本文關(guān)鍵詞：CMUT及其陣列工作機(jī)理與應(yīng)用基礎(chǔ)研究　出處：《天津大學(xué)》2016年博士論文　論文類(lèi)型：學(xué)位論文

  更多相關(guān)文章： 電容式微機(jī)械超聲傳感器 特性分析 設(shè)計(jì)準(zhǔn)則 旁瓣抑制 聲場(chǎng)分析 脈沖回波響應(yīng) 超聲成像

【摘要】：超聲成像技術(shù)廣泛應(yīng)用于醫(yī)學(xué)、軍事、工業(yè)、農(nóng)業(yè)等眾多領(lǐng)域,而超聲傳感器是實(shí)現(xiàn)超聲成像的關(guān)鍵部件之一�；贛EMS技術(shù)的電容式微機(jī)械超聲傳感器(Capacitive Micromachined Ultrasonic Transducer,CMUT)具有傳統(tǒng)壓電超聲傳感器所不具備的顯著優(yōu)勢(shì),有望替代傳統(tǒng)壓電超聲傳感器成為市場(chǎng)的主流產(chǎn)品。針對(duì)電容式微機(jī)械超聲傳感器開(kāi)展相關(guān)理論與應(yīng)用基礎(chǔ)研究,具有十分重要的研究?jī)r(jià)值和現(xiàn)實(shí)意義。本文的主要內(nèi)容如下:首先,在加工制造之前對(duì)CMUT進(jìn)行特性分析可以為優(yōu)化設(shè)計(jì)參數(shù)提供依據(jù)。在詳細(xì)闡述CMUT工作原理和相關(guān)理論的基礎(chǔ)上,研究了CMUT的建模理論。建立了CMUT微元的小信號(hào)等效電路模型和有限元模型,利用有限元模型進(jìn)行了靜態(tài)分析、模態(tài)分析和諧響應(yīng)分析。為了能夠快速、有效地對(duì)CMUT微元和CMUT進(jìn)行特性分析,推導(dǎo)并建立了一種狀態(tài)方程-SIMULINK模型,并對(duì)CMUT微元和CMUT進(jìn)行了發(fā)射與接收特性分析,為后續(xù)實(shí)際應(yīng)用和測(cè)試提供了重要的理論依據(jù)和參考。其次,CMUT與CMUT陣列的指向性是其在遠(yuǎn)場(chǎng)的重要特性之一。通過(guò)詳細(xì)分析設(shè)計(jì)參數(shù)對(duì)其指向性的影響,結(jié)合CMUT和CMUT陣列的特點(diǎn),提出了合理選擇CMUT陣列設(shè)計(jì)參數(shù)的準(zhǔn)則。針對(duì)所設(shè)計(jì)的CMUT及其陣列,推導(dǎo)出了三種不同的CMUT指向性函數(shù)和四種不同的CMUT陣列指向性函數(shù),并進(jìn)行了對(duì)比分析。針對(duì)指向性圖中出現(xiàn)的旁瓣現(xiàn)象,研究了多種旁瓣抑制方法,有效地降低了旁瓣輻值。再次,超聲傳感器的聲場(chǎng)分布特性直接影響著其成像質(zhì)量。在論述相關(guān)聲場(chǎng)理論的基礎(chǔ)上,研究了基于瑞利-索末菲積分公式、角譜方法和空間沖激響應(yīng)的聲場(chǎng)分析方法,并針對(duì)CMUT和CMUT陣列的特點(diǎn),研究了相應(yīng)的聲場(chǎng)分析方法。通過(guò)計(jì)算輻射聲場(chǎng),分析了CMUT陣列的聚焦與偏轉(zhuǎn)性能,研究了陣列孔徑尺寸對(duì)聚焦距離的影響,并分析了CMUT陣列設(shè)計(jì)參數(shù)對(duì)其空間脈沖回波響應(yīng)的影響。然后,不同的成像方法具有不同的性能和特點(diǎn),實(shí)際應(yīng)用中需要綜合考慮多種因素選擇合適的方法。在論述相控陣成像、合成孔徑聚焦成像和相控子陣成像三種不同成像方法工作原理的基礎(chǔ)上,通過(guò)計(jì)算相應(yīng)的有效孔徑和合成波束,對(duì)其進(jìn)行了對(duì)比分析,并基于CMUT線陣,驗(yàn)證分析了三種成像方法的成像效果。對(duì)于陣元數(shù)目較多的CMUT面陣,設(shè)計(jì)了幾種特殊的相控子陣成像方案,可以有效地降低成像系統(tǒng)的復(fù)雜性,并提高成像的實(shí)時(shí)性。最后,通過(guò)對(duì)CMUT線陣進(jìn)行全面的測(cè)試與分析,進(jìn)一步驗(yàn)證了所設(shè)計(jì)CMUT及其陣列的性能,為今后設(shè)計(jì)超聲成像系統(tǒng)提供了重要的數(shù)據(jù)參考。
[Abstract]:Ultrasonic imaging technology is widely used in many fields such as medicine, military, industry, agriculture and so on. The ultrasonic sensor is one of the key components of ultrasonic imaging. Capacitive Micro Mechanical Ultrasonic Sensor based on MEMS (. Capacitive Micromachined Ultrasonic Transducer. CMUTs have significant advantages that traditional piezoelectric ultrasonic sensors do not have. It is expected to replace the traditional piezoelectric ultrasonic sensor to become the mainstream product in the market. The basic research on the theory and application of capacitive micro-mechanical ultrasonic sensor is carried out. It has very important research value and practical significance. The main contents of this paper are as follows: first of all. The characteristic analysis of CMUT before machining and manufacturing can provide the basis for optimizing design parameters. On the basis of elaborating the working principle and related theories of CMUT in detail. The modeling theory of CMUT is studied. The small signal