基于人工電磁結(jié)構(gòu)材料的偏振調(diào)控原理及技術(shù)研究
本文選題:人工電磁結(jié)構(gòu)材料 + 偏振調(diào)控 ; 參考:《重慶大學(xué)》2016年博士論文
【摘要】:偏振調(diào)控技術(shù)是電磁學(xué)領(lǐng)域的重要研究?jī)?nèi)容之一,在偏振成像、防偽技術(shù)、目標(biāo)識(shí)別、信息通信以及生物醫(yī)學(xué)等領(lǐng)域具有廣泛的應(yīng)用前景。隨著微機(jī)電系統(tǒng)的發(fā)展,人們對(duì)電磁波調(diào)制元件和系統(tǒng)的微型化,集成化和輕量化提出了更高的要求。開展新型人工電磁結(jié)構(gòu)材料的偏振調(diào)控原理及技術(shù)研究,對(duì)促進(jìn)偏振調(diào)控元件和系統(tǒng)的小型化和集成化,推進(jìn)電磁學(xué)領(lǐng)域的發(fā)展具有重要的科學(xué)和現(xiàn)實(shí)意義。論文在國(guó)家973計(jì)劃和國(guó)家自然科學(xué)基金等項(xiàng)目的資助下,對(duì)基于人工電磁結(jié)構(gòu)材料的偏振調(diào)控原理及技術(shù)進(jìn)行了較為深入的研究。論文首先對(duì)新型偏振調(diào)控人工電磁結(jié)構(gòu)材料的偏振調(diào)控物理機(jī)制、原理進(jìn)行了較為深入的分析研究;其次開展了結(jié)構(gòu)設(shè)計(jì)研究,將單層透射式偏振轉(zhuǎn)換材料的轉(zhuǎn)換效率提高至理論極限,結(jié)合廣義斯涅爾定律和相位調(diào)控達(dá)到消除共偏振背景干擾的目的;針對(duì)電子束光刻、聚焦離子束刻蝕、雙光子光刻等光波段人工電磁結(jié)構(gòu)材料加工技術(shù)存在的加工效率低、加工面積小、成本高等問(wèn)題,開展光波段偏振調(diào)控人工電磁結(jié)構(gòu)材料的加工工藝研究,實(shí)現(xiàn)了大面型光波段偏振轉(zhuǎn)換器的制備;論文的另一項(xiàng)重要工作是,開展了軸對(duì)稱偏振人工電磁結(jié)構(gòu)材料的相關(guān)研究,提出金屬-介質(zhì)-金屬多層光柵結(jié)構(gòu),實(shí)現(xiàn)了電磁波偏振態(tài)、相位和振幅的全方位調(diào)制,在此基礎(chǔ)上設(shè)計(jì)高效率軸對(duì)稱偏振人工電磁結(jié)構(gòu)材料,實(shí)現(xiàn)了圓偏振到徑向偏振和角向偏振的轉(zhuǎn)換,提高了人工電磁結(jié)構(gòu)材料對(duì)電磁波的調(diào)控自由度,為新型偏振調(diào)控及其他光學(xué)元件的研制提供了有效的技術(shù)手段。論文的主要研究工作和創(chuàng)新點(diǎn)如下:(1)首先在深入分析人工電磁結(jié)構(gòu)材料單元結(jié)構(gòu)形式及其排布方式對(duì)結(jié)構(gòu)電磁響應(yīng)影響的基礎(chǔ)上,開展基于人工電磁結(jié)構(gòu)材料的偏振調(diào)控基本原理研究,確定結(jié)構(gòu)設(shè)計(jì)方案;(2)進(jìn)行人工電磁結(jié)構(gòu)材料的理論分析方法和仿真計(jì)算方法研究,通過(guò)仿真研究,分析人工電磁結(jié)構(gòu)材料各結(jié)構(gòu)參數(shù)與結(jié)構(gòu)偏振轉(zhuǎn)換效果的關(guān)系,開展高轉(zhuǎn)換效率、寬工作波段偏振轉(zhuǎn)換器件的設(shè)計(jì);(3)針對(duì)當(dāng)前光波段人工電磁結(jié)構(gòu)材料加工技術(shù)效率低、面積小、成本高等問(wèn)題,采用橢圓等離子體諧振器實(shí)現(xiàn)高效率光波段偏振轉(zhuǎn)換器的設(shè)計(jì),降低加工難度,基于二次曝光雙光束激光干涉技術(shù)實(shí)現(xiàn)大面型偏振調(diào)控器件的制備;(4)針對(duì)透射式偏振轉(zhuǎn)換人工電磁結(jié)構(gòu)材料低轉(zhuǎn)換效率和高背景干擾的問(wèn)題,提出半連續(xù)結(jié)構(gòu)將單層材料的偏振轉(zhuǎn)換效率提高至理論極限,結(jié)合廣義斯涅爾定律和相位調(diào)控提出懸鏈線結(jié)構(gòu)在提高轉(zhuǎn)換效率的同時(shí)消除共偏振背景干擾;(5)開展軸對(duì)稱偏振人工電磁結(jié)構(gòu)材料的相關(guān)研究,分析將圓偏振轉(zhuǎn)換為徑向偏振和角向偏振的基本原理和方法,進(jìn)行新型軸對(duì)稱偏振人工電磁結(jié)構(gòu)材料的設(shè)計(jì),提高轉(zhuǎn)換效率和徑向偏振/角向偏振的純度;(6)采用橢偏儀和矢量網(wǎng)絡(luò)分析儀分別對(duì)加工反射式和透射式方向性偏振轉(zhuǎn)換器樣品進(jìn)行測(cè)試。其中,反射式偏振轉(zhuǎn)換樣品在850nm至1930nm波段轉(zhuǎn)換效率大于87.5%,透射式方向性偏振轉(zhuǎn)換樣品對(duì)應(yīng)12GHz、15GHz和18GHz的輻射角分別為52.83°,40.62°和32.69°。測(cè)試結(jié)果與理論和仿真計(jì)算相符。
[Abstract]:Polarization control technology is one of the important research contents in the field of electromagnetics. It has wide application prospects in the fields of polarization imaging, anti-counterfeit technology, target recognition, information communication and biomedicine. With the development of microelectromechanical systems, people have put forward higher requirements for the miniaturization, integration and lightweight of electromagnetic wave modulation components and systems. It is of great scientific and practical significance to promote the miniaturization and integration of polarization control elements and systems and promote the development of electromagnetism. Under the support of the national 973 program and National Natural Science Foundation, the paper is based on artificial electromagnetic. The principle and technology of polarization control of structural materials are deeply studied. Firstly, the principle of polarization regulation and control of the new polarization control of artificial electromagnetic structure material is studied. Secondly, the structure design is carried out to improve the efficiency of the conversion efficiency of the single-layer transmissive polarization conversion material. On the limit, combined with the generalized Snell's law and the phase regulation to eliminate the interference of the co polarization background interference, the processing efficiency of the electronic beam lithography, the focused ion beam etching, the two-photon photolithography and other optical waveband artificial electromagnetic materials processing