本文關(guān)鍵詞：基于光雕技術(shù)的還原氧化石墨烯壓力傳感器制備　出處：《太原理工大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 光雕還原氧化石墨烯 高還原效率 壓阻效應(yīng) 柔性壓力傳感器 寬壓力范圍 性能調(diào)控

【摘要】：傳統(tǒng)的壓力傳感器都以硅為基礎(chǔ)或是金屬應(yīng)變片式,其剛性結(jié)構(gòu)限制了不規(guī)則形貌上的壓力測試,因此制備一種柔性可用于各種形貌表面壓力測試的壓力傳感器非常必要。石墨烯由于其具備壓阻效應(yīng)并且可隨意轉(zhuǎn)移到各種柔性基底上,被廣泛的應(yīng)用于壓力傳感器的制備,但由于傳統(tǒng)石墨烯制備方法以及石墨烯性質(zhì)的制約,大部分已報道的壓力傳感器都只在較低范圍內(nèi)具有較高靈敏度,無法滿足寬范圍的壓力檢測。因此本論文在前人的工作基礎(chǔ)上研究了基于光雕技術(shù)的還原氧化石墨烯寬范圍壓力傳感器的制備,光雕技術(shù)還原氧化石墨烯相對于傳統(tǒng)氧化石墨烯還原技術(shù),所需時間短、設(shè)備成本低、操作簡便,且便于在柔性基底上大規(guī)模集成。并且通過對光雕還原氧化石墨烯產(chǎn)物進行XPS表征證實光雕技術(shù)對于氧化石墨烯具有很高的還原效率。光學(xué)顯微鏡與AFM表征結(jié)果證明氧化石墨烯經(jīng)過光雕過程形成了與傳統(tǒng)方法制備的石墨烯不同的凸起結(jié)構(gòu),并且測試發(fā)現(xiàn)光雕還原氧化石墨烯具有壓阻效應(yīng),因此可將光雕還原氧化石墨烯用于壓力傳感器的制備。從光雕的原理上分析此凸起結(jié)構(gòu)是光雕過程中激光熱效應(yīng)的結(jié)果,同時也是產(chǎn)生壓阻效應(yīng)的主要原因。而光雕還原氧化石墨烯結(jié)構(gòu)松軟,易被破壞,因此作為壓力傳感器使用時需要添加一層保護材料,比較膠帶/PET/PDMS分別作為保護材料時壓力傳感器性能的穩(wěn)定性,發(fā)現(xiàn)PDMS最適合作為此壓力傳感器中還原氧化石墨烯的保護材料,且此壓力傳感器的可測量壓力范圍達60 KPa,靈敏度為0.00779 KPa~(-1)。為了使壓力傳感器能夠滿足各種條件下的壓力測量,需要調(diào)控其測量范圍與靈敏度,因此設(shè)計并制備了不同圈數(shù)的螺旋狀還原氧石墨烯,測試組裝后的壓力傳感器性能發(fā)現(xiàn)螺旋圈數(shù)越多,可測量壓力范圍越低,而靈敏度則隨圈數(shù)增加而增加,可測量壓力范圍可高達800 KPa。通過設(shè)計不同密度的還原氧化石墨烯圖形,尋找到了一種能夠簡單有效調(diào)控壓力傳感器的測量范圍與靈敏度的方法。最后對此壓力傳感器的循環(huán)使用壽命進行測試,證明了其具有300次以上的使用壽命,說明穩(wěn)定性較高,有望用于實際應(yīng)用。
[Abstract]:The traditional pressure sensors are based on silicon or metal strain gauge, and their rigid structure limits the pressure measurement on irregular morphology. Therefore, it is necessary to prepare a kind of flexible pressure sensor which can be used to measure the surface pressure of various morphologies. Because of its piezoresistive effect, graphene can be transferred to various flexible substrates at will. It has been widely used in the preparation of pressure sensors, but due to the traditional graphene preparation methods and graphene properties constraints, most of the reported pressure sensors are only in a lower range of high sensitivity. Therefore, based on the previous work, the fabrication of reductive graphene wide range pressure sensor based on photocarving technology is studied in this paper. Compared with the traditional graphene reduction technology, the photocarving technology has the advantages of short time, low equipment cost and simple operation. It is convenient for large-scale integration on flexible substrates, and the XPS characterization of photo-engraving products of graphene oxide shows that photocarving technology has a high reduction efficiency for graphene oxide. Optical microscope and AFM have high reduction efficiency. The characterization results showed that graphene oxide formed a different protruding structure from the traditional graphene prepared by photoengraving. The photoresist effect of graphene oxide was also found. Therefore, it can be used to fabricate the pressure sensor by reducing graphene by light carving. From the principle of light carving, this bulge structure is the result of laser thermal effect in the process of light carving. At the same time, it is also the main reason for the piezoresistive effect. However, the structure of photocarving reduced graphene oxide is soft and easy to be destroyed, so it is necessary to add a layer of protective material when used as a pressure sensor. Comparing the stability of pressure sensor with tape / per / PDMS as protective material, it is found that PDMS is the most suitable protection material for reducing graphene oxide in this pressure sensor. The pressure sensor has a measurable pressure range of 60 KPA and a sensitivity of 0.00779 KPA-1. In order to make the pressure sensor meet the pressure measurement under various conditions. It is necessary to control the measurement range and sensitivity, so we designed and prepared different cycles of reduced oxygraphene. After testing the performance of the assembled pressure sensor, it was found that the more the number of spiral cycles, the lower the measurable pressure range. The sensitivity increases with the increase of the number of cycles, and the pressure range can be measured up to 800 KPA. A simple and effective method to control the measuring range and sensitivity of the pressure sensor is found. Finally, the cycle life of the pressure sensor is tested. It is proved that it has a service life of more than 300 times, indicating that its stability is high and it is expected to be used in practical application.
【學(xué)位授予單位】：太原理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TP212

【參考文獻】

相關(guān)期刊論文 前6條

1 肖應(yīng)超;;MEMS傳感器發(fā)展現(xiàn)狀與應(yīng)用[J];中國高新技術(shù)企業(yè);2016年35期

2 錢鑫;蘇萌;李風煜;宋延林;;柔性可穿戴電子傳感器研究進展[J];化學(xué)學(xué)報;2016年07期

3 傘海生;宋子軍;王翔;趙燕立;余煜璽;;適用于惡劣環(huán)境的MEMS壓阻式壓力傳感器[J];光學(xué)精密工程;2012年03期

4 胡耀娟;金娟;張卉;吳萍;蔡稱心;;石墨烯的制備、功能化及在化學(xué)中的應(yīng)用[J];物理化學(xué)學(xué)報;2010年08期

5 郭冰;王沖;;壓力傳感器的現(xiàn)狀與發(fā)展[J];中國儀器儀表;2009年05期

6 尹福炎;薄膜應(yīng)變片與傳感器[J];傳感器世界;1997年06期

，

本文編號：1428094