本文選題：電荷分割型光子計數(shù)成像探測器　切入點：楔條形陽極　出處：《中國科學(xué)院研究生院(長春光學(xué)精密機械與物理研究所)》2016年博士論文

【摘要】：隨著空間技術(shù)的發(fā)展,越來越多的極紫外波段觀測儀器被發(fā)射到宇宙空間,對地球周圍及至廣闊宇宙空間中不同星體產(chǎn)生的微弱極紫外輻射進行了高精度探測,其中光子計數(shù)成像探測器是實現(xiàn)這種探測的優(yōu)先選擇器件。論文重點對電荷分割型陽極光子計數(shù)成像探測器中的楔條形陽極探測器和Vernier陽極探測器進行研究。具體研究內(nèi)容如下:1、根據(jù)微通道板二次電子發(fā)射理論,利用Comsol軟件仿真出三維“V”型級聯(lián)微通道板的電子倍增過程,研究在不同工作電壓下微通道板的增益特性;重點推導(dǎo)一維Vernier陽極和二維Vernier陽極的質(zhì)心解碼算法,通過仿真針孔陣列模擬成像,驗證Vernier陽極位置解碼的正確性。2、根據(jù)分割噪聲的來源,提出了一種計算分割噪聲的方法,得到由分割噪聲引起的質(zhì)心位置偏差與陽極板參數(shù)之間的關(guān)系,同時得到提高微通道板增益能有效降低分割噪聲對質(zhì)心位置偏差的影響的結(jié)論。討論了電子云團尺寸、極間串?dāng)_、電子噪聲、半導(dǎo)體薄膜對電荷分割型陽極探測器成像性能的影響。3、分析了陽極的極間電容值對電荷分割型陽極探測器成像性能的影響,利用ANSYS軟件建立電荷分割型陽極(楔條形陽極、Vernier陽極)三維模型,通過有限元方法計算出不規(guī)則形狀電極間的電容值;利用激光微加工設(shè)備加工出楔條形陽極和Vernier陽極,實測陽極的極間電容值與仿真值吻合,驗證了陽極有限元模型的正確性;在此基礎(chǔ)上,對電荷分割型陽極的結(jié)構(gòu)參數(shù)進行優(yōu)化,給出電荷分割型陽極版的加工參數(shù)。4、搭建楔條形陽極光子計數(shù)成像探測器和Vernier陽極光子計數(shù)成像探測器實驗裝置,并對楔條形陽極探測器進行暗噪聲、空間分辨率以及不同電荷讀出方式性能測試;評估了分割噪聲與電子噪聲對兩個周期Vernier陽極探測器分辨率的影響,并進行單矩形孔的成像實驗。
[Abstract]:With the development of space technology, more and more ultra-ultraviolet observation instruments have been launched into space, and the weak extreme ultraviolet radiation produced by different stars around the earth and in the vast space has been detected with high precision. Among them, photon counting imaging detector is the first choice device to realize this kind of detection. This paper focuses on the research of wedge strip anode detector and Vernier anode detector in charge split anode photon counting imaging detector. The contents of the body research are as follows: 1. According to the second electron emission theory of microchannel plate, The electron multiplication process of 3D "V" cascade microchannel plate is simulated by using Comsol software, and the gain characteristics of the microchannel plate under different operating voltages are studied, and the centroid decoding algorithms of one-dimensional Vernier anode and two-dimensional Vernier anode are derived. The correctness of Vernier anodic position decoding is verified by simulated pinhole array imaging. According to the source of segmentation noise, a method for calculating segmentation noise is proposed. The relationship between the centroid position deviation caused by segmentation noise and the parameters of the anode plate is obtained. At the same time, it is concluded that increasing the gain of the microchannel plate can effectively reduce the effect of the segmentation noise on the centroid position deviation. The size of the electron cloud is discussed. The effects of interpole crosstalk, electronic noise and semiconductor film on the imaging performance of charge-separated anode detector are analyzed. The effect of the capacitance between electrodes on the imaging performance of charge-separated anode detector is analyzed. The three-dimensional model of charge split anode (wedge strip anode Vernier anode) was established by using ANSYS software. The capacitance between irregular electrodes was calculated by finite element method, and the wedge-shaped anode and Vernier anode were fabricated by laser micromachining equipment. The measured capacitance between the electrodes is in agreement with the simulation value, which verifies the correctness of the finite element model of the anode, on the basis of which, the structural parameters of the charge-separated anode are optimized. The machining parameters. 4 of charge split anode plate are given. The experimental device of wedge anode photon counting imaging detector and Vernier anode photon counting imaging detector is built, and the dark noise of wedge strip anode detector is carried out. The effects of segmentation noise and electronic noise on the resolution of two periodic Vernier anode detectors were evaluated, and the imaging experiments of single rectangular holes were carried out.
【學(xué)位授予單位】：中國科學(xué)院研究生院(長春光學(xué)精密機械與物理研究所)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2016
【分類號】：TN23

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