【摘要】：航空發(fā)動(dòng)機(jī)智能化及其他機(jī)械系統(tǒng)的智能化需要原位集成制造的傳感器,為此研制了發(fā)動(dòng)機(jī)渦輪葉片原位集成高溫傳感器。該高溫傳感器采用MEMS微制造工藝將厚度在微米量級(jí)的微小傳感器原位集成在航空發(fā)動(dòng)機(jī)渦輪葉片表面,利用微技術(shù)制造的傳感器和標(biāo)準(zhǔn)的熱電偶進(jìn)行了一系列的高溫測(cè)量試驗(yàn)和一系列細(xì)致的高溫溫度表征測(cè)量研究。該微制造工藝攻克了兩項(xiàng)技術(shù)難關(guān):曲表面的光刻技術(shù)和高溫絕緣層的制作技術(shù)。渦輪葉片表面原位集成的微傳感器不僅可以原位測(cè)量高達(dá)800℃的環(huán)境溫度,并且具有很高的機(jī)械強(qiáng)度,可以承受高達(dá)40 g的振動(dòng)和100 g的沖力。研究還表明,在高溫測(cè)量環(huán)境下,高溫測(cè)量精度和高溫環(huán)境下的溫度場(chǎng)(高溫溫度的空間分布與升溫時(shí)間遲豫)密切相關(guān)。由于高溫環(huán)境溫度場(chǎng)的差異,可以產(chǎn)生高達(dá)10%的測(cè)量本征誤差。
[Abstract]:Intelligent aero-engine and other mechanical systems require in-situ integrated manufacturing sensors. Therefore, an in-situ integrated high-temperature sensor for engine turbine blades is developed. The high temperature sensor uses MEMS microfabrication process to integrate micro sensors with thickness of micron in situ on the surface of aero-engine turbine blade. A series of high temperature measurement experiments and a series of meticulous high temperature characterization measurements have been carried out by using the sensors and standard thermocouples fabricated by microtechnology. The micro-fabrication process has overcome two technical difficulties: lithography of curved surface and fabrication of high-temperature insulating layer. The in-situ integrated micro sensor not only can measure the ambient temperature up to 800 鈩，

本文編號(hào)：2218121