發(fā)布時(shí)間：2018-02-01 11:43

  本文關(guān)鍵詞： 碳納米管 場發(fā)射 電泳 冷陰極　出處：《電子科技大學(xué)》2011年碩士論文　論文類型：學(xué)位論文

【摘要】：平板顯示器是電視,電腦,手機(jī)以及一些移動(dòng)終端的一個(gè)非常重要的部件。而當(dāng)前平板顯示器主要為LCD和LED,但他們的性能跟CRT還有差距,而隨著真空微電子學(xué)的發(fā)展,FED(場發(fā)射平面顯示器)的已經(jīng)成功研制,并在性能上有明顯的優(yōu)勢,但工藝復(fù)雜,生產(chǎn)成本過高,還未大規(guī)模應(yīng)用。1991碳納米管被發(fā)現(xiàn),因其具有良好的導(dǎo)電性,較大的長徑比,高的機(jī)械強(qiáng)度,穩(wěn)定的化學(xué)性質(zhì),從而表現(xiàn)出良好的場發(fā)射性能,而熱CVD(化學(xué)氣相沉積)法實(shí)現(xiàn)了碳納米管的大規(guī)模制備,使得碳納米管成為FED陰極一個(gè)非常好的選擇。因而本文一個(gè)主要的研究內(nèi)容就是: 通過電泳的方法來制備FED用碳納米管薄膜冷陰極,并通過對(duì)工藝條件的對(duì)比實(shí)驗(yàn)來優(yōu)化電泳實(shí)驗(yàn)中電泳液配比,沉積基底,電泳電壓,電泳時(shí)間等重要參數(shù),來實(shí)現(xiàn)電泳沉積的薄膜一個(gè)相對(duì)較好的場發(fā)射性能。在優(yōu)化結(jié)果條件下沉積多壁碳納米管薄膜的閾值場為3.4v/um,最大電流密度為2mA/cm2,是能夠滿足FED對(duì)電流密度的要求的。 為了進(jìn)一步提高沉積碳納米管薄膜的場發(fā)射性能,我們對(duì)沉積的碳納米管薄膜進(jìn)行了退火處理,電流處理,等離子體處理等后處理實(shí)驗(yàn),并對(duì)處理前后的薄膜做了場發(fā)射對(duì)比實(shí)驗(yàn),結(jié)果表明三種方法都在一定程度上降低了開啟場,閾值場,提高了碳納米管薄膜的場發(fā)射性能。 相對(duì)于直接生長法和絲網(wǎng)印刷法制備碳納米管薄膜,電泳法的一個(gè)優(yōu)點(diǎn)就是可以很輕松地在曲面上實(shí)現(xiàn)電泳沉積。因此,我們可以通過電泳沉積碳納米管在柱面上,制備曲面型的碳納米管冷陰極,將可以應(yīng)用于曲面顯示設(shè)備和熒光燈上。 當(dāng)前磁控管啟動(dòng)慢,陰極熱損耗較大的缺點(diǎn),冷陰極磁控管將可以克服這兩個(gè)缺點(diǎn),而磁控管陰極工作時(shí)電子是從其圓柱側(cè)面發(fā)射的,如果制備圓柱面結(jié)構(gòu)的場發(fā)射陰極將有可能實(shí)現(xiàn)冷陰極的磁控管。而本文的一個(gè)研究點(diǎn)就是: 在圓柱面上電泳沉積碳納米管薄膜,將能應(yīng)用于曲面的顯示設(shè)備和熒光燈上,也有可能作為磁控管的冷陰極。而為了利用到磁控管陰極的二次電子,便對(duì)碳納米管電泳沉積在磁控管陰極進(jìn)行了研究。
[Abstract]:Flat panel displays are a very important component of televisions, computers, mobile phones, and some mobile devices. Currently, flat panel displays are mainly LCD and LEDs, but their performance still lags behind the CRT. With the development of vacuum microelectronics, FED( Field Emission plane display) has been successfully developed, and has obvious advantages in performance, but the process is complex and the production cost is too high. No large-scale application of .1991 carbon nanotubes has been found, because of its good electrical conductivity, large aspect ratio, high mechanical strength, stable chemical properties, thus showing good field emission performance. Thermal CVD (Chemical Vapor deposition) method has realized the large-scale preparation of carbon nanotubes, which makes carbon nanotubes become a very good choice for FED cathode. Therefore, one of the main research contents of this paper is: The carbon nanotube thin film cold cathode for FED was prepared by electrophoretic method, and the electrophoretic solution ratio, deposition substrate and electrophoretic voltage were optimized by contrast experiment. Electrophoretic time and other important parameters to achieve the electrophoretic deposition of the film a relatively good field emission performance. Under the optimized conditions the threshold field of multi-walled carbon nanotube film deposition is 3.4 v / um. The maximum current density is 2 Ma / cm 2, which can meet the requirements of FED for current density. In order to further improve the field emission performance of deposited carbon nanotube films, we have carried out annealing, current treatment, plasma treatment and other post-treatment experiments. The results show that the three methods reduce the open field and threshold field to a certain extent and improve the field emission performance of carbon nanotube films. Compared with direct growth method and screen printing method, one of the advantages of electrophoretic method is that electrophoretic deposition on the surface can be easily realized. We can prepare curved carbon nanotubes cold cathode by electrophoretic deposition of carbon nanotubes on the cylinder, which can be used in curved surface display devices and fluorescent lamps. At present, the magnetron starts slowly and the cathode heat loss is large. The cold cathode magnetron can overcome these two shortcomings, and the electrons are emitted from the cylindrical side when the magnetron cathode works. If the field emission cathode with cylindrical structure is prepared, it will be possible to realize the magnetron of the cold cathode. Electrophoretic deposition of carbon nanotube films on a cylindrical surface will be used in curved display devices and fluorescent lamps, and may also be used as a cold cathode of magnetron, and in order to make use of secondary electrons of magnetron cathode. The electrophoretic deposition of carbon nanotubes on magnetron cathode was studied.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2011
【分類號(hào)】：TB383.1

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