基于電容陣列的柔性觸覺傳感器的研究
發(fā)布時間：2018-09-05 09:51
【摘要】：柔性電子器件具有可伸縮、彎曲、折疊的特性能夠完美的適應真實世界實物表面復雜3D結構及其結構實時變化的傳感要求,正受到人們越來越多的關注,在消費電子、智能機器人、生物醫(yī)療等領域,柔性電子器件也有著極為可觀的應用前景。本文主要研究了雙層平行板型結構(Parallel Plate Structure,簡稱PPS)和圓漸開線型結構(Circular Involute Structure,簡稱CIS)兩種結構的電容式柔性觸覺傳感器,包括結構設計到工藝制備以及性能測試,最后探究了器件在機械手指上的應用試驗。具體的研究內容和成果如下:1、設計出了兩種不同結構的電容陣列柔性觸覺傳感器。使用彈性模量較低的聚二甲基硅氧烷(Polydimethylsiloxane,簡稱PDMS)作為其結構的主要材料以及金屬Cu為電極材料。采用彎曲蛇形線連接各金屬電極板,提高了器柔韌性和延展性。金屬層與PDMS層之間增加聚酰亞胺(Polyimide,簡稱PI)基座,增強了器件抗機械拉伸度,保障了器件結構及其電學性能的穩(wěn)定。此外,將PPS結構電容器的介質層由條形柱狀陣列構成,提高了介質形變能力,改善了電容傳感器的靈敏度。2、探索出了一套成熟的電容式柔性觸覺傳感器的制備工藝,同時測試器件靈敏度及其溫度穩(wěn)定性。在超凈間實驗室條件下,借助微納加工儀器制備出PPS和CIS兩種結構的電容式觸覺傳感器。性能測試主要包括靈敏度測試以及溫度穩(wěn)定性,在1kHz～1 MHz頻率下PPS電容傳感器靈敏度約為:4.10%/N。在1kHz～1MHz頻率下CIS電容傳感器靈敏度為:0～3N作用了范圍內約為6.10%/N;在3N以上力作用時,靈敏度不斷減小至幾乎為零。在1MHz測試頻率下,PPS傳感器靈敏度的溫度系數幾乎為零,CIS傳感器靈敏度的溫度系數為-1.07 Pf/N℃3、探究了器件在機械手指上的應用試驗�；赑PS電容采用簡化工藝制備相應尺寸的器件。設計并制作外圍集成電路,用于穩(wěn)定精確的采集數據。試驗通過抓取蘋果操作來判斷其真假,體現了器件在仿生人造皮膚觸覺系統(tǒng)的應用前景。
[Abstract]:Flexible electronic devices with the characteristics of scalability, bending, folding can perfectly adapt to the real world physical surface complex 3D structure and the structure of real-time changes in the sensing requirements, is getting more and more attention, in consumer electronics, Flexible electronic devices also have a promising future in the fields of intelligent robots, biomedicine and so on. In this paper, the capacitive flexible tactile sensors with double layer parallel plate structure (Parallel Plate Structure, (PPS) and circular involute structure (Circular Involute Structure, (CIS) are studied, including structure design, process fabrication and performance test. Finally, the application test of the device on the mechanical finger is explored. The specific research contents and results are as follows: 1. Two kinds of capacitive array flexible tactile sensors with different structures are designed. Poly (dimethylsiloxane) (PDMS) with low elastic modulus was used as the main material of its structure and metal Cu as electrode material. The flexible and ductility of the device is improved by using the curved snake-shaped wire to connect each metal electrode plate. A polyimide (PI) base is added between the metal layer and the PDMS layer, which enhances the mechanical tensile resistance of the device and ensures the stability of the device structure and electrical properties. In addition, the dielectric layer of the PPS structure capacitor is composed of a strip cylindrical array, which improves the dielectric deformation ability, improves the sensitivity of the capacitive sensor, and explores the fabrication process of a mature capacitive flexible tactile sensor. The sensitivity and temperature stability of the device were also tested. Capacitive tactile sensors with PPS and CIS structures were fabricated by means of micro and nano processing instruments under the condition of super clean room laboratory. The performance tests mainly include sensitivity test and temperature stability. The sensitivity of PPS capacitive sensor is about: 4.10 / N at 1kHz~1 MHz frequency. At 1kHz~1MHz frequency, the sensitivity of CIS capacitive sensor is about 6.10 / N in the range of: 0 ~ 3N, and decreases to almost zero when the force is above 3N. The temperature coefficient of the sensitivity of the 1MHz sensor is almost zero. The temperature coefficient of the sensor is -1.07 Pf/N 鈩，
本文編號：2223922
[Abstract]:Flexible electronic devices with the characteristics of scalability, bending, folding can perfectly adapt to the real world physical surface complex 3D structure and the structure of real-time changes in the sensing requirements, is getting more and more attention, in consumer electronics, Flexible electronic devices also have a promising future in the fields of intelligent robots, biomedicine and so on. In this paper, the capacitive flexible tactile sensors with double layer parallel plate structure (Parallel Plate Structure, (PPS) and circular involute structure (Circular Involute Structure, (CIS) are studied, including structure design, process fabrication and performance test. Finally, the application test of the device on the mechanical finger is explored. The specific research contents and results are as follows: 1. Two kinds of capacitive array flexible tactile sensors with different structures are designed. Poly (dimethylsiloxane) (PDMS) with low elastic modulus was used as the main material of its structure and metal Cu as electrode material. The flexible and ductility of the device is improved by using the curved snake-shaped wire to connect each metal electrode plate. A polyimide (PI) base is added between the metal layer and the PDMS layer, which enhances the mechanical tensile resistance of the device and ensures the stability of the device structure and electrical properties. In addition, the dielectric layer of the PPS structure capacitor is composed of a strip cylindrical array, which improves the dielectric deformation ability, improves the sensitivity of the capacitive sensor, and explores the fabrication process of a mature capacitive flexible tactile sensor. The sensitivity and temperature stability of the device were also tested. Capacitive tactile sensors with PPS and CIS structures were fabricated by means of micro and nano processing instruments under the condition of super clean room laboratory. The performance tests mainly include sensitivity test and temperature stability. The sensitivity of PPS capacitive sensor is about: 4.10 / N at 1kHz~1 MHz frequency. At 1kHz~1MHz frequency, the sensitivity of CIS capacitive sensor is about 6.10 / N in the range of: 0 ~ 3N, and decreases to almost zero when the force is above 3N. The temperature coefficient of the sensitivity of the 1MHz sensor is almost zero. The temperature coefficient of the sensor is -1.07 Pf/N 鈩，
本文編號：2223922
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