球碟轉(zhuǎn)子式微陀螺接口檢測(cè)電路設(shè)計(jì)與優(yōu)化
發(fā)布時(shí)間：2018-07-25 16:49
【摘要】：陀螺儀傳感器是一種應(yīng)用在慣性空間中的裝置,用于檢測(cè)角位移和相對(duì)角速度,在軍用領(lǐng)域和民用領(lǐng)域有著普遍地應(yīng)用,已經(jīng)成為國(guó)內(nèi)外眾多科研機(jī)構(gòu)的研究熱點(diǎn)。在目前關(guān)于轉(zhuǎn)子式陀螺的研究中,還存在檢測(cè)精度不夠高,轉(zhuǎn)子轉(zhuǎn)速低,加工成本高等問(wèn)題,因此哈爾濱工業(yè)大學(xué)MEMS中心提出了一種球碟轉(zhuǎn)子式微陀螺儀,該陀螺具有高精度、轉(zhuǎn)速高、低成本等明顯的優(yōu)勢(shì)。本文是基于球碟轉(zhuǎn)子式微陀螺設(shè)計(jì)了一款接口檢測(cè)ASIC電路。本文詳細(xì)地分析球碟轉(zhuǎn)子式陀螺微結(jié)構(gòu)及其工作原理,最終確定以相敏解調(diào)技術(shù)為核心的檢測(cè)電路方案,著重對(duì)整個(gè)接口檢測(cè)電路的進(jìn)行系統(tǒng)設(shè)計(jì)與模塊劃分,詳細(xì)具體地完成各個(gè)電路單元的行為級(jí)設(shè)計(jì),從而實(shí)現(xiàn)整體接口檢測(cè)ASIC電路的設(shè)計(jì)。在完成ASIC電路設(shè)計(jì)過(guò)程中,針對(duì)檢測(cè)電路的噪聲分析,重點(diǎn)實(shí)現(xiàn)C/V轉(zhuǎn)換電路單元和濾波放大單元的低噪聲設(shè)計(jì),以及正弦載波信號(hào)電路單元的自動(dòng)穩(wěn)幅控制設(shè)計(jì),以確保ASIC電路達(dá)到降低輸出噪聲的要求。同時(shí)針對(duì)開(kāi)關(guān)相敏解調(diào)信號(hào)的相位問(wèn)題,通過(guò)0°~-180°移相電路單元的設(shè)計(jì),實(shí)現(xiàn)解調(diào)方波信號(hào)相位誤差的調(diào)整,提升ASIC電路的線性度。本文綜合了整體電路的指標(biāo)要求,在Cadence軟件平臺(tái)下完成了對(duì)檢測(cè)ASIC電路的整體以及各個(gè)單元模塊的行為級(jí)設(shè)計(jì),驗(yàn)證檢測(cè)電路的性能。從仿真結(jié)果分析得出,ASIC檢測(cè)電路的檢測(cè)范圍為5×10-2pF~5×10-8pF,電容相對(duì)分辨率為1×10-8,刻度因數(shù)為57.0938V/pF,非線性誤差為0.021%,等效輸出噪聲電壓為383.3nV/√Hz@40Hz。本文通過(guò)Cadence的Virtuoso工具進(jìn)行版圖設(shè)計(jì),在0.35μm的CMOS工藝下完成了整體ASIC的版圖設(shè)計(jì),其版圖面積為3mm×2.85mm,并且完成了整體ASIC電路的后仿真驗(yàn)證,結(jié)果滿足接口檢測(cè)電路的設(shè)計(jì)要求。
[Abstract]:Gyroscope sensor is a kind of device used in inertial space, which is used to detect angular displacement and relative angular velocity. Gyroscope sensor has been widely used in military and civil fields, and has become a hot research topic in many research institutions at home and abroad. In the current research on rotor gyroscope, there are still some problems, such as low measuring precision, low rotor speed and high machining cost. Therefore, the MEMS Center of Harbin University of Technology has put forward a kind of spherical disk rotor micro-gyroscope, which has high precision. High speed, low cost and other obvious advantages. In this paper, an interface detection ASIC circuit is designed based on the spherical disk rotor micro gyroscope. In this paper, the microstructure and working principle of the spherical disk rotor gyroscope are analyzed in detail, and the detection circuit scheme with phase sensitive demodulation technology as the core is determined. The system design and module partition of the whole interface detection circuit are emphasized. The behavior level design of each circuit unit is completed in detail, and the design of the whole interface detecting ASIC circuit is realized. In the process of ASIC circuit design, the low noise design of C / V conversion circuit unit and filter amplifier unit and the automatic amplitude stabilization control design of sinusoidal carrier signal circuit unit are mainly realized for the noise analysis of the detection circuit. To ensure that the ASIC circuit meets the requirements of reducing output noise. At the same time, aiming at the phase problem of switch phase sensitive demodulation signal, the phase error adjustment of demodulation square wave signal is realized through the design of 0 擄-180 擄phase shift circuit unit, and the linearity of ASIC circuit is improved. In this paper, the index requirements of the whole circuit are synthesized, and the design of the whole detection ASIC circuit and the behavior level of each unit module is completed under the Cadence software platform, and the performance of the detection circuit is verified. The results