本文選題：非平衡磁控濺射離子鍍 + GLC膜��； 參考：《太原理工大學(xué)》2017年碩士論文

【摘要】：類石墨膜(GLC)因其高硬度、低摩擦系數(shù)、低磨損率和高的承載能力等良好的性能而備受關(guān)注,在刀具、減摩耐磨材料等領(lǐng)域得到廣泛應(yīng)用。然而,目前幾乎所有的GLC膜都是在高速鋼等一類硬度較高的基體上制備,很少有銅合金等軟基體上制備GLC膜,并考察其摩擦學(xué)性能。國內(nèi)銅上制備類金剛石膜(DLC)的文獻比較多,但銅上制備GLC膜的文獻報道較少。而且在軟基體上制備的GLC膜,是否仍可采用壓坑法或劃痕法作為膜基結(jié)合強度檢測方法也值得探討。本文利用非平衡磁控濺射離子鍍技術(shù),在高速鋼、銅合金上采用施加過渡層+梯度層+摻雜相結(jié)合的方法,制備GLC膜。通過調(diào)節(jié)Ti靶沉積工作層時的電流,完成不同金屬含量的摻雜。采用掃描電子顯微鏡、原子力顯微鏡、能譜儀觀察、測量、分析薄膜的表面和截面形貌、成分,采用拉曼光譜儀、X射線光電子能譜儀分析薄膜的價鍵結(jié)構(gòu),用面電阻儀測量導(dǎo)電性,用納米壓痕儀測量薄膜的硬度和彈性模量,摩擦磨損試驗機、白光干涉儀、光學(xué)顯微鏡等手段研究不同基體上薄膜干摩擦磨損性能。結(jié)果表明:1.不同Ti靶電流下,碳膜表面呈現(xiàn)出島狀生長模式,表面粗糙度先增加后減少;薄膜斷面未見明顯的縫隙等缺陷;隨Ti靶電流增加,Ti元素質(zhì)量百分比增加,沉積速率也增加,使得薄膜截面變?yōu)橹鶢钌L。2.隨著Ti靶電流增加,Raman和XPS測得sp2鍵含量先增加后減小,0.8 A含量最高;四探針測試表明薄膜具有良好的導(dǎo)電性能。3.隨Ti靶電流增大,sp3鍵含量先減少后增加,硬度和彈性模量先減少后增加,H/E和H3/E2值都減小,薄膜彈性形變能力和耐磨性降低。4.壓痕法測得高速鋼上制備的碳膜結(jié)合力先增加后降低,0.8 A時達到HF3級;當(dāng)干摩擦載荷為20 N時,與高速鋼原樣對比,制備的碳膜能大幅度降低摩擦系數(shù),在0.8 A有最小摩擦系數(shù)0.10,0.2 A最小磨損率5.21×10~(-16)m~3/N·m;對磨球在轉(zhuǎn)移膜的保護下,磨損率極低;GLC膜將高速鋼原樣的粘著、氧化磨損轉(zhuǎn)變?yōu)樘寄さ哪チＤp。5.維氏壓坑法適合測試軟基硬膜結(jié)合力,測得銅合金基體上結(jié)合強度由于碳向基體銅擴散而降低。6.磨損載荷10 N時,Cu上制備的碳膜降低了與對磨鋼球的摩擦系數(shù),0.2 A可達到最小摩擦系數(shù)0.14,最小磨損率2.89×10~(-16) m~3/N·m;對磨球在轉(zhuǎn)移膜的保護下,磨損率極低;GLC膜將Cu原樣的粘著、氧化磨損轉(zhuǎn)變?yōu)樘寄さ哪チＤp。7.Cu基體上,Ti靶電流為0.2 A時,當(dāng)磨損載荷增加,摩擦系數(shù)先減小后增大,在20 N時達到最小值0.12;薄膜磨損率依次增加;磨球磨損率先減少后增加。
[Abstract]:Because of its good properties such as high hardness, low friction coefficient, low wear rate and high bearing capacity, graphite-like film GLC has been widely used in cutting tools, friction reducing and wear resistant materials and so on. However, almost all GLC films are prepared on a class of high hardness substrates such as high speed steel. There are few GLC films on soft substrates such as copper alloys, and their tribological properties are investigated. There are many literatures about the preparation of diamond-like carbon (DLC) films on copper in China, but there are few reports on the preparation of GLC films on copper. Whether the indentation method or scratch method can be used to detect the binding strength of GLC films on soft substrates is also worth discussing. In this paper, GLC films were prepared on high speed steel (HSS) and copper alloy by doping with gradient layer of transition layer by using unbalanced magnetron sputtering ion plating technique. By adjusting the current of Ti target to deposit the working layer, the doping of different metal content is completed. Scanning electron microscope (SEM), atomic force microscope (AFM), energy spectrometer (EDS) were used to observe, measure and analyze the surface and cross section morphology and composition of the films. The valence bond structures of the films were analyzed by Raman spectrometer and X-ray photoelectron spectroscopy. The electrical conductivity was measured by surface resistance instrument, the hardness and elastic modulus of films were measured by nano-indentation instrument, the friction and wear test machine, white light interferometer and optical microscope were used to study the dry friction and wear properties of thin films on different substrates. The results show that: 1. At different Ti target currents, the carbon film surface showed an island growth pattern, the surface roughness first increased and then decreased, there were no obvious gaps in the section of the film, and with the increase of Ti target current, the mass percentage of Ti element increased, and the deposition rate also increased. Make the film section become columnar growth. 2. With the increase of Ti target current, Raman and XPS measurements show that the content of sp2 bond increases first, then decreases the content of 0.8A, and the four-point probe test shows that the film has good conductivity. 3. With the increase of Ti target current, the content of sp3 bond decreases first and then increases, the hardness and modulus of elasticity decrease first, then the values of H / P E and H3/E2 decrease, and the elastic deformation ability and wear resistance of the films decrease by .4. The results of indentation test showed that the adhesion of carbon film prepared on high speed steel first increased and then decreased to 0. 8A, and when dry friction load was 20 N, the friction coefficient of carbon film prepared on high speed steel was significantly reduced compared with that of high speed steel. Under the protection of the transfer film, the wear rate of the grinding ball is very low and the wear rate of the high speed steel is very low. The wear of the high speed steel is changed to the abrasive wear of the carbon film by the oxidizing wear of the high speed steel film, which has a minimum friction coefficient of 0.100.2A and a minimum wear rate of 5.21 脳 10~(-16)m~3/N / m.The wear rate of the grinding ball is very low under the protection of the transfer film. The Vickers indentation method is suitable for testing the adhesion of hard film on soft ground. The bonding strength of copper alloy matrix is decreased by the diffusion of carbon to copper matrix. When the wear load is 10 N, the carbon film prepared on Cu can reduce the friction coefficient (0.2A) to 0.14, and the minimum wear rate is 2.89 脳 10 ~ (-16) mm ~ (-1) N ~ (m). Under the protection of the transfer film, the wear rate of the ball is very low and the GLC film adheres to the original Cu. When the current of Ti target on Cu substrate is 0.2 A, when the wear load increases, the friction coefficient decreases first, then increases, and reaches the minimum value of 0.12 at 20 N, and the wear rate of the film increases in turn. Grinding ball wear first reduced and then increased.
【學(xué)位授予單位】：太原理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TG174.4

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