【摘要】：聲壓傳感器在軍事、醫(yī)療、農(nóng)業(yè)、工業(yè)、生活等各個(gè)方面都有廣泛的應(yīng)用。膜片式EFPI光纖聲壓傳感器由于具有結(jié)構(gòu)微型、制作簡(jiǎn)單、成本低廉、響應(yīng)迅速、對(duì)溫度不敏感等優(yōu)點(diǎn)而得到了關(guān)注。傳統(tǒng)膜片結(jié)構(gòu)中,通常采用平面結(jié)構(gòu),具有結(jié)構(gòu)簡(jiǎn)單、加工容易的優(yōu)勢(shì)。但存在動(dòng)態(tài)范圍小,改善性能空間有限等缺點(diǎn)。本課題主要研究在微型膜片式EFPI光纖聲壓傳感器的膜片上引入波紋結(jié)構(gòu)的MEMS加工方法,及波紋結(jié)構(gòu)對(duì)傳感器的性能的影響。本文詳細(xì)的分析了波紋膜片在不同初始應(yīng)力條件下的形變理論。根據(jù)理論分析結(jié)果可知,在不同的初始應(yīng)力條件下,波紋深度均是影響膜片機(jī)械性能的主要參數(shù)。對(duì)于沒有初始應(yīng)力的波紋膜片,其機(jī)械靈敏度隨著波紋深度的增加而減少;而對(duì)于有初始應(yīng)力的波紋膜片,其機(jī)械靈敏度隨著波紋深度的增加先增加后減少,然后趨于穩(wěn)定。提出了通過常用的光刻技術(shù)、反應(yīng)離子刻蝕技術(shù)、濺射技術(shù)、熱壓納米壓印技術(shù)實(shí)現(xiàn)將波紋結(jié)構(gòu)轉(zhuǎn)移到金屬膜片和PET膜片上的加工方法。同傳統(tǒng)的加工波紋結(jié)構(gòu)的方法相比,本課題采用的MEMS加工工藝更簡(jiǎn)單、制作周期短、節(jié)省材料并且靈活的控制波紋結(jié)構(gòu)參數(shù)。利用加工出的不同波紋深度的金屬膜片和PET膜片封裝得到波紋膜片式EFPI光纖聲壓傳感器。搭建了強(qiáng)度解調(diào)系統(tǒng)并對(duì)波紋膜片式EFPI光纖聲壓傳感器進(jìn)行空氣中和水中的聲學(xué)性能測(cè)試,從而分析了波紋結(jié)構(gòu)對(duì)傳感器性能的影響。測(cè)試結(jié)果表明,在膜片中引入波紋結(jié)構(gòu),對(duì)膜片式EFPI光纖聲壓傳感器的性能有一定改善。
[Abstract]:Sound pressure sensors are widely used in military, medical, agricultural, industrial, life and other aspects. Diaphragm EFPI optical fiber sound pressure sensor has attracted attention because of its advantages of micro structure, simple fabrication, low cost, rapid response and insensitivity to temperature. In the traditional diaphragm structure, the plane structure is usually used, which has the advantages of simple structure and easy processing. However, there are some shortcomings, such as small dynamic range, limited performance space and so on. In this paper, the MEMS processing method of introducing wavy structure into the diaphragm of micro diaphragm EFPI optical fiber sound pressure sensor is studied, and the influence of wavy structure on the performance of the sensor is also studied. In this paper, the deformation theory of wavy diaphragm under different initial stress conditions is analyzed in detail. According to the results of theoretical analysis, it can be seen that the depth of ripples is the main parameter affecting the mechanical properties of diaphragm under different initial stress conditions. For the wavy diaphragm without initial stress, the mechanical sensitivity decreases with the increase of wavy depth, while for the wavy diaphragm with initial stress, the mechanical sensitivity increases first and then decreases with the increase of wavy depth, and then tends to be stable. The processing method of transferring wavy structure to metal diaphragm and PET diaphragm by common lithography technology, reactive ion etch technology, sputter technology and hot pressing nano-imprinting technology is proposed. Compared with the traditional method of machining wavy structure, the MEMS processing technology used in this paper is simpler, the fabrication cycle is short, the material is saved and the parameters of wavy structure are controlled flexibly. The wavy diaphragm EFPI optical fiber sound pressure sensor was obtained by using the fabricated metal diaphragm and PET diaphragm with different depth of ripening. The intensity demodulation system is built and the acoustic performance of the wavy diaphragm EFPI optical fiber sound pressure sensor is tested in air and water, and the influence of the wavy structure on the performance of the sensor is analyzed. The test results show that the performance of the diaphragm EFPI optical fiber sound pressure sensor is improved by introducing the wavy structure into the diaphragm.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TP212

【參考文獻(xiàn)】

中國(guó)期刊全文數(shù)據(jù)庫 前10條

1 黃俊;文溢;姜飛;張長(zhǎng)勝;趙振剛;李川;;光纖F-P腔傳感器特性研究[J];傳感器與微系統(tǒng);2017年04期

2 陳露;朱佳利;李澤焱;王鳴;;波紋膜片式光纖法布里-珀羅壓力傳感器[J];光學(xué)學(xué)報(bào);2016年03期

3 劉彬;劉歡;林杰;金鵬;;銀薄膜結(jié)構(gòu)的高靈敏度Fabry-Perot光纖聲壓傳感器[J];哈爾濱工業(yè)大學(xué)學(xué)報(bào);2016年03期

4 鄭志霞;黃元慶;;基于F-P腔干涉的膜片式光纖微機(jī)電系統(tǒng)壓力傳感器[J];光子學(xué)報(bào);2012年12期

5 盧一鑫;楊璐娜;;光纖傳感器的應(yīng)用現(xiàn)狀及未來發(fā)展趨勢(shì)[J];科技信息;2011年03期

6 王巧云;于清旭;;Polymer diaphragm based sensitive fiber optic Fabry-Perot acoustic sensor[J];Chinese Optics Letters;2010年03期

7 舒福璋;;半導(dǎo)體硅片清洗工藝的發(fā)展研究[J];中國(guó)高新技術(shù)企業(yè);2007年12期

8 周宏,賴建軍,趙悅,柯才軍,張坤,易新建;SF_6/O_2/CHF_3混合氣體對(duì)硅材料的反應(yīng)離子刻蝕研究[J];半導(dǎo)體技術(shù);2005年06期

9 倪明,張仁和,倪明,胡永明,孟洲;關(guān)于光纖水聽器靈敏度的討論[J];應(yīng)用聲學(xué);2002年06期

10 鄒泉波，劉理天，，李志堅(jiān);紋膜結(jié)構(gòu)用于電容式硅微麥克風(fēng)的研究[J];半導(dǎo)體學(xué)報(bào);1996年12期

中國(guó)博士學(xué)位論文全文數(shù)據(jù)庫 前1條

1 王巧云;光纖法布里—珀羅聲波傳感器及其應(yīng)用研究[D];大連理工大學(xué);2010年

中國(guó)碩士學(xué)位論文全文數(shù)據(jù)庫 前1條

1 宮奎;基于微加工的膜片式光纖傳感器的制作及其應(yīng)用研究[D];安徽大學(xué);2015年

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