本文關(guān)鍵詞： 壓力傳感器 壓電薄膜 納米纖維 靜電紡絲　出處：《北方工業(yè)大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：壓電式MEMS壓力傳感器是微器件中應(yīng)用較廣泛的一種,而敏感材料則是傳感器技術(shù)的關(guān)鍵。所以本文主要的研究內(nèi)容是微機(jī)電系統(tǒng)中的壓電式MEMS壓力傳感器,以具有壓電性能的PZT和BiFeO_3為敏感材料,分別利用溶膠-凝膠法和旋涂工藝相結(jié)合制備PZT壓電薄膜,利用靜電紡絲技術(shù)制備BiFeO_3納米纖維,并與通過光刻、磁控濺射、干法刻蝕等微加工工藝制備的硅基底片相結(jié)合,制作出基于PZT壓電薄膜和BiFeO_3納米纖維的壓電式MEMS壓力傳感器。最后設(shè)計(jì)并搭建一套壓力傳感器的測試平臺(tái),對(duì)其進(jìn)行初步的性能測試實(shí)驗(yàn),為多鐵材料在微器件上的應(yīng)用提供理論依據(jù)和實(shí)驗(yàn)基礎(chǔ)。首先,基于平行叉指電極結(jié)構(gòu),設(shè)計(jì)三種不同結(jié)構(gòu)類型的壓力傳感器,即基于PZT壓電薄膜的MEMS壓力傳感器、有彈性薄膜腔且基于BiFeO_3納米纖維的MEMS壓力傳感器、無彈性薄膜腔且基于BiFeO_3納米纖維的MEMS壓力傳感器,對(duì)于無彈性薄膜腔的結(jié)構(gòu),需要使用PDMS膜來代替受力的彈性薄膜,然后分析和對(duì)比三種不同類型傳感器的特性。其次,研究微加工工藝和靜電紡絲技術(shù)。對(duì)于微加工工藝,重新擬定本課題三種壓力傳感器的加工流程,改良工藝參數(shù)和加工方式,其中利用溶膠-凝膠法和旋涂法制備PZT壓電薄膜,利用干法刻蝕得到彈性薄膜腔,利用旋涂工藝制備PDMS膜等。對(duì)于靜電紡絲技術(shù),優(yōu)化推進(jìn)速度、電場強(qiáng)度、極板間距、接收距離等實(shí)驗(yàn)參數(shù),在電極上制備出趨于平行的BiFeO_3納米纖維,并對(duì)退火后的納米纖維進(jìn)行XRD和SEM表征分析。最后,設(shè)計(jì)測試系統(tǒng)并搭建壓力傳感器測試平臺(tái),測試系統(tǒng)主要包括真空裝置、數(shù)字壓差計(jì)、測試電路等,對(duì)制備成功的壓力傳感器實(shí)行初步性能測驗(yàn),分析實(shí)驗(yàn)數(shù)據(jù),得到壓力輸入和電壓輸出的關(guān)系。
[Abstract]:Piezoelectric MEMS pressure sensor is widely used in microdevices. The sensitive material is the key of sensor technology, so the main research content of this paper is piezoelectric MEMS pressure sensor in MEMS. Using PZT and BiFeO_3 with piezoelectric properties as sensitive materials, PZT piezoelectric thin films were prepared by sol-gel method and spin-coating process, respectively. BiFeO_3 nanofibers were prepared by electrospinning and combined with silicon substrate prepared by photolithography, magnetron sputtering and dry etching. A piezoelectric MEMS pressure sensor based on PZT piezoelectric film and BiFeO_3 nanofiber was fabricated. Finally, a testing platform for the pressure sensor was designed and built. The preliminary performance test experiments provide theoretical basis and experimental basis for the application of multi-iron materials in microdevices. Firstly, three kinds of pressure sensors with different structure are designed based on parallel interDigital electrode structure. That is, MEMS pressure sensor based on PZT piezoelectric film, MEMS pressure sensor with elastic film cavity and BiFeO_3 nanofiber. The MEMS pressure sensor based on BiFeO_3 nanofiber is an inelastic thin film cavity. For the structure of the inelastic thin film cavity, PDMS film is needed to replace the elastic film. Then the characteristics of three different types of sensors are analyzed and compared. Secondly, the micromachining technology and electrostatic spinning technology are studied. For the micro-machining process, the processing process of the three kinds of pressure sensors is reformulated. The PZT piezoelectric film was prepared by sol-gel method and spin-coating method, and the elastic film cavity was obtained by dry etching. PDMS films were prepared by spin-coating process. For the electrostatic spinning technology, the experimental parameters such as speed of propulsion, electric field strength, plate spacing and receiving distance were optimized. The parallel BiFeO_3 nanofibers were prepared on the electrode, and the annealed nanofibers were characterized by XRD and SEM. Finally, the test system was designed and the pressure sensor test platform was built. The test system mainly includes vacuum device, digital pressure differential meter, test circuit and so on. The primary performance test of the successfully fabricated pressure sensor is carried out, the experimental data are analyzed, and the relationship between pressure input and voltage output is obtained.
【學(xué)位授予單位】：北方工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TP212

