本文選題：金屬氧化物 + 氣敏傳感器　； 參考：《西南交通大學(xué)》2017年碩士論文

【摘要】：當(dāng)前環(huán)境污染問題日益突出,有毒有害氣體監(jiān)測成為環(huán)境治理的必要手段和重要保障,因此,先進(jìn)氣體傳感器成為目前環(huán)境監(jiān)測的研究熱點(diǎn)。先進(jìn)敏感材料與器件工藝是氣體傳感器研究的重點(diǎn)和核心,對新型高性能氣敏傳感器的研究具有重要的科學(xué)意義和應(yīng)用價值。金屬氧化物半導(dǎo)體材料因其靈敏度高、結(jié)構(gòu)簡單、價格低廉、易于集成等優(yōu)點(diǎn),在氣敏傳感器上表現(xiàn)出良好的應(yīng)用價值。通過設(shè)計金屬氧化物的微結(jié)構(gòu)、調(diào)控組織與相成分、復(fù)合不同理化特性的材料,并研究其對氣敏特性的影響機(jī)制,有望提高氣敏傳感器的靈敏性、選擇性、穩(wěn)定性,并降低氣敏傳感器的工作溫度。本論文通過設(shè)計新型微結(jié)構(gòu)金屬氧化物MoO3、Fe_2O_3及其復(fù)合物,并探討其在氣敏傳感器的應(yīng)用研究。主要研究內(nèi)容如下:(1)利用簡單的熱氧化法原位生長柔性大面積α-MoO3微米片規(guī)整陣列薄膜,這種薄膜沿著(110)晶面擇優(yōu)取向生長并表現(xiàn)出力學(xué)柔性。基于α-MoO3微米片陣列薄膜的敏感元件在目前實驗條件下未檢測到氣敏特性,但是表現(xiàn)出良好的溫度傳感特性。(2)利用水熱法無模板自組裝技術(shù)制備仿生蕨類葉子狀α-Fe_2O_3,其純度高無任何雜質(zhì),微觀結(jié)構(gòu)與自然界中蕨類葉子高度相似,主干骨架與分支結(jié)構(gòu)的角度大致為64°�；谵ь惾~子狀α-Fe_2O_3的氣敏元件對正丁醇表現(xiàn)出很好的敏感特性。在260℃下,其對100ppm正丁醇的靈敏度為8.26,對濃度為10、20、50和100ppm正丁醇的響應(yīng)(恢復(fù))時間分別為17.5 s(9 s),24 s(16 s),26 s(18 s)和34 s(21s)。而且,蕨類葉子狀α-Fe_2O_3氣敏元件表現(xiàn)出很好的穩(wěn)定性和選擇性。與顆粒狀蕨類α-Fe_2O_3氣敏元件相比,蕨類葉子狀α-Fe_2O_3氣敏元件對正丁醇的靈敏度高和響應(yīng)(恢復(fù))速率快。(3)通過對仿生蕨類葉子狀α-Fe_2O_3的表面修飾,采用兩步水熱法成功制備出蕨類葉子狀α-Fe_2O_3/SnO2異質(zhì)結(jié)構(gòu)材料。α-Fe_2O_3/SnO2復(fù)合材料具有較好的結(jié)晶性和高純度,SnO2納米顆粒沉積于α-Fe_2O_3表面,經(jīng)化學(xué)復(fù)合后蕨類葉子狀結(jié)構(gòu)得到很好的保留。在200℃下,基于仿生蕨類葉子狀α-Fe_2O_3/SnO2氣敏傳感器對10、20、50和100ppm正丁醇?xì)怏w的靈敏度分別是5.41、9.29、15.01和22.73 s。與純相α-Fe_2O_3氣敏元件相比,α-Fe_2O_3/SnO2對100ppm正丁醇的靈敏度高出了2倍,氣敏元件最佳工作溫度由260℃降至200℃。
[Abstract]:The problem of environmental pollution is becoming more and more prominent, and the monitoring of toxic and harmful gases has become a necessary means and important guarantee for environmental control. Therefore, advanced gas sensors have become the focus of research on environmental monitoring. Advanced sensitive materials and device technology are the key and core of gas sensor research, and the research tools for new high performance gas sensors are studied. The metal oxide semiconductor material has the advantages of high sensitivity, simple structure, low price and easy integration. It has shown good application value on the gas sensor. By designing the micro structure of metal oxide, the materials which regulate the structure and phase composition and compound the different physical and chemical properties are studied and studied. The mechanism of its influence on gas sensitivity is expected to improve the sensitivity, selectivity and stability of the gas sensor and reduce the working temperature of gas sensors. This paper designs a new type of microstructural metal oxide MoO3, Fe_2O_3 and its complex, and discusses its application in the gas sensor. The main contents are as follows: (1) the use of simple The thermal oxidation method is in situ for the growth of a flexible large area alpha -MoO3 micron slice array film. This film grows along (110) crystal surface and shows mechanical flexibility. The sensitive elements based on the alpha -MoO3 micrometer array film have not detected the gas sensitivity under the present experimental conditions, but exhibit good temperature sensing properties. (2) use The bionic fern leaf like alpha -Fe_2O_3 was prepared by the hydrothermal method without template self-assembly. Its purity was high without any impurity, the microstructure was similar to the fern leaf in nature, and the angle of the backbone skeleton and the branch structure was approximately 64 degrees. The gas sensing element based on the fern leaf like alpha -Fe_2O_3 showed good sensitivity to n-butanol. At 260 degrees C The sensitivity of 100ppm n-butanol was 8.26, and the response time for 10,20,50 and 100ppm n-butanol was 17.5 s (9 s), 24 s (16 S), 26 S (18 s) and 34 s (21s). Moreover, fern leaf like alpha -Fe_2O_3 gas sensors showed good stability and selectivity. Compared with granular fern alpha gas sensors, ferns were compared. The sensitivity and response (recovery) rate of the leaf like alpha -Fe_2O_3 gas sensor are high. (3) the leaf like alpha -Fe_2O_3/SnO2 heterostructure material is successfully prepared by two step hydrothermal method through the surface modification of the bionic fern leaf like alpha -Fe_2O_3. The alpha -Fe_2O_3/SnO2 composite has good crystallinity and high purity, SnO2 The nano particles are deposited on the surface of alpha -Fe_2O_3, and the leaf like structure of ferns is well preserved. At 200, the sensitivity of the bionic fern leaf like alpha -Fe_2O_3/SnO2 gas sensor to 10,20,50 and 100ppm n-butanol gas is 5.41,9.29,15.01 and 22.73 S. compared with the pure phase alpha -Fe_2O_3 gas sensor, respectively, alpha -Fe_2O_3. The sensitivity of /SnO2 to 100ppm butanol is 2 times higher, and the best working temperature of gas sensor decreases from 260 to 200 degrees.
【學(xué)位授予單位】：西南交通大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：O659;TP212

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