equivalent circuit model and finite element model of CMUT microelement are established, and the static analysis is carried out by using the finite element model. Modal analysis and harmonic response analysis. In order to analyze the characteristics of CMUT differentials and CMUT quickly and effectively, a state equation (SIMULINK) model is derived and established. The transmission and reception characteristics of CMUT microelements and CMUT are analyzed, which provides an important theoretical basis and reference for the subsequent practical application and testing. Secondly. The directivity of CMUT and CMUT arrays is one of their important characteristics in the far field. Through the detailed analysis of the influence of design parameters on their directivity, the characteristics of CMUT and CMUT arrays are combined. The criteria for reasonably selecting the design parameters of CMUT arrays are presented. The designed CMUT and its arrays are considered. Three different CMUT directivity functions and four different CMUT array directivity functions are derived and compared. Several sidelobe suppression methods are studied, which can effectively reduce the sidelobe radiations. Thirdly, the acoustic field distribution characteristics of ultrasonic sensors have a direct impact on the imaging quality. The acoustic field analysis method based on Rayleigh-Sommerfeld integral formula, angular spectrum method and spatial impulse response is studied, and the characteristics of CMUT and CMUT arrays are discussed. The focusing and deflection performance of CMUT array is analyzed by calculating the radiation sound field, and the effect of array aperture size on the focusing distance is studied. The influence of CMUT array design parameters on the spatial pulse echo response is analyzed. Then, different imaging methods have different performance and characteristics. It is necessary to consider a variety of factors to select suitable methods in practical application. On the basis of discussing three different imaging methods: phased array imaging, synthetic aperture focusing imaging and phase control subarray imaging, the working principles of these three imaging methods are discussed. By calculating the corresponding effective aperture and synthetic beam, we compare and analyze them. Based on the CMUT linear array, we verify and analyze the imaging effect of three imaging methods. For the CMUT array with a large number of elements. Several special phased array imaging schemes are designed, which can effectively reduce the complexity of the imaging system and improve the real-time imaging. Finally, through the overall test and analysis of CMUT linear array. The performance of the designed CMUT and its array is further verified, which provides an important data reference for the design of ultrasonic imaging system in the future.
【學(xué)位授予單位】：天津大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類(lèi)號(hào)】：TP212

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