【參考文獻(xiàn)】

相關(guān)期刊論文 前10條

1 姜波;齊杏林;趙志寧;呂靜;;MEMS壓力傳感器現(xiàn)狀及其在彈藥上的應(yīng)用[J];傳感器與微系統(tǒng);2013年02期

2 譚和平;侯曉妮;孫登峰;葉善蓉;;納米材料的表征與測試方法[J];中國測試;2013年01期

3 殷江;袁國亮;劉治國;;鐵電材料的研究進(jìn)展[J];中國材料進(jìn)展;2012年03期

4 劉強(qiáng);周浩淼;曲紹興;;磁電多鐵性復(fù)合材料磁電耦合性能有限元分析[J];材料科學(xué)與工程學(xué)報(bào);2011年04期

5 陳勇華;;微機(jī)電系統(tǒng)的研究與展望[J];電子機(jī)械工程;2011年03期

6 周敬然;張海英;瞿鵬飛;董瑋;劉彩霞;;ICP刻蝕在微加速度傳感器制作中的應(yīng)用[J];微納電子技術(shù);2010年11期

7 毛立娟;王孝平;高原;周素紅;;氮?dú)馕紹ET法測定納米材料比表面積的比對(duì)實(shí)驗(yàn)[J];現(xiàn)代測量與實(shí)驗(yàn)室管理;2010年05期

8 陳少軍;李以貴;;基于高深寬比Si干法刻蝕參數(shù)優(yōu)化[J];微納電子技術(shù);2009年12期

9 龍?jiān)茲?李蒙蒙;尹志華;;靜電紡絲法制備有序排列的納米纖維最新進(jìn)展[J];青島大學(xué)學(xué)報(bào)(自然科學(xué)版);2008年02期

10 種傳波;李德勝;劉本東;;小量程、高靈敏度微壓力傳感器的優(yōu)化設(shè)計(jì)[J];微細(xì)加工技術(shù);2007年04期

相關(guān)碩士學(xué)位論文 前6條

1 盛偉光;BiFeO_3納米纖維壓電式壓力傳感器的研究[D];北方工業(yè)大學(xué);2016年

2 包宏權(quán);壓力傳感器結(jié)構(gòu)設(shè)計(jì)和優(yōu)化分析[D];東南大學(xué);2016年

3 張久超;基于多鐵納米纖維的壓力傳感器設(shè)計(jì)與研究[D];北方工業(yè)大學(xué);2015年

4 汪海濤;基于多鐵納米纖維的壓力傳感器設(shè)計(jì)與工藝研究[D];北方工業(yè)大學(xué);2014年

5 張琳;基于叉指電極的MEMS環(huán)境監(jiān)測傳感器關(guān)鍵技術(shù)研究[D];湘潭大學(xué);2013年

6 付思齊;MEMS工藝優(yōu)化及其應(yīng)用[D];長春理工大學(xué);2010年

，

本文編號(hào)：1444813