發(fā)布時(shí)間：2018-01-01 04:34

  本文關(guān)鍵詞：石英玻璃表面的磨削裂紋激光修復(fù)和去應(yīng)力工藝技術(shù)研究　出處：《山東大學(xué)》2017年碩士論文　論文類(lèi)型：學(xué)位論文

  更多相關(guān)文章： 石英玻璃 殘余應(yīng)力 激光修復(fù) 表面裂紋 粘彈性本構(gòu)方程

【摘要】：石英玻璃是典型的硬脆難加工材料,"緩進(jìn)給精磨成型—CO2激光修復(fù)表面磨削裂紋—塑性域超精密磨削"的工藝流程可以大幅度縮短大口徑非球面石英玻璃透鏡的生產(chǎn)周期。采用CO2激光輻照石英玻璃表面可以消除石英玻璃表面的磨削裂紋,但會(huì)在石英玻璃表面產(chǎn)生殘余拉應(yīng)力。本研究以降低裂紋修復(fù)后的表面粗糙度和消除殘余應(yīng)力為目標(biāo),研究了石英玻璃表面磨削裂紋的激光修復(fù)工藝和修復(fù)后石英玻璃的低溫加熱去應(yīng)力工藝。本研究構(gòu)建了激光修復(fù)實(shí)驗(yàn)平臺(tái),該平臺(tái)由激光光源和光路、三維運(yùn)動(dòng)平臺(tái)、控制系統(tǒng)三部分組成。利用該實(shí)驗(yàn)平臺(tái)成功進(jìn)行了石英玻璃表面磨削裂紋的激光修復(fù)實(shí)驗(yàn),結(jié)果表明,在本激光修復(fù)工藝條件下玻璃亞表面不會(huì)產(chǎn)生微裂紋;闡釋了石英玻璃表面磨削裂紋的愈合機(jī)理。建立了激光修復(fù)石英玻璃溫度場(chǎng)有限元模型,分析了激光修復(fù)工藝參數(shù)對(duì)修復(fù)過(guò)程中玻璃溫度場(chǎng)的影響。結(jié)果表明,能修復(fù)石英玻璃表面磨削裂紋的工藝參數(shù)均能使石英玻璃表面溫度處于2050K～2350K之間。研究了激光修復(fù)工藝參數(shù)對(duì)表面粗糙度的影響。結(jié)果表明,修復(fù)后表面粗糙度隨著激光功率的增大先降低后增大,過(guò)大的功率會(huì)造成玻璃表面燒蝕;修復(fù)后表面粗糙度隨著激光光斑直徑的增大而降低;修復(fù)后表面粗糙度隨著掃描間隔的減小而降低;在0.05m/s～0.2m/s范圍內(nèi),激光掃描速度對(duì)修復(fù)后表面粗糙度影響很小。研究了激光修復(fù)石英玻璃過(guò)程中殘余應(yīng)力的產(chǎn)生原因和修復(fù)后石英玻璃表面的激光加熱去應(yīng)力工藝。確定了石英玻璃的粘彈性本構(gòu)方程,建立了修復(fù)后的石英玻璃表面殘余應(yīng)力的有限元模型,獲得了殘余應(yīng)力的分布規(guī)律;實(shí)驗(yàn)驗(yàn)證了有限元模型的正確性。揭示了激光修復(fù)后石英玻璃表面殘余應(yīng)力的產(chǎn)生原因是在石英玻璃轉(zhuǎn)變溫度范圍內(nèi)激光輻照引起了熱應(yīng)力的應(yīng)力松弛。實(shí)驗(yàn)研究了激光修復(fù)工藝參數(shù)對(duì)殘余應(yīng)力的影響規(guī)律,殘余應(yīng)力隨著激光光斑直徑的增大而減小,隨著掃描速度的減小而減小。提出了采用較大光斑直徑、較小激光功率、較低掃描速度的激光加熱去應(yīng)力工藝,降低了激光修復(fù)過(guò)程產(chǎn)生的殘余應(yīng)力。對(duì)比實(shí)驗(yàn)結(jié)果和有限元分析結(jié)果表明,該去應(yīng)力工藝能顯著降低修復(fù)后石英玻璃的殘余應(yīng)力。研究了激光修復(fù)后石英玻璃的電熱低溫加熱去應(yīng)力工藝,對(duì)低溫加熱去應(yīng)力工藝進(jìn)行了有限元分析。結(jié)果表明,在800℃下保溫12小時(shí),然后以10℃/h速率降溫至740℃,可以基本消除石英玻璃中的殘余應(yīng)力,去應(yīng)力后石英玻璃的雙折射光程差降低至國(guó)家標(biāo)準(zhǔn)規(guī)定的應(yīng)力雙折射1級(jí)要求。提出了采用微波加熱作為低溫加熱去應(yīng)力工藝的加熱方式,研究了高溫下微波加熱介質(zhì)(SiC粉)對(duì)石英玻璃表面的元素污染,結(jié)果表明高溫下微波加熱介質(zhì)會(huì)侵入石英玻璃表面,侵入深度小于0.3μm,可通過(guò)后續(xù)磨削和拋光去除。
[Abstract]:Quartz glass is a typical hard brittle materials, the grinding process of creep feed molding CO2 laser repair grinding surface crack - plastic region of ultra precision grinding "can greatly shorten the aspheric lens of the quartz glass production cycle. By CO2 laser irradiation of quartz glass surface can eliminate grinding crack on the surface of quartz glass, but will produce residual tensile stress in the quartz glass surface. This research is to reduce the surface roughness after crack repair and removing residual stress as the goal, the low temperature heating quartz glass was studied by laser repairing technology and the crack surface of quartz glass grinding after the stress process. This study established a laser repair experiment the platform, the platform is composed of a laser source and a light path, three-dimensional motion platform control system is composed of three parts. The success of the crack surface of quartz glass grinding induced by using the experimental platform The experimental results show that light repair, in the laser repair process conditions of glass sub surface does not produce micro cracks; explains the mechanism