發(fā)布時(shí)間：2018-07-29 06:33

【摘要】：等離子體在放電過程中會(huì)受到不同因素的影響,比如電源的頻率、放電氣體種類、電極間距等。以往的控制方式多為手動(dòng)操作,依舊操作者的經(jīng)驗(yàn)、對(duì)實(shí)驗(yàn)情況的掌握程度、對(duì)實(shí)驗(yàn)操作的熟練程度來決定實(shí)驗(yàn)結(jié)果,實(shí)驗(yàn)的結(jié)果會(huì)因?yàn)椴僮髡叩牟煌嬖诓町�。本論文在這樣的基礎(chǔ)上設(shè)計(jì)了自由燃燒電弧電極間距控制系統(tǒng)和大氣壓射頻等離子體功率控制系統(tǒng),主要的研究工作包括:1)根據(jù)電路的工作原理,選擇了恰當(dāng)?shù)恼鳌V波和穩(wěn)壓電路,并且根據(jù)實(shí)際需要,選擇了電路中各個(gè)元器部件,設(shè)計(jì)了供電電路。并且,根據(jù)控制需求和控制原理,通過對(duì)比不同的控制方式,選擇適合的PID參數(shù),編寫控制程序。2)根據(jù)實(shí)驗(yàn)所需要達(dá)到的真空度要求,重新設(shè)計(jì)和改造了真空腔體。并且設(shè)計(jì)了電極間距控制系統(tǒng),制作電路板和控制盒,來保證在實(shí)際操作過程中的安全性。最后通過實(shí)驗(yàn),研究了在相同電流的工況下,改變電極間距對(duì)等離子體電弧的影響,同時(shí)進(jìn)行研究的還有,在電極間距保持不變的情況下,改變電流對(duì)于等離子體電弧的影響,通過實(shí)驗(yàn)來驗(yàn)證控制效果。3)針對(duì)實(shí)驗(yàn)室中需要處理的對(duì)象,重新設(shè)計(jì)了大氣壓射頻等離子體發(fā)生器的結(jié)構(gòu),并且根據(jù)進(jìn)氣量的需求優(yōu)化了發(fā)生器的進(jìn)氣結(jié)構(gòu),讓進(jìn)氣更加均勻。設(shè)計(jì)了光強(qiáng)度的反饋系統(tǒng)來控制控制放電電源。最后通過實(shí)驗(yàn),研究了在相同的進(jìn)氣量條件下,功率的變化對(duì)于光強(qiáng)度變化的影響;同樣進(jìn)行的還有在保證功率不變的情況下,改變進(jìn)氣量對(duì)于放電光強(qiáng)度的影響。
[Abstract]:The plasma is affected by different factors, such as the frequency of power supply, the type of discharge gas, the distance between electrodes and so on. In the past, most of the control methods are manual operation, but the experience of the operator is still the same. The degree of mastery of the experimental situation and the proficiency of the experimental operation determine the results of the experiment, and the results of the experiment will be different because of the difference of the operator. In this paper, a free combustion arc electrode spacing control system and an atmospheric pressure RF plasma power control system are designed. The main research work includes: 1) according to the working principle of the circuit, the appropriate rectifier is selected. Filter and voltage stabilizer circuit, and according to the actual needs, selected the various components of the circuit, designed the power supply circuit. According to the control requirements and control principles, by comparing different control methods, selecting suitable PID parameters, writing control program .2) according to the vacuum degree requirements of the experiment, the vacuum cavity is redesigned and modified. The control system of electrode spacing is designed, and the circuit board and control box are made to ensure the safety in practical operation. Finally, the influence of changing the electrode spacing on the plasma arc is studied under the same current condition, and the influence of changing the current on the plasma arc is also studied when the electrode spacing remains constant. The structure of the atmospheric pressure RF plasma generator is redesigned and the intake structure is optimized according to the demand of the air intake to make the air intake more uniform. A light intensity feedback system is designed to control the discharge power supply. Finally, the influence of the power change on the light intensity is studied under the condition of the same air intake, and the influence of the change of the air intake on the discharge light intensity is also studied under the condition of keeping the same power.
【學(xué)位授予單位】：華北理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TP273;O53

【參考文獻(xiàn)】

相關(guān)期刊論文 前6條

1 萬真真;王永清;施寧;周穎昌;唐予軍;王光磊;;輝光放電光譜激發(fā)源的射頻功率驅(qū)動(dòng)及自動(dòng)控制系統(tǒng)[J];高電壓技術(shù);2016年06期

2 萬真真;王永清;李小佳;王海舟;施寧;;直流輝光放電等離子體激發(fā)光源自動(dòng)調(diào)節(jié)控制系統(tǒng)[J];光譜學(xué)與光譜分析;2011年03期

3 孟江燕;李偉東;王云英;;低溫等離子體表面改性高分子材料研究進(jìn)展[J];表面技術(shù);2009年05期

4 金文,孫奉?yuàn)?何翔;等離子體滲氮工藝自動(dòng)控制系統(tǒng)方案與設(shè)計(jì)[J];計(jì)算機(jī)測(cè)量與控制;2005年04期

5 呂小云;幾種數(shù)字PID控制調(diào)節(jié)規(guī)律特點(diǎn)的研究[J];甘肅科學(xué)學(xué)報(bào);2002年02期

6 范詠峰,李平;淺析PID參數(shù)整定[J];中國儀器儀表;2002年03期

相關(guān)碩士學(xué)位論文 前4條

1 李會(huì);基于電流互感器的高壓電流測(cè)量技術(shù)研究[D];燕山大學(xué);2013年

2 邊麗華;PID控制器參數(shù)自整定方法的研究與實(shí)現(xiàn)[D];大連理工大學(xué);2009年

3 宮傳;一種高頻高壓電源的研制[D];大連理工大學(xué);2008年

4 何芝強(qiáng);PID控制器參數(shù)整定方法及其應(yīng)用研究[D];浙江大學(xué);2005年

，

本文編號(hào)：2151831