【摘要】：Ni基和Co基合金是常用的軟磁薄膜,被廣泛應(yīng)用于無線電領(lǐng)域、傳感器和磁記錄頭等。其中,Ni基合金的特點是具有高的起始磁導(dǎo)率和低的矯頑力；而Co基合金的特點是具有高的飽和磁化強度,高的各向異性常數(shù)、高居里溫度和高電阻率。純的金屬合金材料,如：FeNi、FeCo等合金在空氣中容易氧化不易保持它們的磁性能,所以在工業(yè)中的應(yīng)用受到限制。而在合金材料中摻入一些非金屬元素,如：B、P等元素不僅可以提高薄膜的抗氧化性,而且可以細(xì)化晶粒,提高薄膜的軟磁性能。 常用的制備軟磁薄膜的方法有很多,比如物理氣相沉積、電化學(xué)沉積和化學(xué)鍍等,其中化學(xué)鍍方法的優(yōu)點在于對襯底的要求低、沉積薄膜的附著力和平整度較好、工藝成本低,所以適合大規(guī)模的工業(yè)化生產(chǎn)。本論文中,我們利用化學(xué)鍍的方法成功制備了軟磁性能優(yōu)良的Ni-P合金、Ni-Co-P合金和Ni-Co-Fe-P合金,并嘗試用激光誘導(dǎo)薄膜的面內(nèi)各向異性。我們用X射線衍射、掃描電子顯微鏡、原子力顯微鏡、振動樣品磁強計等手段對樣品的結(jié)構(gòu)、形貌和磁性進行了研究,考察了施鍍時間、還原劑濃度、金屬離子比對樣品的結(jié)構(gòu)、形貌和磁性的影響。本文的主要工作有以下幾個方面： (1)系統(tǒng)地研究了施鍍時間、還原劑濃度對Ni-P薄膜晶體結(jié)構(gòu)、薄膜成分、靜態(tài)磁性的影響；研究了鍍液中金屬離子比例對Ni-Co-P薄膜的晶體結(jié)構(gòu)、薄膜成分和靜態(tài)磁性的影響；同時,嘗試制備了Ni-Co-Fe-P薄膜。 (2)研究了快速真空磁場熱處理對Ni-P薄膜的晶體結(jié)構(gòu)和磁性能的影響。(3)用激光刻線的方法在Ni-P薄膜和Ni-Co-P薄膜內(nèi)成功誘導(dǎo)出了面內(nèi)各向異性場,獲得了雙各向異性薄膜。最后研究了激光參數(shù)對Ni-Co-P薄膜面內(nèi)各向異性場的影響,得到了在較大范圍內(nèi)有效調(diào)控軟磁薄膜面內(nèi)各向異性場的方法。
[Abstract]:Ni-based and Co-based alloys are commonly used in soft magnetic thin films, which are widely used in radio fields, sensors and magnetic recording heads. Among them, Ni based alloy is characterized by high initial permeability and low coercive force, while Co based alloy is characterized by high saturation magnetization, high anisotropy constant, high Curie temperature and high resistance. Pure metal alloy materials, such as FeNi,FeCo, are easy to oxidize and not easy to maintain their magnetic properties in air, so their application in industry is limited. The addition of some non-metallic elements, such as B, P and other elements, can not only improve the oxidation resistance of the films, but also refine the grains and improve the soft magnetic properties of the films. There are many commonly used methods to prepare soft magnetic thin films, such as physical vapor deposition, electrochemical deposition and Electroless plating, among which the advantages of Electroless plating are that the substrate requirements are low, the adhesion and smoothness of the deposited films are good, and the process cost is low, so it is suitable for large-scale industrial production. In this paper, Ni-P alloy, Ni-Co-P alloy and Ni-Co-Fe-P alloy with excellent soft magnetic properties were successfully prepared by chemical plating, and the in-plane anisotropy of the film was induced by laser. The structure, morphology and magnetism of the samples were studied by means of X-ray diffraction, scanning electron microscope, atomic force microscope and vibrating sample magnetometer. The effects of plating time, reductant concentration and metal ion ratio on the structure, morphology and magnetism of the samples were investigated. The main work of this paper is as follows: (1) the effects of plating time and reductant concentration on the crystal structure, film composition and static magnetic properties of Ni-P thin films were studied systematically; the effects of metal ion ratio in plating solution on the crystal structure, film composition and static magnetic properties of Ni-Co-P thin films were studied; at the same time, Ni-Co-Fe-P thin films were prepared. (2) the effect of rapid vacuum magnetic field heat treatment on the crystal structure and magnetic properties of Ni-P thin films was studied. (3) the in-plane anisotropy field was successfully induced in Ni-P thin films and Ni-Co-P thin films by laser lithography, and the bianisotropy thin films were obtained. Finally, the effect of laser parameters on the in-plane anisotropy field of Ni-Co-P thin films is studied, and the method of effectively regulating the in-plane anisotropy field of soft magnetic thin films in a wide range is obtained.
【學(xué)位授予單位】：蘭州大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2011
【分類號】：O484.43

【參考文獻】

相關(guān)期刊論文 前4條

1 孫榆芳，楊德釣，孫冬柏，，師玉英;絡(luò)合劑對Ni－P化學(xué)鍍層耐蝕性的影響[J];北京科技大學(xué)學(xué)報;1994年S1期

2 周上祺,陳青,任勤;化學(xué)鍍Ni-P合金鍍層的微觀結(jié)構(gòu)[J];材料保護;2001年02期

3 卑多慧,宣天鵬,黃新民;化學(xué)鍍Co-Ni-P薄膜的組織結(jié)構(gòu)和生長機理研究[J];材料保護;1999年03期

4 宣天鵬,鄭曉華,劉玉,鄧宗鋼;鎳鈷離子濃度比對化學(xué)鍍Co-Ni-P合金組織結(jié)構(gòu)和性能的影響[J];稀有金屬;1998年02期

本文編號：2506355