of grinding surface of quartz glass crack healing. The laser repair of quartz glass temperature field finite element model, analyzes the influence of the laser repair process parameters on the glass temperature field in the process of repairing. The results showed that the process parameters can repair the crack surface grinding of quartz glass can make the surface temperature of quartz glass at 2050K ~ 2350K. The research of laser repair process parameters on surface roughness. The results showed that after the restoration of surface roughness increases with the laser power increases and then decreases too much power will cause the glass surface ablation; after the restoration of surface roughness increases with laser spot diameter decreased; after the restoration of surface roughness decreases with scan interval decreased from 0.05m/s to 0.2m/s; Within the range of laser scanning speed on the repair of surface roughness has little effect on the residual stress. The laser repair of quartz glass produced during laser heating of quartz glass surface causes and repair after the stress process. The viscoelastic constitutive equation of quartz glass, a finite element residual quartz glass surface repair the stress model, the distribution rules of residual stress; the finite element model is verified. Reveals the reasons of residual stress of quartz glass surface laser repaired in quartz glass transition temperature range of laser irradiation caused the thermal stress and stress relaxation. The experimental study on the effect of of laser repair process parameters on the residual stress and the residual stress decreases with the increase of laser spot diameter, and decreases with the decrease of scanning speed. The larger diameter than. Small laser power, laser heating and low scanning speed to reduce the residual stress process, laser repair process stress. Experimental results show that with the results of finite element analysis, the stress process can significantly reduce the residual stress of quartz glass after repair. Electric heating low temperature heating quartz glass laser repair after the stress process, the low-temperature heating stress process are analyzed by finite element method. The results show that the heat for 12 hours at 800 DEG C, and then to 10 DEG /h to 740 DEG C cooling rate, can eliminate the residual stress in the quartz glass, to stress birefringence optical path difference reduced quartz glass to the national standard stress birefringence in class 1. Proposed the use of microwave heating as a low temperature heating heating process should be to force, of high temperature microwave heating medium (SiC powder) on the quartz glass surface element pollution,. The results show that the microwave heating medium will invade the surface of quartz glass at high temperature, and the penetration depth is less than 0.3 mu m, which can be removed by subsequent grinding and polishing.

【學(xué)位授予單位】：山東大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類(lèi)號(hào)】：TQ171.731

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