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注漿成形法制備熔融石英陶瓷的研究

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  本文選題:石英陶瓷 切入點:注漿成形 出處:《華南理工大學》2010年碩士論文 論文類型:學位論文


【摘要】: 太陽能作為開發(fā)前景最好的綠色能源被世界各國重視和大力推廣,導致用于太陽能轉換的多晶硅的用量急劇增加。石英陶瓷由于不會與硅發(fā)生化學反應,且具備低熱膨脹系數(shù)、低熱導率和優(yōu)異的熱穩(wěn)定性而被應用于生產(chǎn)多晶硅的坩堝,為了適應多晶硅片的規(guī)格不斷增大的需求,石英陶瓷坩堝的尺寸必須隨之增大,從而對石英陶瓷的制造技術提出了更高的要求。 注漿成形是石英陶瓷坩堝常用的成形方法之一,具有低成本和低污染等優(yōu)點。但是生坯強度低制約了大尺寸石英陶瓷坩堝的發(fā)展。本文研究了球磨、pH值、分散劑和固相含量對石英陶瓷漿體的影響,通過優(yōu)化工藝參數(shù),制備出適合注漿成形的高固含量和低粘度的穩(wěn)定石英漿體。并且通過二次加料球磨,調(diào)整漿料的顆粒級配提高石英陶瓷生坯強度。 研究表明,采用乳酸為分散劑,其加入量為0.1-0.5 wt%,熔融石英固含量為63 vol%時,以一定顆粒級配的瑪瑙球為研磨介質球磨5 h后,再攪拌24 h,制備的石英漿體粘度為114mPa.S,符合注漿成形的要求。通過調(diào)整漿體的顆粒級配,使顆粒之間能夠形成有效緊密堆積,是非常有效提高坯體強度的方法。本課題通過混合兩種不同粒徑的石英顆粒來調(diào)整顆粒分布,粗細顆粒中位徑比為8.3,當粗細顆;旌媳葹80:20時,體系達到最緊密堆積,生坯強度提高1倍,解決了注漿成形生坯強度低的問題。同時研究也發(fā)現(xiàn)Funk-Dinger理想顆粒函數(shù)能夠很好地反映顆粒間的堆積緊密程度。 此外,本研究發(fā)現(xiàn)攪拌有利于降低漿體粘度,這與攪拌能夠促進顆粒表面電位的生成有關。并且同時提出了乳酸穩(wěn)定石英漿體的機理,紅外光譜分析表明二氧化硅顆粒表面存在一定量的羥基,石英漿體對乳酸的吸附是由于氫鍵的作用,顆粒表面的羥基與乳酸分子中羧基中的氫離子形成氫鍵,從而吸附乳酸分子在二氧化硅顆粒表面周圍,乳酸的另一端分子鏈之間產(chǎn)生的空間位阻作用使石英漿體穩(wěn)定。
[Abstract]:Solar energy, as the most promising green energy, has been paid more attention to and popularized all over the world, resulting in a sharp increase in the amount of polysilicon used for solar energy conversion. Quartz ceramics have low thermal expansion coefficient because they do not react with silicon. Low thermal conductivity and excellent thermal stability are used to produce polysilicon crucible. In order to meet the increasing size of polysilicon wafer, the size of quartz ceramic crucible must be increased. Therefore, a higher requirement is put forward for the manufacture technology of quartz ceramics. Slurry forming is one of the common forming methods for quartz ceramic crucible, which has the advantages of low cost and low pollution. However, low green strength restricts the development of large size quartz ceramic crucible. The effect of dispersant and solid content on quartz ceramic slurry was studied. Stable quartz slurry with high solid content and low viscosity was prepared by optimizing process parameters. Adjust the particle gradation of slurry to improve the strength of quartz ceramic blank. The results showed that when lactic acid was used as dispersant, the amount of lactic acid was 0.1-0.5 wt and the content of fused quartz was 63 volg%, agate ball with certain particle size was used as grinding medium for 5 h. After stirring for 24 h, the viscosity of the prepared quartz paste is 114 MPA. The viscosity of the slurry meets the requirements of grouting forming. By adjusting the particle gradation of the slurry, it is possible to form an effective tight packing between the particles. It is a very effective method to improve the strength of the billet. In this paper, the particle distribution is adjusted by mixing two kinds of quartz particles of different sizes. The median diameter ratio of the coarse and fine particles is 8.3, and when the mixing ratio of the coarse and fine particles is 80: 20, the system achieves the closest stacking. The strength of green billet is increased by 1 times, which solves the problem of low strength of blank formed by grouting. It is also found that the ideal particle function of Funk-Dinger can well reflect the compactness between particles. In addition, it is found that stirring can reduce the viscosity of slurry, which is related to the formation of potential on the surface of particles, and the mechanism of stabilizing quartz paste with lactic acid is also proposed. Infrared spectrum analysis shows that there is a certain amount of hydroxyl groups on the surface of silica particles. The adsorption of lactic acid by quartz paste is due to the action of hydrogen bonds. The hydroxyl groups on the surface of silica particles form hydrogen bonds with hydrogen ions in the carboxyl groups of lactic acid molecules. Thus the adsorption of lactic acid molecules around the surface of silica particles, the other end of the molecular chain of lactic acid between the formation of steric blocking action to stabilize the quartz slurry.
【學位授予單位】:華南理工大學
【學位級別】:碩士
【學位授予年份】:2010
【分類號】:TQ174

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