本文選題：絲網(wǎng)印刷 + 厚膜　； 參考：《電子科技大學(xué)》2010年碩士論文

【摘要】： 鋯鈦酸鉛(PbZrTiO3,簡稱PZT)材料具有優(yōu)異的鐵電、壓電、熱釋電性能,被廣泛用于制造各種傳感器、換能器與驅(qū)動器。為了滿足大功率激光器和靈巧彈藥等對紅外探測器頻率響應(yīng)高、敏感元面積大的使用要求,本論文開展了PZT厚膜材料和單元紅外探測器的研究。 在PZT厚膜材料研究方面:為提高厚膜的印刷質(zhì)量,對絲網(wǎng)印刷漿料的有機載體配方、粉體載體比例、球磨工序等工藝進行了研究,制備出了具備良好穩(wěn)定性、均勻性與流變特性的厚膜漿料。通過對厚膜形貌、微觀結(jié)構(gòu)、介電與熱釋電性能的分析與測試,優(yōu)化了厚膜的燒結(jié)與極化工藝。在最優(yōu)工藝條件下制備的厚膜為單一的鈣鈦礦結(jié)構(gòu),居里溫度425℃,常溫1kHz下的相對介電常數(shù)與損耗角正切分別為85.46與0.01584,熱釋電系數(shù)為9.14×10~(-9)C/cm~2·K。 研究了厚膜在燒結(jié)過程中的致密化問題,分析了“骨架結(jié)構(gòu)”對厚膜致密度的影響,提出并驗證了一定程度的孔隙率對材料紅外探測性能的提高具有積極作用。 在PZT厚膜紅外探測器方面:初步研究了激光刻蝕制作熱釋電單元探測器的工藝。探測器面積5×5mm~2,在黑體溫度500K、斬波器頻率8.5Hz~2217Hz的范圍內(nèi),測量了器件的電壓響應(yīng)與噪聲,計算出探測率為3.4×10~7~1.7×10~8 cmHz~(1/2)W~(-1),工作帶寬為1.2kHz,性能優(yōu)良,可滿足應(yīng)用要求。
[Abstract]:Lead zirconate titanate PbZrTiO3 (PZT3) has excellent ferroelectric, piezoelectric and pyroelectric properties, and has been widely used in the manufacture of various sensors, transducers and actuators. In order to meet the requirements of high power laser and smart ammunition for high frequency response of infrared detector and large area of sensitive element, the research of PZT thick film material and unit infrared detector has been carried out in this paper. In the aspect of PZT thick film material research: in order to improve the printing quality of thick film, the organic carrier formula, powder carrier ratio and ball milling process of screen printing paste were studied, and good stability was obtained. Homogeneity and rheological properties of thick film slurry. The sintering and polarization process of thick film was optimized by analyzing and testing the morphology, microstructure, dielectric and pyroelectric properties of thick film. Under the optimum conditions, the thick film is of a single perovskite structure, Curie temperature is 425 鈩，

本文編號：1936254