本文選題：MEMS + 薄膜體聲波諧振器　； 參考：《納米技術(shù)與精密工程》2017年06期

【摘要】：基于MEMS工藝制造的薄膜體聲波諧振器(FBAR)是一種新型的質(zhì)量傳感器,在氣相環(huán)境中具有極高的Q值,但在液相環(huán)境中,由于液體阻尼作用,FBAR的Q值大幅降低.本文提出了一種諧振器與微流道集成的解決方案,避免了諧振器和液體的大范圍接觸,有效提高了諧振器的Q值.通過設(shè)計新的加工流程,利用標(biāo)準(zhǔn)MEMS工藝實(shí)現(xiàn)了微流道和諧振器的集成.將該集成器件用于葡萄糖濃度的檢測,結(jié)果表明其具有較小的檢測極限和極高的線性度.由于充分利用了MEMS技術(shù)能進(jìn)行大批量器件加工的特點(diǎn),可極大地降低器件成本.集成微流道后,大大降低了樣品的使用量,可實(shí)現(xiàn)對微升級別樣品的檢測,在微量檢測中具有重要的應(yīng)用前景.
[Abstract]:Thin film bulk acoustic resonator (FBAR) based on MEMS process is a new mass sensor with high Q value in gas phase environment, but in liquid phase environment, the Q value of FBAR decreases greatly due to liquid damping. In this paper, a solution for the integration of resonator and microchannel is proposed, which avoids the contact between the resonator and the liquid in a wide range and effectively increases the Q value of the resonator. The integration of microchannel and resonator is realized by designing a new machining process and using standard MEMS process. The integrated device is applied to the detection of glucose concentration. The results show that the detection limit is small and the linearity is very high. The cost of devices can be greatly reduced because of the full use of MEMS technology, which can be used for mass fabrication of devices. With the integration of microchannels, the amount of sample used is greatly reduced, and the detection of microupgrade samples can be realized, which has an important application prospect in micro detection.
【作者單位】： 精密測試技術(shù)及儀器國家重點(diǎn)實(shí)驗(yàn)室(天津大學(xué));
【分類號】：TP212
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本文編號：2083227