本文設(shè)計(jì)并制作了一款用帶狀納米材料修飾的基于微波帶阻濾波器的超高速、高靈敏度濕度傳感器。應(yīng)用所設(shè)計(jì)的交指電容,在2 GHz到12 GHz的頻段內(nèi)確定了兩個(gè)水蒸汽敏感檢測(cè)頻率。優(yōu)化后的雙頻段微帶帶阻濾波器獲得了更高的響應(yīng)和更好的品質(zhì)因數(shù),提高了濕度傳感器靈敏度。為了研究微波濕度傳感器的性能,將修飾了氧化鉬敏感材料的傳感元件置于濕度測(cè)試腔中,在室溫環(huán)境下實(shí)現(xiàn)了對(duì)五個(gè)濕度等級(jí)的測(cè)試。測(cè)量結(jié)果表明,插入損耗從10%RH到90%RH的濕度水平呈線性變化,其7.3 GHz和9.1 GHz雙頻段的靈敏度分別為0.022 dB/%RH和0.069 dB/%RH。此外,濕度傳感器對(duì)兩個(gè)敏感頻率的檢測(cè)靈敏度分別為2.06MHz/%RH和2.08 MHz/%RH。并且反應(yīng)恢復(fù)時(shí)間小于5 s,濕度滯后特性小于0.25%RH。本論文還從分子極化的角度探討了微波濕敏傳感的機(jī)理。這為實(shí)現(xiàn)高靈敏度、快速響應(yīng)的微波濕度傳感器提供了一種簡(jiǎn)便易行的方法。 

【文章來(lái)源】：哈爾濱工業(yè)大學(xué)黑龍江省 211工程院校 985工程院校

【文章頁(yè)數(shù)】：79 頁(yè)

【學(xué)位級(jí)別】：碩士

【文章目錄】：
Abstract
摘要
Chapter1 Introduction of Humidity Sensor
    1.1 Introduction
    1.2 Humidity Sensor Research Background
    1.3 Humidity Sensor Basics
    1.4 Humidity Sensors Classification and Applications
        1.4.1 Capacitive Humidity Sensor
        1.4.2 Fiber-optic Humidity Sensor
        1.4.3 Piezoresistive Humidity Sensor
        1.4.4 Microwave Humidity Sensor
    1.5 Significance and Aim
Chapter2 Selection of Humidity Sensitive Frequency
    2.1 Selection Strategies of Humidity Sensitive Frequency
    2.2 Design Optimization and Preparation of Interdigital Capacitor Structure
        2.2.1 Optimization of Microstrip Circuit for Interdigital Capacitor
        2.2.2 Preparation of the Designed Interdigital Capacitor
    2.3 Results and Analysis of Humidity Sensitive Frequency
        2.3.1 Measurement Results
        2.3.2 Analysis and Discussion
    2.4 Summary of This Chapter
Chapter3 Selection and Preparation of Humidity Sensitive Material
    3.1 Introduction and Selection of Humidity Sensitive Material
    3.2 Preparation of Flake Molybdenum Trioxide
    3.3 Fabrication Process Characterization of the Prepared Humidity Sensitive Material
    3.4 Summary of This Chapter
Chapter4 Open Loop Resonator-Based Microwave Type Humidity Sensor
    4.1 Introduction to Open-loop Resonator-Based Humidity Sensor
    4.2 Design of Open Loop Resonator-Based Humidity Sensor
        4.2.1 Single-band Microwave Type Humidity Sensor
        4.2.2 Dual-band Microwave Humidity Sensor
    4.3 PCB Fabrication Process
    4.4 Measurement Results and Analysis
        4.4.1 Results and Analysis of Single-band Humidity Sensor
        4.4.2 Results and Analysis of Dual-band Humidity Sensor
    4.5 Summary of This Chapter
Chapter5 Sensing Mechanism and Future Works
    5.1 The Applications for Microwave Humidity Sensor
    5.2 Future Perspectives
    5.3 Sensing Mechanism Analysis
Conclusion
References
Papers published in the period of Master education
Acknowledgements


【參考文獻(xiàn)】：
期刊論文
[1]電阻式濕度傳感器技術(shù)及相關(guān)專(zhuān)利分析[J]. 李玉林.  電子世界. 2017(08)
[2]基于MEMS工藝的壓阻式濕度傳感器的設(shè)計(jì)制作[J]. 孫慧明,張?bào)愣?吳劍,秦明,黃慶安.  傳感技術(shù)學(xué)報(bào). 2008(05)

博士論文
[1]汽輪機(jī)組微波諧振腔濕度測(cè)量方法實(shí)驗(yàn)研究[D]. 田松峰.華北電力大學(xué)（河北） 2009

碩士論文
[1]基于金屬硫化物的全光纖濕度傳感器[D]. 陳超英.暨南大學(xué) 2016



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