technology is low, the processing area is small, and the cost is high, and the light band polarization control artificial electricity is carried out. The research on the processing technology of magnetic structure material has realized the preparation of the polarization converter of the large face light band. Another important work of this paper is to carry out the research on the axisymmetric polarized artificial electromagnetic structure material, and put forward the structure of the metal dielectric metal multilayer grating, which realizes the omnidirectional modulation of the polarization state, phase and amplitude of the electromagnetic wave. On this basis, the high efficiency axisymmetric polarization artificial electromagnetic structure material is designed. The conversion of circular polarization to radial polarization and angular polarization is realized. The control freedom of electromagnetic wave is improved by the artificial electromagnetic structure material. It provides an effective technical means for the development of new polarization control and other optical elements. And the innovation points are as follows: (1) first, based on the deep analysis of the influence of the structural form of the artificial electromagnetic structure material and its arrangement mode on the electromagnetic response of the structure, the basic principle of polarization control based on the artificial electromagnetic structure material is studied and the design scheme is determined. (2) the theoretical analysis method and imitation of the artificial electromagnetic structure materials are carried out. In the study of real computing method, the relationship between the structural parameters of artificial electromagnetic materials and the effect of polarization conversion is analyzed, and the design of high conversion efficiency and wide working band polarization conversion device is carried out. (3) aiming at the low efficiency, small area and high cost of the present artificial electromagnetic structure material, the ellipse is adopted. The plasma resonator realizes the design of high efficiency optical waveband polarization converter and reduces the difficulty of processing. Based on the two exposure double beam laser interference technique, the preparation of large face polarization control devices is realized. (4) the semi continuous structure will be proposed for the problem of low conversion efficiency and high background interference of transmission polarization conversion artificial electromagnetic structure materials. The polarization conversion efficiency of the single layer material is improved to the theoretical limit. In combination with the generalized Snell's law and the phase regulation, the catenary structure is proposed to eliminate the co polarization interference while improving the conversion efficiency. (5) the study of the axisymmetric polarization artificial electromagnetic structure materials is carried out to analyze the conversion of circular polarization to radial polarization and angular polarization. The basic principles and methods are designed for the design of a new axisymmetric polarized artificial electromagnetic structure material, which improves the conversion efficiency and the purity of the radial polarization / angular polarization. (6) the ellipsometry and vector network analyzer are used to test the reflective and transmission directional polarization converter samples respectively. The reflective polarization conversion sample is 85. The conversion efficiency of the 0nm to 1930nm band is greater than 87.5%. The transmission directional polarization conversion samples correspond to the 12GHz, 15GHz and 18GHz radiation angles of 52.83, 40.62 and 32.69 degrees respectively. The test results are in agreement with the theoretical and simulation calculations.
【學(xué)位授予單位】:重慶大學(xué)
【學(xué)位級(jí)別】:博士
【學(xué)位授予年份】:2016
【分類號(hào)】:O441
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