of simulation show that the detection range is 5 脳 10-2pF~5 脳 10 ~ (-8) PF, the relative resolution of capacitance is 1 脳 10 ~ (-8), the calibration factor is 57.0938 V / PF, the nonlinear error is 0.021, and the equivalent output noise voltage is 40 Hz / 383.3nV/. In this paper, the layout design of the whole ASIC is completed with the Virtuoso tool of Cadence, and the layout area of the whole ASIC is 3mm 脳 2.85mm in 0.35 渭 m CMOS process. The post-simulation verification of the whole ASIC circuit is completed, and the results meet the design requirements of the interface detection circuit.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN96;TP212
[Abstract]:Gyroscope sensor is a kind of device used in inertial space, which is used to detect angular displacement and relative angular velocity. Gyroscope sensor has been widely used in military and civil fields, and has become a hot research topic in many research institutions at home and abroad. In the current research on rotor gyroscope, there are still some problems, such as low measuring precision, low rotor speed and high machining cost. Therefore, the MEMS Center of Harbin University of Technology has put forward a kind of spherical disk rotor micro-gyroscope, which has high precision. High speed, low cost and other obvious advantages. In this paper, an interface detection ASIC circuit is designed based on the spherical disk rotor micro gyroscope. In this paper, the microstructure and working principle of the spherical disk rotor gyroscope are analyzed in detail, and the detection circuit scheme with phase sensitive demodulation technology as the core is determined. The system design and module partition of the whole interface detection circuit are emphasized. The behavior level design of each circuit unit is completed in detail, and the design of the whole interface detecting ASIC circuit is realized. In the process of ASIC circuit design, the low noise design of C / V conversion circuit unit and filter amplifier unit and the automatic amplitude stabilization control design of sinusoidal carrier signal circuit unit are mainly realized for the noise analysis of the detection circuit. To ensure that the ASIC circuit meets the requirements of reducing output noise. At the same time, aiming at the phase problem of switch phase sensitive demodulation signal, the phase error adjustment of demodulation square wave signal is realized through the design of 0 擄-180 擄phase shift circuit unit, and the linearity of ASIC circuit is improved. In this paper, the index requirements of the whole circuit are synthesized, and the design of the whole detection ASIC circuit and the behavior level of each unit module is completed under the Cadence software platform, and the performance of the detection circuit is verified. The results of simulation show that the detection range is 5 脳 10-2pF~5 脳 10 ~ (-8) PF, the relative resolution of capacitance is 1 脳 10 ~ (-8), the calibration factor is 57.0938 V / PF, the nonlinear error is 0.021, and the equivalent output noise voltage is 40 Hz / 383.3nV/. In this paper, the layout design of the whole ASIC is completed with the Virtuoso tool of Cadence, and the layout area of the whole ASIC is 3mm 脳 2.85mm in 0.35 渭 m CMOS process. The post-simulation verification of the whole ASIC circuit is completed, and the results meet the design requirements of the interface detection circuit.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN96;TP212
【參考文獻(xiàn)】
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