)機(jī)構(gòu)的設(shè)計(jì)及摩擦力模型的研究提出相應(yīng)建議。
[Abstract]:Micro-nano-manipulator is a mechanism capable of clamping and carrying micro-nano-scale targets, which is one of the main tools in the research of micro-nano-scale. With the development of micro-nano-field research, the requirement of control performance and positioning accuracy of micro-nano-manipulator is higher and higher. At present, the micro-nano-operation robot is driven by a viscous sliding mechanism, and the driving method can keep the mechanism high-precision of the nanometer step distance under the premise of realizing the large stroke of the millimeter scale, but the viscoelastic driving is an inertia driving mode based on the difference of friction, The serious non-linear characteristics of friction and the inherent disadvantages of viscous-slip drive can cause the robot to have obvious vibration and return movement during operation. Therefore, the mechanism of the viscoelastic driving is researched deeply, and the viscous sliding driving process is reasonably described by using a suitable friction model, so that the vibration and the return phenomenon peculiar to the viscoelastic driving mechanism can be suppressed and even eliminated, the control and positioning performance of the micro-nano operation robot is improved, Become a research hotspot in this field. On the basis of finishing and summarizing the research of the viscoelastic driving mechanism at home and abroad, the paper studies the mechanism of slip driving, the elastic-plastic deformation of the contact surface, the process of friction and the construction of a new friction model, and the main contents are as follows: (1) carrying out experimental research on the elastic-plastic deformation state between the contact surfaces of the pre-sliding phase and the friction property of the stage, the relative displacement between the contact surfaces which is less than the maximum elastic deformation amount can be fully recovered after the external force disappears, and the relative displacement which is larger than the maximum elastic deformation amount can only recover the part equivalent to the maximum elastic deformation amount. By measuring and analyzing the magnitude of the tangential external force and relative displacement between the contact surfaces, it is found that the friction force is linear with the relative displacement in the maximum elastic deformation interval. By experimental research on the elastic deformation of the contact surface under different contact surface roughness and positive pressure, it is concluded that the maximum elastic deformation amount of the contact surface is linear with the positive pressure of the contact surface under the same roughness, and the smoother the contact surface, the more obvious the linear characteristic, the more rough the contact surface, the more significant the non-linear features. (2) on the basis of comparing the similarities and differences of the friction characteristics of the pre-sliding phase and the advantages and disadvantages of the existing friction model, the existing micro-convex body model is classified and arranged, and a novel micro-convex body model is constructed, The micro-convex model can describe the relationship between the tangential direction and the deformation state of the contact surface and the relationship between them. A hybrid friction model based on a micro-convex body is constructed by combining the novel micro-convex body model and the Gauss-slip model, and the model not only improves the defect of the single-state friction model in describing the elastic deformation of the contact surface and the non-local memory hysteresis, In addition, the deficiency of the traditional multi-state model in describing the contact surface method to the hysteresis force is made up. Compared with GMS and other conventional friction models, the new friction model has simpler structure and higher operational efficiency and stability. (3) using the mixed friction model based on the micro convex body to describe the motion process of the viscoelastic driving mechanism, analyzing the movement of the sliding body under the driving of the sawtooth wave to obtain the motion characteristics of the sliding body under different conditions, The reason of the vibration of the sliding body and the condition that the sliding body does not move back are analyzed from the angle of friction. Then, the experimental prototype of the viscoelastic driving mechanism was designed, and the mechanism dynamics model was established, and a viscous sliding drive mechanism control system based on the hybrid friction model was constructed. (4) designing the experimental system of the viscoelastic driving mechanism, aiming at the problem that the base composed of the compliant mechanism has obvious residual vibration under the driving of the sawtooth wave voltage, the point resistance filter which is improved in series in the piezoelectric ceramic control signal by the dSPACE, suppresses the residual vibration of the base, the adverse effect of the vibration of the base on the movement of the viscoelastic driving mechanism is reduced. Aiming at the influence of the residual vibration of the sliding column on the next driving cycle during a driving period, the driving signal waveform of the mechanism is optimized according to the characteristics of the experimental mechanism, and the driving stability of the mechanism is improved. aiming at the residual vibration problem at the end of the driving cycle of the output end of the viscoelastic driving mechanism, the reason of the residual vibration generation is analyzed according to the description of the motion of the mechanism according to the mixed friction model, and the feed forward input shaping control is carried out on the mechanism according to the calculation of the model, the residual vibration at the output end of the mechanism is suppressed, the amount of return movement is reduced, and the driving efficiency and the positioning accuracy of the mechanism are improved. Finally, on the basis of summarizing the work of this paper, the paper puts forward some suggestions on the design and friction model of the sliding drive mechanism in the future.
【學(xué)位授予單位】：華南理工大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：TP242

【參考文獻(xiàn)】

相關(guān)期刊論文 前1條

1 黃平;賴添茂;;基于真實(shí)接觸面積的摩擦模型[J];華南理工大學(xué)學(xué)報(bào)(自然科學(xué)版);2012年10期

相關(guān)博士學(xué)位論文 前1條

1 秦磊;基于雙質(zhì)量摩擦振子的黏滑驅(qū)動(dòng)機(jī)理及實(shí)驗(yàn)研究[D];哈爾濱工業(yè)大學(xué);2007年

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本文編號(hào)：2307835