本文選題：AZO靶材　切入點(diǎn)：溶膠-凝膠法　出處：《西華大學(xué)》2011年碩士論文

【摘要】：AZO(摻鋁氧化鋅,Al-ZnO)靶材質(zhì)量是影響濺射法制備薄膜的關(guān)鍵因素之一。AZO靶材主要制備工藝有常壓燒結(jié)、熱等靜壓燒結(jié)及真空燒結(jié)等。熱等靜壓燒結(jié)、真空燒結(jié)兩種工藝制備出的靶材性能較好,但靶材形狀及尺寸受限且工藝復(fù)雜、生產(chǎn)成本高、效率低。采用溶膠-凝膠工藝有利于得到成分均勻、顆粒形態(tài)和粒徑等可控的摻鋁氧化鋅復(fù)合粉體,并可采用無機(jī)鹽作為原料以降低成本,因此有較高的推廣應(yīng)用價(jià)值。 本文采用溶膠-凝膠法合成了摻鋁氧化鋅復(fù)合粉體,用常壓燒結(jié)制備出電阻率較低、致密度較高的AZO靶材。研究了絡(luò)合劑種類及用量、反應(yīng)溫度、pH值、干燥溫度等因素對粉體形態(tài)及靶材性能的影響,分析了球磨及燒結(jié)制度對靶材微觀組織的作用,與固相反應(yīng)法制備的靶材進(jìn)行了對比。結(jié)果表明,控制溶膠-凝膠的制備工藝參數(shù)可以得到燒結(jié)性能良好的粉體,濕法球磨能減少粉體團(tuán)聚,提高靶材密度;隨成型壓力提高靶材致密度先升后降,電阻率變化則相反;增加燒結(jié)保溫時(shí)間,晶粒尺寸變大,致密度提高緩慢,電阻率變化較小;采用2MPa成型壓力,在1250℃燒結(jié)1h,可以得到致密度達(dá)99.2 %,電阻率約2×10~(-2)Ω·cm的靶材。
[Abstract]:The quality of AZO (aluminum-doped zinc oxide Al-ZnO) target is one of the key factors affecting the preparation of thin films by sputtering. The main preparation processes of AZO target are normal pressure sintering, hot isostatic pressure sintering and vacuum sintering. The targets prepared by vacuum sintering process have good properties, but the shape and size of the targets are limited, the process is complex, the production cost is high, and the efficiency is low. The aluminum doped zinc oxide composite powder with controllable particle shape and particle size can be used as raw material to reduce the cost, so it has a high value of popularization and application. In this paper, Al-doped zinc oxide composite powders were synthesized by sol-gel method. AZO targets with low resistivity and high density were prepared by normal pressure sintering. The kinds and dosage of complex agents, reaction temperature and pH value were studied. The effects of drying temperature and other factors on the morphology and properties of the targets were analyzed. The effects of ball milling and sintering on the microstructure of the targets were analyzed and compared with the targets prepared by solid state reaction. The powder with good sintering performance can be obtained by controlling the preparation process parameters of sol-gel. Wet ball milling can reduce the agglomeration of the powder and increase the density of the target, and the density of the target increases first and then decreases with the increase of molding pressure, but the change of resistivity is opposite. When the sintering time is increased, the grain size becomes larger, the density increases slowly, and the resistivity change is small. The target with density of 99.2 and resistivity of about 2 脳 10 ~ (-2) 惟 cm can be obtained by sintering at 1250 鈩，

本文編號(hào)：1655421