本文選題：L10相FePt + 電沉積　； 參考：《蘭州理工大學(xué)》2011年碩士論文

【摘要】：本文利用脈沖電沉積法,以FeSO_4·7H_2O和H_2PtCl_6·6H_2O作為Fe~(2+)源和Pt~(4+)源,無水N_a2SO_4為導(dǎo)電鹽,溶劑為二次去離子水,分別制備出了FePt共沉積薄膜和Fe/Pt多層膜。利用x射線衍射儀(XRD)、掃描電子顯微鏡(SEM)、能譜(EDX)和振動樣品磁強(qiáng)計(jì)(VSM)對熱處理前后的FePt共沉積薄膜和Fe/Pt多層膜微觀形貌和磁性能進(jìn)行了表征。主要研究內(nèi)容如下: (1)以純Cu片為基體,在沉積電位在-1V到-6V之間變化的情況下,制備出了FePt共沉積薄膜。電位變的越負(fù),共沉積薄膜中Fe的含量增加,同時Pt的含量相對減少,在-4.7V時制備出了Fe/Pt原子比接近于1:1的共沉積薄膜,而且,從薄膜的表面形貌可知,薄膜的表面顆粒大小與沉積電位有關(guān)。-4.7V時的共沉積薄膜表面顆粒較為均勻致密,薄膜表面平整,但薄膜中的O含量也達(dá)到最大值,而富Fe的薄膜與富Pt的薄膜中的O含量都很少。將沉積電位-4.7V的FePt共沉積薄膜在550℃氫氣氣氛中熱處理30分鐘后,VSM測試結(jié)果表明,矯頑力從2.19kA/m增加到了12.5kA/m,飽和磁化強(qiáng)度由408.6kA/m增大到465.3kA/m。 (2)由制備FePt共沉積薄膜的結(jié)果可知,富Fe層沉積電位選擇-4V,-5V,-6V,富Pt層沉積電位選擇-2V,-3V,-4V,然后使富Fe層和富Pt層交替沉積制備出Fe/Pt多層膜。本文研究了沉積電位,沉積時間,沉積基體等Fe/Pt多層膜制備中的影響因素。結(jié)果表明:在固定富Pt層沉積電位,只變換富Fe層沉積電位或固定富Fe層沉積電位,只變換富Pt層沉積電位時,由于電流密度的不同,薄膜的表面形貌都有較明顯的差別。組分上顯示出一定的規(guī)律性,對組分較理想的Fe/Pt多層膜在550°C純氫氣氣氛中熱處理30min,發(fā)現(xiàn)薄膜中的O被還原,主要成分Fe和Pt的含量都有不同程度的增加,表面顆粒長大,矯頑力與飽和磁化強(qiáng)度都大幅提高。 固定沉積電位,SEM斷層顯示Fe/Pt多層膜(t-2V=12min,t-6V=8min,循環(huán)2周期)有清晰的層狀結(jié)構(gòu),對比其他沉積時間所得的薄膜,該Fe/Pt多層膜表面顆粒較細(xì)小,表面致密。以導(dǎo)電玻璃與純Cu片做基體的對比中看出,薄膜在導(dǎo)電玻璃上的附著力較差,薄膜不致密。
[Abstract]:In this paper, FePt co-deposited thin films and Fe- / Pt multilayers were prepared by using FeSOS _ 47H _ 2O and H _ 2PtCl _ 6H _ 2O as Fe2 and Pt4 sources, anhydrous Na-2SO4 as conducting salt and solvent as secondary deionized water, respectively. X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive spectroscopy (edX) and vibrating sample magnetometer (VSM) were used to characterize the microstructure and magnetic properties of FePt co-deposited films and Fe / Pt multilayers before and after heat treatment. The main contents are as follows: (1) FePt co-deposited thin films were prepared by using pure Cu as substrate and the deposition potential varied from -1V to -6V. The more negative the potential, the higher the Fe content in co-deposited films, and the lower the Pt content. At -4.7 V, the co-deposited films with Fe / Pt atomic ratio approaching 1:1 were prepared, and the surface morphology of the films was shown. The surface particle size of the films is related to the deposition potential. The surface particles of the codeposited films are uniform and compact, but the O content in the films is also the maximum. However, Fe rich thin films and Pt rich thin films have very little O content. The results of VSM measurements of FePt codeposited films with a deposition potential of -4.7V in 550 鈩，

本文編號：2054454